HRX-OM-M005

HRX-OM-M005-G Operation Manual Original Instructions Thermo Chiller HRZD020-WS-WS, HRZD020-W1S-W1S HRZD020-W1S-WS, HRZD020-WS-W1S Keep this manual available whenever necessary 2021 SMC CORPORATION All Rights Reserved To the users Thank you for purchasing SMCs HRZ Thermo Chiller (hereinafter referred to as the Product).

Circulating Fluid: Fluorinated Fluids, -20 to 90°C, Option: -

Table of Contents

Displacement of Section A when force acts on Section F Displacement of Section A when force acts on Section F Guide central axis (1 axis type) F A F F For the double axis type, this is the cylinder's central axis.

NCQ2/CQ2

Note 2) Not available with bore size over 63mm, or strokes over 100mm. 12 mm 16 mm 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm 125 mm 140 mm 160 mm 180 mm 200 mm Body option Mounting B A D L G F Nil F C M Through hole (std.)

Magnetically Coupled Rodless Cylinder

Displacement of Section A when force acts on Section F Displacement of Section A when force acts on Section F F A F Guide central axis (1 axis type) F For the double axis type, this is the cylinders central axis.

Basic type / Direct mount type Series CY3B/CY3R

Displacement of Section A when force acts on Section F Displacement of Section A when force acts on Section F F A F Guide central axis (1 axis type) F For the double axis type, this is the cylinders central axis.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

force acts on Section F Displacement of Section A when force acts on Section F Guide central axis (1 axis type) F A F F For the double axis type, this is the cylinder's central axis.

CY1

M1 = F x L F A F F A L L L Opposite port side Guide central axis (single axis type) Port side For the dual axis type, this is the cylinder's central axis.

Basic Type/Direct Mount Type

B Counter bore depth C T T HP Y 0 -0.1 Note 1) L 2 x P (Piping port) 4 x J x E TC 4 x 3.2 X F WP WP D GW QW 4 x LD PW WS GP 4 x 6.5 CY3R6 2 x 4 x MM Thread depth M Switch rail W K HS Z + Stroke Q + Stroke G G HR CR CY3R25 to 63 Note 1) 50, 63: L 0 0.2 CY3R10 to 20 (mm) A 7 9 10.5 9 8.5 10.5 10 14 15 F 5.5 6.5 8 9 8.5 10.5 13 17 18 HC 18 25 31 38 43 54 66 84 96 HP 10.5 14 17 24 23.5 29 36

Profile Design ISO/VDMA Air Cylinder Series CP95

G Rear flange F Front flange L Foot C Male rear clevis D Female rear clevis 1.8-29

Table of Contents

N] F=-q x PA+w x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

5-Port Solenoid Valve

SY5l3 0 1l-lll1-ll-Wl-V02l (Top ported) Plug F (Max. 3) For "F" marking (Thread type) 26.8 14.5 4A X 2B PE F B A A 4 B 2 3EB 1P 5EA 1/8 (For threaded type) [4(A), 2(B) port] (16.2) (For threaded type) 25.9 One-touch fitting [4(A), 2(B) port] (For threaded type) Applicable tubing O.D.: 4, 5/32" 6, 1/4" 8, 5/16" (For 01 threaded type) (76.7) (62.3) * These figures show the SY5230-5Z1

Sine Rodless Cylinder Series REA/REB

A F F For the double axis type, this is the cylinders central axis.

REA/REB

M1 = F x L Port side A M2 = F x L M3 = F x L Note) Deflection: Displacement of section A when force acts on section F REAH10 REAH10 REAH10 Slider Type/Slide Bearing REAS Slider Type/Ball Bushing REAL 0.08 0.03 Deflection (mm) Deflection (mm) Deflection (mm) 0.02 0.06 0.02 0.04 0.01 0.01 0.02 0.5 1.5 2.5 0 0.5 1.5 0 0.5 1.0 1.5 0 1.0 2.0 Moment (Nm) 1.0 Moment (Nm) Moment (Nm) REAH15, 20,

REA/REB

F A F For the double axis type, this is the cylinders central axis.

REA/REB

F A F For the double axis type, this is the cylinders central axis.

Coolant valve

/VS) M12 connector type (Non-polar type) Surge voltage suppressor (WS/VS) Light/surge voltage suppressor (WZ/VZ) Light/surge voltage suppressor (WZ/VZ) 8 SGC200-OMM0002-F SGC / SGH Series Coolant Valve / Precautions 6 Be sure to read this before handling.

/

/VS) Surge voltage suppressor (WS/VS) (Ground) 3 () (+) 3 ( ) 2 1 Varistor Coil Varistor Coil 3 4 4 ( ) 4 (+) () 4-pin type Light/surge voltage suppressor (WZ/VZ) Light/surge voltage suppressor (WZ/VZ) (Ground) 3 ( ) 3 () (+) Varistor Coil NL 1 2 Varistor Coil 3 4 5 4 ( ) 4 (+) () 5-pin type Back page 4 Series SGH Specific Product Precautions 3 Be sure to read before handling.

155

solenoid type (Conduit terminal) P Pilot port 2 x 1/8" (Back side PE: Filter standard installation) J N I Manual override 2.3 12 Bracket G O L M F E 4 x K 2 1 D C H (2 locations) Main port A B A B C D E F G H I J K L M N O P Main port Model SGC2lll-ll10 SGC2lll-ll15 SGC3lll-ll20 SGC4lll-ll25 3/8 63 49.6 29 14.5 103.3 111.3 155.8 26 26 52 4.5 44.5 25 26.3 115 74.2 1/2 63 49.6 29 14.5 103.3

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g~ 57 WS I Bore F (mm) ' H IA IB ' L W N S WC ZZ GA GB 40 44 52 52 47 97 58 97 72 97 52 55 -49 58 49 58 37.5 43.5 49.5 37.5 43.5 I 5 7 30 10 30 10 30 12 194 194 194 52 60 52 74 50 55 63 69 49.5 5.5 * Pos$lble to fab(fcate the dImenSIOns of H and L othef than the standafd. N type (Semi-standard) 1 S mba. H L ZZ ~prE! .