Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: DeviceNet Communication
Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: D+Z
Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: DI Control Kit
Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: NPT Fitting
Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: N+Z
Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: Y+Z
Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: D+N+Y+Z
Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: C+N+Y+Z
Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: N+Y
Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: C+N
Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: C+N+W
Cooling Capacity: 008 (8 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: S (Pump Inverter Type), Option: C (Analog Communication)
reduced facilities investment, space saved facility water facilities, and reduced running cost.Circulating fluids type: fluorinated, ethylene glycol aqueous solution, and clean/DI water, Temperature range setting: 20 to 90 °C, Cooling capacity: 2 kW, 8 kW, 15 kW, and 30 kW, Temperature stability: ±0.3 °C, Ideal for ordinary temperature and high temperature processes, Front Panel for HRW008
Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit *B (8 points) 0 8 Digital output unit EX600-DY *E (16 points) 0 16 (EX600 Series) DY EX600-DY *F (16 points) 0 16 EX600-DM *E (8/8 points) 8 8 Digital I/O unit (EX600 Series) DM EX600-DM *F (8/8 points) 8 8 Analog input unit AX EX600-AXA*1 (2 points) 32 0 Analog output unit AY EX600-AYA*1 (2 points) 0 32 Analog I/O unit AM EX600-AMB*1 (2/2 points) 32 32 *1: User set minus ranges are not
The power supply for control and input, or the input device, is Off. 10 to 57 Hz: constant amplitude 0.75 mm p-p 57 to 150 Hz: constant acceleration 49 m/s2 DX E/DX F DY B/DY E/DY F Content Content Content DM E/DM F ST: STatus display LED ST: STatus display LED ST: STatus display LED
Applicable Fluid Process Gas Molecular Formula Process Gas Molecular Formula Boron11 Trifluoride Chlorine 11BF3 Cl2 Argon Chlorine Trifluoride Ar ClF3 Arsine Carbon Monoxide AsH3 CO Boron Trichloride Carbon Dioxide CO2 BCl3 Boron Trifluoride Germane BF3 GeH4 Halocarbon114 Hydrogen C2ClF4 H2 Halocarbon115 Hydrogen Sulfide C2ClF5 H2S Halocarbon116 Hydrogen Selenide H2Se C2F6 Acetylene Hydrogen
-byte output 2-byte output 2-byte output Wireless master module construction Input data: [Unit 1] Digital input unit (EX600-DX#D): 2 bytes occupied Output data: [Unit 0] Digital output unit (EX600-DY#B): 1 byte occupied [Unit 2] Wireless master unit (EX600-WEN#): 2 bytes occupied Unit 0 Unit 1 Unit 2 Unit 3 DY#B AXA DX#D EX600-WSV# Wireless slave unit setting parameter (Wireless channel 001
SI"PWR"LED 24 V10 1 POWER LED 2 ERROR LED EX600 LCD 3 LCD LCD Warning System access is not completed." 4 Ex600 SI"ST(M)"LED/ SI 5 " EX600 SI"ST(M)"LED/ 6 -50No.EX-OML0010CN-C 0 1 2 3 4 5 6 7 8 9 ON/OFF 1015 16 17 18 19 () 20 () 21 22 23 -51No.EX-OML0010CN-C SI EX600-DXB EX600-DXC EX600-DXC1 DX(8DI) DX EX600-DXD EX600-DXE EX600-DXF DX(16DI) DY(8DO) EX600-DYB DY(16DO) EX600
#E DY#B DY#B DX#D DX#D DX#D DX#D DM#F SEN -79No.EX-OMS0026CN [SYSTEM CONFIGURATION STATUS] [LOG], -80No.EX-OMS0026CN [SYSTEM CONFIGURATION STATUS][Unit Name][I/O MONITOR] (EX600-DXD ) ON/OFF -81No.EX-OMS0026CN [UNIT PARAMETER] [UNIT PARAMETER] (EX600-DXD ) [SET] -82No.EX-OMS0026CN [CHANNEL PARAMETER] [CHANNEL PARAMETER] (EX600-DXD) [SET] -83No.EX-OMS0026CN [FORCE MODE] (EX600-DXD) ON ON