Cooling Capacity: 030 (30 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: S (Pump Inverter Type), Option: DNWYZ (D+N+W+Y+Z)
Cooling Capacity: 030 (30 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: S (Pump Inverter Type), Option: Y (DI Control Kit)
Cooling Capacity: 30 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: N+Y
Cooling Capacity: 30 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: D+N
Cooling Capacity: 30 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: NPT Fitting
Cooling Capacity: 30 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: N+Y+Z
Cooling Capacity: 30 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: N+Z
Cooling Capacity: 30 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: Circulating Fluid Automatic Recovery
Cooling Capacity: 30 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: N+W+Z
Cooling Capacity: 30 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: D+N+W+Y+Z
Cooling Capacity: 30 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: DI Control Kit
Methyl Chloride SF6 CH3Cl Disilane Methyl Fluoride Si2H6 CH3F Silicon Tetrachloride Methanol SiCl4 CH3OH Silicon Tetrafluoride Methylsilane SiF4 CH3SiH3 Dichlorosilane Halocarbon 21 SiH2Cl2 CHCl2F Silane Chlorine SiH4 Cl2 Trichlorosilane Chlorine Trifluoride SiHCl3 ClF3 Sulfur Dioxide Carbon Monoxide SO2 CO Diethyltelluride Germane Te(C2H5)2 GeH4 Tungsten Hexafluoride Hydrogen Sulfide WF6 H2S
Cooling Capacity: 002 (2 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: S (Pump Inverter Type), Option: C (Analog Communication)
Cooling Capacity: 2 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: Analog Communication
Cooling Capacity: 030 (30 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: None, Option: C (Analog Communication)
Cooling Capacity: 030 (30 kW), Type: 1 (Ethylene Glycol), Pump Inverter Control: None, Option: C (Analog Communication)
Cooling Capacity: 030 (30 kW), Type: 1 (Ethylene Glycol), Pump Inverter Control: S (Pump Inverter Type), Option: C (Analog Communication)
Cooling Capacity: 30 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: Analog Communication
Cooling Capacity: 30 kW, Type: Ethylene Glycol, Pump Inverter Control: None, Option: Analog Communication
Cooling Capacity: 30 kW, Type: Ethylene Glycol, Pump Inverter Control: Pump Inverter Type, Option: Analog Communication