Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: Circulating Fluid Automatic Recovery

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: D+N+Z

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: DeviceNet Communication

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: D+N

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: D+N+Y

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: D+N+Y+Z

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: NPT Fitting

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: N+Y+Z

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: DI Control Kit

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: N+Y

1

0 MGP CY CX CK1 C(L)K CDJZ2B10/16-Z-B C(L)KU CKQ Component Parts CKZ2N No.

Air Cylinder Series CM2

CD-S02 CD-S03 20, 25 32, 40 8 19.5 0.9 1.6 24.5 7.6 Type C 8 for axis B 10 29 1.15 1.35 34 9.6 Type C 10 for axis C D d Applicable bore size d H C B D Part no.

Table of Contents

Straight Union: KFH H2 (width across flats) H1 (width across flats) Applicable tubing (mm) I.D.

Air Cylinder

(mm) Auto switch model Bore size (mm) 20 25 32 40 D-M9l(V) D-M9lW(V) D-A9l(V) Auto switch model Bore size 20 25 32 40 D-A9l(V) 6 6 6 6 BM5-020 (A set of a, b, c, d) BM5-025 (A set of a, b, c, d) BM5-032 (A set of a, b, c, d) BM5-040 (A set of a, b, c, d) D-M9l(V) D-M9lW(V) D-M9lA(V) 3 3 4 3.5 D-M9lA(V) Note 2) BM5-020S (A set of b, c, d, e) BM5-025S (A set of b, c, d, e) BM5-032S (A set of

Fluoropolymer Piping Equipment

TD TID TH TIH Dimensions Space saving union elbow reducing: LQ1E-SS-R M2 B side B (L2) H2 M1 C A side SMC 6 (E) H1 C L1 1 25 Class 6 Class 2 to 5 Metric Size Inch Size A side B side Model A side B side B C E H1 H2 L1 L2 M1 M2 Min. port size B C E H1 H2 L1 L2 M1 M2 Min. port size Applicable tubing O.D. Applicable tubing O.D.

KJ

Straight Union: KFH H2 (width across flats) H1 (width across flats) Applicable tubing (mm) I.D.

Table of Contents

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

SMC Pneumatic Clean Series

C D M 2 R A 40 150 C73 Number of auto switches Mounting style 2 pcs. 1 pc.

Standard Combinations

Note 4) Pressure switch cannot be mounted on the inlet and outlet sides of an ARG with an upward facing handle (optional specification: -Y). 9 Series ACG20B/30B/40B Dimensions ACG20B Standard Downward facing handle ACG30B/40B Standard Downward facing handle A N A N P G E L L E G P B C B C H2 H1 C B H2 H1 OUT IN OUT IN SMC SMC 2-L J L M M 2-K K Port size Port size o s Drain Min. clearance

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators Clean series 10 11 Relief type Vacuum suction type 10 C D B M 2 B 20 100 H N M9BW C 21 C D B M 2 B 20 100 H N M9BW C Nil Built-in magnet Number of auto switches Cylinder stroke (mm) No Nil S n 2 pcs. 1 pc. "n" pcs.