Cooling Capacity: 30 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: D+N

Cooling Capacity: 30 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: N+Y

Cooling Capacity: 30 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: Y+Z

Cooling Capacity: 30 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: NPT Fitting

Cooling Capacity: 30 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: Circulating Fluid Automatic Recovery

Cooling Capacity: 30 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: DI Control Kit

Cooling Capacity: 30 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: C+D+N+W

Cooling Capacity: 008 (8 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: S (Pump Inverter Type), Option: DYZ (D+Y+Z)

1

Applicable bore size B2 C2 d H2 CK1 SNJ-006B 6 8 9.2 M6 x 1.0 4 NTJ-006A 6 5.5 6.4 M3 x 0.5 2.4 Y-J016C 16 11 16.6 21 M5 x 0.8 SNJ-010C 10 11 12.7 M8 x 1.0 4 NTJ-010C 10 7 8.1 M4 x 0.7 3.2 Part no.

Air Cylinder Series CM2

-X Individual -X 1149 Series CM2X Basic Style (B) CM2XB Bore size Stroke G 2 x NN G H2 H1 Width across flats B2 Width across flats B1 2 x P (Rc, NPT, G) 2 x Eh8 NA D Effective thread length 2 x FL S + Stroke F A AL MM Width across flats KA NA N F H K N ZZ + Stroke Boss-cut style ZZ + Stroke (mm) H1 H G AL F A E MM P S ZZ B2 D H2 I FL K KA NA NN B1 N Bore size (mm) 0 0.033 0 0.033 0 0.033

Stainless Steel 316 Fittings

area (mm2) Weight (g) d M L Model H2 H1 O.D.

44

10 14 15.8 18.7 5.8 6.6 KK130 H2 H2 M L 15 17 22.2 7.6 DM d 16 17 24.3 8.5 KDM 21 22 28 9.3 KB Swivel Elbow: KFG2V KR Applicable tubing size (mm) O.D.

Table of Contents

Straight Union: KFH H2 (width across flats) H1 (width across flats) Applicable tubing (mm) I.D.

Air Cylinder

manual release: Suffix L With rod boot 8 8 l Width across flats B3 e JH JW f h ZZ + Stroke (mm) Bore size (mm) Stroke range A AL B1 B2 D DL E F FL G H H1 H2 HR HN Symbol (Max.)

KJ

Straight Union: KFH H2 (width across flats) H1 (width across flats) Applicable tubing (mm) I.D.

Fluoropolymer Piping Equipment

Note 2) For details of the applicable tubing sizes, refer to page 945. 901 LQ1 Series Dimensions Space saving union tee reducing: LQ1T-S-R B side M2 B side M2 H2 2 x B M1 M1 H1 (E2) 2 x B H2 (L2) L2 M1 M3 M3 F F A side C side A side C side 1/4 1/4 1/4 (E1) (E3) G (E3) H1 H3 H3 G H1 L1 L3 L3 (L1) Class 2 to 5 Type T1 Type T2 Class 2 to 5 M2 B side B side M2 H2 (E2) H1 M1 2 x B 2 x B H2 (L2

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators 2 x P (Rc, NPT, G) G H2 M5 x 0.8 (This drawing shows the cases of 20 and 25.)

SMC Pneumatic Clean Series

M26 x 1.5 M20 x 1.5 26-0.033 0 1/4 1/8 1/8 16 13 13 26-0.033 0 M26 x 1.5 M10 x 1.25 32-0.039 0 8 10 M32 x 2 M14 x 1.5 17 Air cylinder CM2 2122CM2/ 101110112122Axial foot style (L) / CM2L, CM2L With rubber bumper Standard port H A K F G Relief port 2-P AL H2 G F 2-NN B (Rc, NPT, G) Width across flats B1 H1 LH Relief port M5 x 0.8 (This drawing shows the cases of 20 and 25.)

One-touch Fittings

-02m1 M14 x 1 17 17 28.4 14 9.7 12 15 13.3 13.1 10.4 4.5 32.4 3/8 KQ2E06-03m1 M14 x 1 19 17 30.7 16.3 9.7 12 15 13.3 13.1 10.4 4.5 35.9 Connection thread Rc L1 M L2 m: A (Brass), N (Brass + Electroless nickel plating) Release button dimensions X Y Bulkhead Male Elbow: KQ2LE 2 x Applicable tubing B M H1 (Width across flats) H2 (Width across flats) B E D Effective area [mm2] Min. port size

Standard Combinations

OUT 4-L J 2-K M M 4-K Port size Port size N Min. clearance for maintenance Drain Min. clearance for maintenance Drain D Lubricator Regulator Air filter D Lubricator Regulator Air filter ACG20 Optional (-Y) Upward facing handle ACG30/40 Optional (-Y) Upward facing handle A P G F E A F E P G 2-L B C 2-L B C H1 H2 H1 H2 OUT IN OUT IN SMC SMC 4-L 2-L J OUT OUT M 2-K M 4-K Port size Port size