Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: D+N

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: D+N+Y

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: D+N+Y+Z

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: NPT Fitting

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: N+Y+Z

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: DI Control Kit

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: N+Y

1

Series CM2-Z P .352 P .356 P .474 Air Cylinder Air Cylinder Air Cylinder Series CG1-Z Series MB-Z Series CA2-Z P .592 P .686 P .750 Compact Cylinder/Double Clevis Pivot Bracket Cylinder with Stable Lubrication Function (Lube-retainer) Floating Joint: For Pneumatic Cylinders (180, 200) JA-X530 Series CQ2/CQS Series CM2-Z/CG1-Z/CA2-Z/CQS/ CQ2-Z/MXQ/MGP-Z/CXS P .830 P .832 P .842 1 This is a

Air Cylinder Series CM2

U L RR Z + Stroke 20 CX CZ ZZ + Stroke N L Stroke Head side trunnion style: -H -R -W -H -R -W N L Stroke Rod side trunnion style: CBM2U Bore size CBM2T Bore size TY TD TT Z + Stroke ZZ + Stroke Z TT TZ TX ZZ + Stroke (mm) Axial foot style Trunnion style Clevis style Flange style Bore size (mm) Stroke range Stroke range Stroke range Stroke range Z Z ZZ FX LD FT LH B LC LS LT LX LZ X Y Z ZZ

Air Cylinder

orifice P G F H2 D I B LH 2 x LC 4 x LD Width across flats B2 MM Width across flats NA LT Y X S + Stroke Z + Stroke X Y Width across flats KA LX LZ LS + Stroke ZZ + 2 x Stroke (mm) Bore size A AL B B1 B2 D F G H H1 H2 I K KA LC LD LH LT LX LZ MM NA P X Y Z 20 18 15.5 40 13 26 8 13 8 41 5 8 28 5 6 4 6.8 25 3.2 40 55 M8 x 1.25 24 1/8 20 8 21 25 22 19.5 47 17 32 10 13 8 45 6 8 33.5 5.5 8 4

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Relief port (10-, 21-) Vacuum port (11-, 22-) (Effective thread length 2 x FL) MM 2 x LC LZ LX D D I 20, 25 Width across flats KA Standard port Width across flats NA MM Relief port (10-, 21-) Vacuum port (11-, 22-) 45 45 Width across flats B2 LT 4 x LD Y ZZ + 2 x Stroke LS + Stroke S + Stroke X Z + Stroke Z X Y 32, 40 (mm) 11 8 8 8 Z H H2 H1 S P I F A 12 10 8 6 KA MM NA NN B1 B2 G 4 4 4 4

SMC Pneumatic Clean Series

MM 2-LC LX D D I LZ 20, 25 Width across flats B2 Standard port MM Relief port 45 45 Width across flats NA LT N 4-LD N X Y S + Stroke X Y Z LS + Stroke Z + Stroke ZZ + 2 x Stroke 32, 40 (mm) 11 8 8 8 Z H H2 H1 S P N I F A 13 8 AL D K MM NA NN B1 B2 G 54 47 47 40 B ZZ 188 154 152 144 LX 55 40 40 40 LH 30 28 28 25 LT LS LD 4 4 4 4 LC 75 55 55 55 LZ X Y 40 32 25 20 Bore size 1/8 27 25 25 21 24

Table of Contents

CEP1 CE1 Head side trunnion style: RECT CE2 Width across flats B2 H2 TDe9 0.025 0.061 ML2B 2-NN 2-RcP Width across flats B1 G G Standard port Plugged (M5 x 0.8) Standard port H1 C J G5-S I CV 2-Eh8 TY D MVGQ MM AL NA TT CC K A TX TZ N N F S + Stroke H RB 40 Z + Stroke ZZ + Stroke J D(mm) 32 -X H1 H2 I K MM A AL B1 D F G H B2 E Bore (mm) Stroke range 0 0.033 0 0.033 0 0.033 0 0.039 20 M8 x

2

L, Z) is 0.2 to 0.6 MPa (30 to 90 psi).

Smooth Cylinder/Low Speed Cylinder

ND hole H10 Axis d9 MM NX2 H A L R2 U2 Z (Min.)

Compact Hydraulic Cylinder

CHmKGLm-m-XC63 Stroke Bore size (mm) 55, 60, 65, 70 80, 85, 90, 95 105, 110, 115, 120 130, 135, 140, 145 155, 160, 165, 170 LA B Z LA B Z LA B Z LA B Z LA B Z 32 166 131 147 191 156 172 216 181 197 241 206 222 40 183 140 160 208 165 185 233 190 210 258 215 235 283 240 260 50 196 145 169 221 170 194 246 195 219 271 220 244 296 245 269 63 215 152 182 240 177 207 265 202 232 290 227 257 315

Proposals for Energy Saving

S L, Z Thread AC Flange DC Note) Surge voltage suppressor is attached to the lead wire.

Made to Order

Packing set (8) w-1 From P. 23 Pin cylinder Double acting, Single rod CJP2 CJ2-Z CJ2W-Z CM2-Z CM2W-Z CM2K-Z CM2KW-Z CM2R-Z CM2RK-Z CBM2 CG1-Z CG1W-Z CG1R-Z MB-Z MBW-Z MB1-Z MB1W-Z CA2-Z CA2W-Z CBA2 CS1N CS1WN CS2 CS2W CUJ CU CUK CU CUK CQS CQSW CQ2-Z CQ2W-Z CQP2 CQ2K-Z CQ2KW-Z CG5 CY3B MK-Z MGPM-Z MGQ MGG MGC CXSJ CXS Except with air cushion and auto switch, rod end bracket T, U Except with

Standard Combinations

OUT 4-L J 2-K M M 4-K Port size Port size N Min. clearance for maintenance Drain Min. clearance for maintenance Drain D Lubricator Regulator Air filter D Lubricator Regulator Air filter ACG20 Optional (-Y) Upward facing handle ACG30/40 Optional (-Y) Upward facing handle A P G F E A F E P G 2-L B C 2-L B C H1 H2 H1 H2 OUT IN OUT IN SMC SMC 4-L 2-L J OUT OUT M 2-K M 4-K Port size Port size

XL

heater for 100C (212F) H2 XLA With heater for 120C (248F) H3 Note) Auto switches cannot be mounted in the case of high temperature types. 4 Normally Closed/Bellows Seal Series XLAV Air Operated Type/With Solenoid Valve How to Order XLAV 16 FF9N 1 G Light/Surge voltage suppressor High vacuum angle valve None With surge voltage suppressor With light/surge voltage suppressor Nil S Z Normally