Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: DeviceNet Communication

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: D+Z

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: DI Control Kit

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: NPT Fitting

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: N+Z

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: Y+Z

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: D+N+Y+Z

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: C+N+Y+Z

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: N+Y

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: C+N

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: C+N+W

reduced facilities investment, space saved facility water facilities, and reduced running cost.Circulating fluids type: fluorinated, ethylene glycol aqueous solution, and clean/DI water, Temperature range setting: 20 to 90 °C, Cooling capacity: 2 kW, 8 kW, 15 kW, and 30 kW, Temperature stability: ±0.3 °C, Ideal for ordinary temperature and high temperature processes, Front Panel for HRW008

SMC Wireless System EtherNet/IP ® compatible

diagnosis 1 EX600-WEN# (Unit 0) Valve output: 16 points byte 1 System diagnosis 2 Base byte 2 System diagnosis 3 DY#B (Unit 2) byte 3 System diagnosis 4 Reserved byte 4 DX#D (Unit 1) byte 5 EX600-WSV# (Unit 0) Base Valve output: 32 points byte 6 Reserved Remote (Wireless channel 001) byte 7 Reserved DY#B (Unit 3) byte 8 DX#D (Unit 1) byte 9 Reserved DY#B (Unit 3) byte 10 Remote (Wireless

SMC Wireless System PROFINET compatible

diagnosis 1 EX600-WPN# (Unit 0) Valve output: 16 points byte 1 System diagnosis 2 Base byte 2 System diagnosis 3 DY#B (Unit 2) byte 3 System diagnosis 4 Reserved byte 4 DX#D (Unit 1) byte 5 EX600-WSV# (Unit 0) Base Valve output: 32 points byte 6 Reserved Remote (Wireless channel 001) byte 7 Reserved DY#B (Unit 3) byte 8 DX#D (Unit 1) byte 9 Reserved DY#B (Unit 3) byte 10 Remote (Wireless

Fieldbus system EtherNet/IP compatible SI Unit

#E/F) EX600-DY#E/F (15 byte) Byte Bit Parameter Setting value 0..3 Unit No. 0..8 0 4..7 Parameter type 1 1 0..7 Unit ID EX600-DY#E: 18 (Hex) EX600-DY#F: 1A (Hex) Unit parameter 0 Reserved 0 1 Monitor short circuit (out) 0: disable, 1: enable 2 2 Reserved 0 3 Restart after output load short circuit 0: manual, 1: auto 4..7 Reserved 0 Channel parameter Channel 0 to 7 0 (Ch0 output) Monitor

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

Unit 0 Unit 1 DY#B SEN3 Digital output SI unit End plate Valve unit 1 byte output 4 bytes output Input data: None Output data: (Unit 0) Digital output unit (EX600-DY#B): 1 byte occupied (Unit 1) SI unit (EX600-SEN3): 4 bytes occupied When Diagnostic mode 0 is selected Input data Output data Byte 0 Byte 0 DY#B (Unit 0) Output 0 to 7 Padding data Byte 1 Byte 1 Output 0 to 7 Byte

EXxx-OMZ0016

*B (8 points) 0 8 Digital output unit EX600-DY *E (16 points) 0 16 (EX600 Series) DY EX600-DY *F (16 points) 0 16 EX600-DM *E (8/8 points) 8 8 Digital I/O unit (EX600 Series) DM EX600-DM *F (8/8 points) 8 8 Analog input unit AX EX600-AXA*1 (2 points) 32 0 Analog output unit AY EX600-AYA*1 (2 points) 0 32 Analog I/O unit AM EX600-AMB*1 (2/2 points) 32 32 *1: User set minus ranges are not

Fieldbus system EtherCAT compatible SI Unit

DX#B DY#B DM#E AXA AYA LBB1 SEC3 System Valve 32 Diag. Unit 0 Unit 1 Unit 2 Unit 3 Unit 4 Unit 5 Unit 6 Diag.

Process Gas Diaphragm Valve

Applicable Fluid Process Gas Molecular Formula Process Gas Molecular Formula Boron11 Trifluoride Chlorine 11BF3 Cl2 Argon Chlorine Trifluoride Ar ClF3 Arsine Carbon Monoxide AsH3 CO Boron Trichloride Carbon Dioxide CO2 BCl3 Boron Trifluoride Germane BF3 GeH4 Halocarbon114 Hydrogen C2ClF4 H2 Halocarbon115 Hydrogen Sulfide C2ClF5 H2S Halocarbon116 Hydrogen Selenide H2Se C2F6 Acetylene Hydrogen

Fieldbus system Digital unit

EX600-DY F No.