HRX-OM-M091

Read Address Quantity to Read Hi Lo Hi Lo 30 30 30 30 30 30 30 31 Response message (Slave to Master) Start Slave Address Function Data LRC End 3A 30 31 30 33 30 43 0D 0A Byte Count Read Data1 Hi Lo 30 32 30 30 45 45 HRS Series 4.5 Message configuration 4-9 HRX-OM-M091 Chapter 4 MODBUS communication function 4.6 Function codes Table 4.6-1 shows function codes to read or write register.

HRX-OM-Q033

Read Address Quantity to Read Hi Lo Hi Lo 30 30 30 30 30 30 30 31 Response message (Slave to Master) Start Slave Address Function Data LRC End 3A 30 31 30 33 30 43 0D 0A Byte Count Read Data1 Hi Lo 30 32 30 30 45 45 HRSH Series 4.5 Message configuration 4-9 HRX-OM-Q033 Chapter 4 MODBUS communication function 4.6 Function codes Table 4.6-1 shows function codes to read or write register.

HRX-OM-S010

Response message Code Contents Code Contents 01 Slave Address 01 Slave Address 03 Function 03 Function 0 Head address of specified register 02 Quantity of bytes to read 0001 Quantity of register to read 00EE Information of 0h (circulating fluid discharge temperature: 23.8 oC) FB LRC 0C LRC Request message (Master to Slave) Start Slave Address Function Data LRC End 3A 30 31 30 33 46 42 0D 0A

HRX-OM-T004

Read Address Quantity to Read Hi Lo Hi Lo 30 30 30 30 30 30 30 31 Response message (Slave to Master) Start Slave Address Function Data LRC End 3A 30 31 30 33 30 43 0D 0A Byte Count Read Data1 Hi Lo 30 32 30 30 45 45 HRS090 Series 4.5 Message configuration 4-9 HRX-OM-T004 Chapter 4 MODBUS communication function 4.6 Function codes Table 4.6-1 shows function codes to read or write register

HRX-OM-R028

Read Address Quantity to Read Hi Lo Hi Lo 30 30 30 30 30 30 30 31 Response message (Slave to Master) Start Slave Address Function Data LRC End 3A 30 31 30 33 30 43 0D 0A Read Data1 Byte Count Hi Lo 30 32 30 30 45 45 HRSH Series 4.5 Message configuration 4-9 HRX-OM-R028 Chapter 4 MODBUS communication function 4.6 Function codes Table 4.6-1 shows function codes to read or write register.

LEC-OM02904

PD01 0h PD02 0h PD03 0h PD04 0h PD05 0h PD06 0h PD07 *DO1 1(CN3-13) 0005h CN3-13MBR 0 0 CN3-13 CN3-13 00 OFF 0A SA(2) 01 (3) 0B VLC(5) 02 RD 0C ZSP 03 ALM 0D (3) 04 INP(14) 0E (3) 05 MBR 0F CDPS 06 DB 10 (3) 07 TLC(4) 11 ABSV(1) 08 WNG 121F (3) 09 BWNG 203F (3) 1. OFF 2. OFF 3. 4. OFF 5.

LEC-OM02704CN

PD07 *DI3 3(CN6-3) CN6-3 PD06 000Ah 0 0 CN6-3 CN6-3 PD08 *DI4 4(CN6-4) CN6-4 PD06 000Bh 0 0 CN6-4 CN6-4 6 33 6 PD09 *DO1 1(CN6-14) CN6-14 0002h 0 0 CN6-14 CN6-14 () 00 OFF 02 RD 03 ALM 04 INP 05 MBR 06 DB 07 TLC 08 WNG 09 BWNG 0A SA 0C ZSP 0F CDPS 23 CPO 24 ZP 25 POT 26 PUS 27 MEND 38 1 PT0 39 2 PT1 3A 3 PT2 3B 4 PT3 3C 5 PT4 3D 6 PT5 3E 7 PT6 3F 8 PT7 .

OMS0020

65 41 A 97 61 a 2 2 STX 34 22 " 66 42 B 98 62 b 3 3 ETX 35 23 # 67 43 C 99 63 c 4 4 EOT 36 24 $ 68 44 D 100 64 d 5 5 ENQ 37 25 % 69 45 E 101 65 e 6 6 ACK 38 26 & 70 46 F 102 66 f 7 7 BEL 39 27 ' 71 47 G 103 67 g 8 8 BS 40 28 ( 72 48 H 104 68 h 9 9 HT 41 29 ) 73 49 I 105 69 i 10 0A LF 42 2A * 74 4A J 106 6A j 11 0B VT 43 2B + 75 4B K 107 6B k 12 0C FF 44 2C , 76 4C L 108 6C l 13 0D CR 45 2D

Direct Solenoid

.| 0 riiqr DIMENSIONS a o E F o It 10.87 (27812.8i, (4 494 (r00) 7.m (197) 1.22 (31) 0.47 0a 2.90 06) 2.88 (88) lnlrs ln Fbronlhoacs SERIES DIRECTIO]IAL AIR VALVES DIMENSIONS/PARTS LIST NVS 4)24,4C34 NVS4O44,454 NVS4?4,42 4,424p T* I !..

Fieldbus system EtherCAT compatible SI Unit

. -99No.EX-OMA1023 Digital input unit (EX600-DX###) Index Name (Meaning) Type Value 40x0:0 Unit parameters UNSIGNED8 10 40x0:01 Monitor short circuit(power) Enum0800 0=Disable 1=Enable 40x0:05 Inrush current filter Enum0800 0=Disable 1=Enable 0=0.1 ms 1=1 ms 2=10 ms 3=20 ms 40x0:09 Input filtering time Enum0806 0=1 ms 1=15 ms 2=100 ms 3=200 ms 40x0:0A Input extension time Enum0807 40x1:0

PFxx-OMX0007

hysteresis OUT2 14 Accumulated output mode 15 Accumulated pluse output mode 16 Err mode 17 oFF mode 18 Flow bottom value 19 Flow peak value 20 Accumulated flow value 21 Switch output mode/communication mode display SIO mode/SDCI mode (Refer to page 13) 22 Option display Line name, not displayed -48No.PF-OMX0007-A [Line name communication data] Value (16 hex 00 01 02 03 04 05 06 07 08 09 0A

Shock Absorbers and Rate Controls

35 88 0a 406 203 74 r08 Noles: 1.Al shock absofbers will fu nct on satisfactor ly at 5% of their m aximu rn rated energy per cyc le. lf lees than 5%, a smaller model sholld be specified. 2. Airloil (AoEM, LRAOENa) mode s mar. energy per hour is 20% hgher tl-ran the standard OENI/LROEM mode s. Al d mensions in rn llimeters. 3. For rnount ng accessories, see pages I20. 4.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

_ Notch depth selection 0: -40 dB 1: -14 dB 2: -8 dB 3: -4 dB 0h x _ _ _ For manufacturer setting 0h Table 5.4 Shaft resonance suppression filter setting frequency selection Setting value Frequency [Hz] Setting value Frequency [Hz] 00 Disabled 10 562 01 Disabled 11 529 02 4500 12 500 03 3000 13 473 04 2250 14 450 05 1800 15 428 06 1500 16 409 07 1285 17 391 08 1125 18 375 09 1000 19 360 0A

OMU0023

65 41 A 97 61 a 2 2 STX 34 22 " 66 42 B 98 62 b 3 3 ETX 35 23 # 67 43 C 99 63 c 4 4 EOT 36 24 $ 68 44 D 100 64 d 5 5 ENQ 37 25 % 69 45 E 101 65 e 6 6 ACK 38 26 & 70 46 F 102 66 f 7 7 BEL 39 27 ' 71 47 G 103 67 g 8 8 BS 40 28 ( 72 48 H 104 68 h 9 9 HT 41 29 ) 73 49 I 105 69 i 10 0A LF 42 2A * 74 4A J 106 6A j 11 0B VT 43 2B + 75 4B K 107 6B k 12 0C FF 44 2C , 76 4C L 108 6C l 13 0D CR 45 2D

Digital Gap Checker ( compatible)

"Line name communication data" Value (16 decimal 00 01 02 03 04 05 06 07 08 09 0A 0B 0C 0D 0E 0F number) 7 seg Display digit 11 seg Value (16 decimal 10 11 12 13 14 15 16 17 18 19 1A 1B 1C 1D 1E 1F number) 7 seg Display digit 11 seg Value (16 decimal 20 21 22 23 24 25 26 27 28 29 2A 2B 2C 2D 2E 2F number) 7 seg Display digit 11 seg Remark The value of cannot be displayed -105No.PS-OMW0009

Digital Flow Switch ( compatible)

12 Wind mode upper side set value 13 Wind mode hysteresis OUT2 14 Accumulated output mode 15 Accumulated pluse output mode 16 Err mode 17 oFF mode 18 Flow bottom value 19 Flow peak value 20 Accumulated flow value 21 Switch output mode/communication mode display SIO mode/SDCI mode display -87No.PF-OMZ0002-A [Line name communication data] Value (16 hex number) 00 01 02 03 04 05 06 07 08 09 0A

Digital Flow Switch ( compatible)

12 Wind mode upper side set value 13 Wind mode hysteresis OUT2 14 Accumulated output mode 15 Accumulated pluse output mode 16 Err mode 17 oFF mode 18 Flow bottom value 19 Flow peak value 20 Accumulated flow value 21 Switch output mode/communication mode display SIO mode/SDCI mode display -83No.PF-OMY0002 [Line name communication data] Value (16 hex number) 00 01 02 03 04 05 06 07 08 09 0A

PFxx-OMX0002

hysteresis OUT2 14 Accumulated output mode 15 Accumulated pluse output mode 16 Err mode 17 oFF mode 18 Flow bottom value 19 Flow peak value 20 Accumulated flow value 21 Switch output mode/communication mode display SIO mode/SDCI mode (Refer to page 13) 22 Option display Line name, not displayed -83No.PF-OMX0002-B [Line name communication data] Value (16 hex 00 01 02 03 04 05 06 07 08 09 0A

Vacuum

F810G06 zFB10r{5,.07 o zFB200-0c zF8201-O7 c zFB2m-m o zFB3tx)-0a,-10 zFB30tnl o zFB401-13 Application To Ejector Type System 0 014 (0.001) 0.007 (0.00os) 0.0043 (0.0003) (s) 0.1 18 0.25 0.35 (51 (4 (1ol 1 . r 1 . 8 2 . 5 3 5 7 . 1 (mo) (301 (5ol (70] (1001 Flow SCFM (N/min) Construction/Packing List =t O Insta a on . th6ck caretully lN and OUT locations before mounting. .

Vacuum

F810G06 zFB10r{5,.07 o zFB200-0c zF8201-O7 c zFB2m-m o zFB3tx)-0a,-10 zFB30tnl o zFB401-13 Application To Ejector Type System 0 014 (0.001) 0.007 (0.00os) 0.0043 (0.0003) (s) 0.1 ) 18 0.25 0.35 (51 (4 (1ol 1 . r 1 . 8 2 . 5 3 5 7 . 1 (mo) (301 (5ol (70] (1001 Flow SCFM (N/min) Construction/Packing List =t O Insta a on . th6ck caretully lN and OUT locations before mounting. .