V100

VK VZ Note) For VQZ100, refer to page 4-14-13.

M-E05-1-LQ1

4 4-11 LQ1-4N11 LQ1-4B11 4-13 LQ1-4N13 LQ1-4B13 4-13 LQ1-4N13 LQ1-4B13 LQ1T4A-R6 4 3-07 LQ1-3N07 LQ1-3B07 5-13 LQ1-5N13 LQ1-5B13 5-13 LQ1-5N13 LQ1-5B13 LQ1T4A-R7 4 4-11 LQ1-4N11 LQ1-4B11 4-11 LQ1-4N11 LQ1-4B11 4-13 LQ1-4N13 LQ1-4B13 LQ1T4A-R8 4 3-07 LQ1-3N07 LQ1-3B07 3-07 LQ1-3N07 LQ1-3B07 5-13 LQ1-5N13 LQ1-5B13 LQ1T4A-R10 4 2-07 LQ1-2N07 LQ1-2B07 4-13 LQ1-4N13 LQ1-4B13 2-07 LQ1-2N07 LQ1-

Air Slide Table

D A A MXQ16B 57 31 17 30 16 13 MXQ20B 64 32 14 31 13 18 The MXQ6(A, B) is not available.

Table of Contents

Since there are other applicable auto switches than listed, refer to page 8-23-13 for details.

5

119 12 12 1/8 12.5 12.5 M5 x 0.8 32 79 11 11 121 12 12 1/8 10.5 10.5 1/8 40 87 12 12 139 13 13 1/8 13 10 1/8 Up to 1500 50 102 13 13 162 14 14 1/4 14 14 1/4 63 102 13 13 162 14 14 1/4 14 14 1/4 80 122 196 20 20 3/8 17.5 17.5 3/8 100 122 196 20 20 1/2 17.5 17.5 1/2 Female Rod End (mm) Bore size A1 H MM ZZ 20 8 13 M4 x 0.7 92 25 8 14 M5 x 0.8 93 32 12 14 M6 x 1 95 40 13 15 M8 x 1.25 104

Air Cylinder

PD Mounting 20 12 12 13 24.2 6 25 12 10 (12) 13 26.7 6 32 12 10 (12) 13 30.2 6 40 12 10 (12) 16 34.6 8 50 13 13 20 40.6 10 63 13 13 20 47.1 10 HH Applicable Tubing O.D./I.D. Note) ( ): Long stroke Bore size (mm) 20 25 32 40 50 63 Applicable tubing O.D. (mm) 6/4 6/4 6/4 8/6 10/7.5 10/7.5 Applicable tubing material Can be used for either nylon, soft nylon or polyurethane tubing.

Made to Order

CG1(K)R series Width across flats B2 Width across flats MA MI MM2 H2 MK Stroke MT ML + Adjustment MH + Stroke + Adjustment S + Stroke ZZ + 2 x Stroke + Adjustment (A: 25 mm, B: 50 mm) CG1(K)R Series (mm) B2 10 13 13 17 19 19 H2 3.6 5 5 6 8 8 MA 12 17 17 19 24 24 MH 38 41 41 47 60 60 MI 14 20 20 25 32 32 MK 7 9 9 10 13 13 ML 18 18 18 24 32 32 MM2 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.25 M14 x

Compact 5-Port Solenoid Valve

14 15 16 L1 159.8 166.3 172.8 179.3 185.8 192.3 198.8 205.3 211.8 218.3 224.8 231.3 237.8 244.3 250.8 L2 56.4 62.9 69.4 75.9 82.4 88.9 95.4 101.9 108.4 114.9 121.4 127.9 134.4 140.9 147.4 L3 185.5 198 198 210.5 210.5 223 223 235.5 235.5 248 248 260.5 273 273 285.5 L4 175 187.5 187.5 200 200 212.5 212.5 225 225 237.5 237.5 250 262.5 262.5 275 L5 13 16 13 16 13 16 12 15 12 15 12 15 18 15 18

SMC

-/22-MXS25L-10 13-/22-MXS25L-20 13-/22-MXS25L-30 13-/22-MXS25L-40 13-/22-MXS25L-50 13-/22-MXS25L-75 13-/22-MXS25L-100 13-/22-MXS25L-125 13-/22-MXS25L-150 151 MXS Air slide table 1322Specific Product Precautions Made to Order -X52 Use of fluoro rubber for dust cover and dust plug Be sure to read before handling. 13-MXS Refer to standard products How to Order -X52 Precautions Material used

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

-/22-MXQ2010 13-/22-MXQ2020 13-/22-MXQ2030 13-/22-MXQ2040 13-/22-MXQ2050 13-/22-MXQ2075 13-/22-MXQ20-100 13-/22-MXQ20-125 13-/22-MXQ20-150 Note) Note) 1322Note) Refer to the bottom view of MXQ20-50. 817 MXQ 1322Air Slide Table Dimensions: MXQ20 1322Axial piping (20): MXQ20-P 1322Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors

Vacuum Pad

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

Vacuum Pad

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

Vacuum Pad

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

13

Best Pneumatics 13 Vacuum Equipment Vacuum Module: ZX P. 13-2-4 ZX Vacuum Module: ZR P. 13-3-4 ZR Vacuum Ejector: ZM P. 13-4-2 ZM Vacuum Ejector with Solid State Timer: ZMA P. 13-4-23 ZH Vacuum Ejector: ZH P. 13-5-2 ZU In-line Vacuum Ejector: ZU P. 13-6-3 ZL Vacuum Ejector: ZL P. 13-7-4 ZY Ejector Valve Unit: ZYY/ZYX P. 13-8-4 ZQ Compact Vacuum Ejector: ZQ P. 13-9-2 ZF Air Suction

Air Cylinder Series MB

16 47 51 58 58 72 72 46 52 65 75 95 114 33.5 38.5 45 50 62 71.5 32.5 38 46.5 56.5 72 89 45 52.5 59 64 76.5 86 12 16 20 20 25 30 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 9 12 13 13 16 16 6 6 7 7 10 10 30 35 40 45 45 55 15 21 21 21 30 30 13 13 14 14 20 20 16 16 16 16 16 16 13 14 15.5 16.5 19 19 4 4 5 5 5 5 21 27 27.5 28.5 37 37 -W Stroke range (mm) Bore size (mm) MO N NB P RF

5 Port Solenoid Valve Series SV1000/2000/3000/4000

L Dimension n: Stations L n 2 148 137.5 119.3 14.5 5 185.5 175 150.8 17.5 6 185.5 175 161.3 12 7 198 187.5 171.8 13 8 210.5 200 182.3 14 9 223 212.5 192.8 15 10 235.5 225 203.3 16 11 248 237.5 213.8 17 12 248 237.5 224.3 12 13 260.5 250 234.8 13 14 273 262.5 245.3 14 15 285.5 275 255.8 15 16 298 287.5 266.3 16 17 310.5 300 276.8 17 18 310.5 300 287.3 11.5 4 173 162.5 140.3 16.5 3 160.5 150

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

15 16 Stations n L1 L2 L3 91.5 81 102 112.5 123 133.5 144 154.5 173 160.5 185.5 198 210.5 210.5 223 235.5 148 260.5 273 285.5 298 310.5 310.5 162.5 150 175 187.5 200 200 212.5 225 137.5 250 262.5 275 287.5 300 300 234 70.5 181.5 192 202.5 213 223.5 11.5 L4 14 13 12 15 16 17 12 13 14 13 14 15 16 17 For 11 or more stations, two SUP/EXH blocks are included. 1.2-120 Type45A NA Base Mounted

ZX

Refer to pages 13-2-4 to 13-2-5 for ejector system unit. Refer to pages 13-2-32 for ejector system manifold. Refer to pages 13-2-40 to 13-2-41 for external vacuum supply system unit. Single unit Single unit 13-2-68 to 13-2-72 Manifold Manifold Refer to page 13-2-54 for external vacuum supply system manifold.

LEC-OM02704CN

UL/C-ULK5 13 19 13 13.6 (1) (a) () SD 1(4.12) (b) ( ) (c) () 13 20 13 M 1. 2. 3. () 4. 5. 1. 2. 3. () 4. 1. ()(FR-BIF()) 2.

ZP

-11-57 Series ZP Vacuum Pad/Components Refer to page 13-11-62 to 13-11-64 for part numbers of e to y.