Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: Analog Communication

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: Circulating Fluid Automatic Recovery

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: C+N

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: C+N+Z

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: D+N+Z

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: DeviceNet Communication

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: D+N

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: D+N+Y

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: D+N+Y+Z

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: DI Control Kit

1

35 + 25 (n 2) (n = 2, 3, 4, 5) CJ2 D-A9lV 5 10 35 10 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 25 (n 2) (n = 2, 3, 4, 5) CM2 Band mounting CG1 D-H7l/H7lW D-H7BA D-H7NF 10 15 60 15 + 45(n 2) 2 (n = 2, 4, 6) Note 3) 60 + 22.5 (n 2) (n = 2, 3, 4, 5) MB D-C7l D-C80 10 15 50 15 + 40(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 20 (n 2) (n = 2, 3, 4, 5) CA2 D-H7C D-C73C D-C80C 10 15 65 15 + 50(n 2)

Air Cylinder Series CM2

2) 2 15 + 45 10 15 60 60 + 45(n 2) (n=2, 4, 6) CJ2 D-C73C D-C80C D-H7C (n 2) 2 15 + 50 CM2 10 15 65 65 + 50(n 2) (n=2, 4, 6) CG1 (n 2) 2 D-B5/B64 D-G5NTL 15 + 50 75 + 55(n 2) 10 15 75 (n=2, 4, 6) MB (n 2) 2 20 + 50 D-B59W 75 + 55(n 2) 15 20 75 MB1 (n=2, 4, 6) D-A3A(2) D-G39A D-K39A D-A44A CA2 35 + 30(n 2) 100 + 100(n 2) 10 35 100 CS1 Note 1) Auto switch mounting (The adjustment as

Air Cylinder

S 1 pc. n n pcs.

Table of Contents

Model Model L D L D TCU0805-1-N-X6 TCU0425-1-N-X6 1 N x 8 31 3 to 90 L x 5.2 + 200 N x 4 18 1 3 to 90 L x 5.9 + 200 8 5 TCU0805-2-N-X6 TCU0425-2-N-X6 2 42 3 to 40 L x 3 + 200 N x 16 L x 4.4 + 200 N x 8 2 3 to 90 4 2.5 28 TCU1065-1-N-X6 TCU0425-3-N-X6 1 52 3 to 45 L x 5 + 200 N x 10 N x 12 3 3 to 63 L x 2.9 + 200 28 10 6.5 TCU1065-2-N-X6 TCU0604-1-N-X6 2 3 to 35 N x 20 52 L x 3 + 200 N x 6

Stainless Steel 316 Fittings

alcohol Propylene glycol Bromochloroethane n-Hexane n-Hexyl alcohol Note 1) [ ] denotes the concentration.

Fluoropolymer Piping Equipment

M N LVQ 25 1 1/4 LVP Class 6 (E) Port size Class 2 to 5 R (NPT) LVW Metric sizes Inch sizes LQ1 LQ1 Connection threads R/NPT A E H L M N Min. port size W Connection threads R/NPT A E H L M N Min. port size W Model Applicable tubing O.D. Model Applicable tubing O.D.

SMC Pneumatic Clean Series

"n" pcs.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

2 pcs. 1 pc. n pcs.

One-touch Fittings

P D [inch] M 2 x N m: A (Brass), N (Brass + Electroless nickel plating) A L 2 x O D H Connection thread Q Q Branch Y: KQ2U (Sealant) thread NPT Model H (Width across flats) D L P A*1 M Q Mounting hole Effective area [mm2] Min. port size Connection Applicable Weight [g] O N Thickness Nylon Urethane tubing O.D.

KJ

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.