Cooling Capacity: 030 (30 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: S (Pump Inverter Type), Option: NY (N+Y)

Cooling Capacity: 015 (15 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: S (Pump Inverter Type), Option: NY (N+Y)

Cooling Capacity: 008 (8 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: S (Pump Inverter Type), Option: NY (N+Y)

Cooling Capacity: 30 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: N+Y

Cooling Capacity: 15 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: N+Y

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: N+Y

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Methyl Chloride SF6 CH3Cl Disilane Methyl Fluoride Si2H6 CH3F Silicon Tetrachloride Methanol SiCl4 CH3OH Silicon Tetrafluoride Methylsilane SiF4 CH3SiH3 Dichlorosilane Halocarbon 21 SiH2Cl2 CHCl2F Silane Chlorine SiH4 Cl2 Trichlorosilane Chlorine Trifluoride SiHCl3 ClF3 Sulfur Dioxide Carbon Monoxide SO2 CO Diethyltelluride Germane Te(C2H5)2 GeH4 Tungsten Hexafluoride Hydrogen Sulfide WF6 H2S

Series AK1000

Methyl Chloride SF6 CH3Cl Disilane Methyl Fluoride Si2H6 CH3F Silicon Tetrachloride Methanol SiCl4 CH3OH Silicon Tetrafluoride Methylsilane SiF4 CH3SiH3 Dichlorosilane Halocarbon 21 SiH2Cl2 CHCl2F Silane Chlorine SiH4 Cl2 Trichlorosilane Chlorine Trifluoride SiHCl3 ClF3 Sulfur Dioxide Carbon Monoxide SO2 CO Diethyltelluride Germane Te(C2H5)2 GeH4 Tungsten Hexafluoride Hydrogen Sulfide WF6 H2S

Process Gas Diaphragm Valve

Applicable Fluid Process Gas Molecular Formula Process Gas Molecular Formula Boron11 Trifluoride Chlorine 11BF3 Cl2 Argon Chlorine Trifluoride Ar ClF3 Arsine Carbon Monoxide AsH3 CO Boron Trichloride Carbon Dioxide CO2 BCl3 Boron Trifluoride Germane BF3 GeH4 Halocarbon114 Hydrogen C2ClF4 H2 Halocarbon115 Hydrogen Sulfide C2ClF5 H2S Halocarbon116 Hydrogen Selenide H2Se C2F6 Acetylene Hydrogen

15

NM1 M4 x 5 1.5 6.35 5.4 NM2 M4 x 12 2.5 10 12 Included Parts List Size: 25 Size: 32, 40 Description Quantity Motor type NZ NY NX NW NV NU NT NM1 NM2 Motor side hub 1 1 1 1 1 1 1 1 1 Description Quantity Motor type NZ NY NX NM1 NM2 Motor side hub 1 1 1 1 1 Size: 40 Hub Mounting Dimensions [mm] Motor type MM TT PD FP NZ M3 x 12 1.5 14 17.5 NY M3 x 12 1.5 14 17.5 NX M4 x 12 2.5 9 5.2 NW M4

Modular F.R.L. Units

: AF+AR+S+AL + Attachment Nt e T-spacer Nil Without attachment T8 Mounting position: AF+T+AR+AL + f Pressure relief 3 port valve Nil Without attachment V Mounting position: AF+AR+AL+V + g Set pressure 9 Nil 0.05 to 0.85 MPa setting 1 0.02 to 0.2 MPa setting + Semi-standard Nil Polycarbonate bowl 2 Metal bowl 6 Nylon bowl 8 Metal bowl with level gauge C With bowl guard 11 11 11 11 11 11 Ny

A

6 (1/4) 0.32 0.44 .188 .188 0.56 No10-32UNF 0.94 0.75 NY-J015 10 (3/8) 0.39 0.54 .188 .188 0.56 No10-32UNF 0.94 0.75 NY-J015 15 (5/8) 0.39 0.54 D I M E N S I O N S C L E V I S A N D T R U N N I O N P I N d m t Part No Bore Size D L l .095 0.03 0.018 NCT-P006 6 (1/4) .125 0.81 0.70 .147 0.04 0.029 NCT-P010 10 (3/8) .188 0.94 0.81 .147 0.04 0.029 NCT-P015 15 (5/8) .188 1.25 1.11 Courtesy of

CATALOG

6 (1/4) 0.32 0.44 .188 .188 0.56 No10-32UNF 0.94 0.75 NY-J015 10 (3/8) 0.39 0.54 .188 .188 0.56 No10-32UNF 0.94 0.75 NY-J015 15 (5/8) 0.39 0.54 D I M E N S I O N S C L E V I S A N D T R U N N I O N P I N d m t Part No Bore Size D L l .095 0.03 0.018 NCT-P006 6 (1/4) .125 0.81 0.70 .147 0.04 0.029 NCT-P010 10 (3/8) .188 0.94 0.81 .147 0.04 0.029 NCT-P015 15 (5/8) .188 1.25 1.11 Courtesy of

The HRW series thermo-chiller is a high-performance device for circulating a fluid at a constant temperature (Water-cooled type).  Energy saving is substantially increased by exchanging cooling water and heat directly.  The HRW can achieve reduction in power consumption as it does not have a compressor, and reduction in the amount of facility water used because heat is exchanged directly

NCA1

-150 0.765 0.5 1 1/2 1 1/2 1 3/4 3/4 7/16-20 1/2 NY-325 1.265 0.75 2 3/8 1 3/8 5/8 1 1/4 1 1/4 1 1/8 3/4-16 3/4 NY-800 1.515 1 3 1/8 1 1/2 3/4 1 1/2 1 1/2 1 5/8 1 -14 1 NY-1000 2.032 1 3/8 4 1/8 2 1 2 2 1/8 2 1 1/4 -12 1 3/8 NY-1200 2.531 1 3/4 4 1/2 2 3/8 1 1/4 2 3/8 2 1/4 2 1/4 1 1/2 -12 1 3/4 NY-1400 2.531 2 5 1/2 2 15/16 1 1/4 2 15/16 2 1/2 3 1 7/8 -12 2 NY-1401 3.032 2 1/2 6 1/2 3 1/

NCA1

-150 0.765 0.5 1 1/2 1 1/2 1 3/4 3/4 7/16-20 1/2 NY-325 1.265 0.75 2 3/8 1 3/8 5/8 1 1/4 1 1/4 1 1/8 3/4-16 3/4 NY-800 1.515 1 3 1/8 1 1/2 3/4 1 1/2 1 1/2 1 5/8 1 -14 1 NY-1000 2.032 1 3/8 4 1/8 2 1 2 2 1/8 2 1 1/4 -12 1 3/8 NY-1200 2.531 1 3/4 4 1/2 2 3/8 1 1/4 2 3/8 2 1/4 2 1/4 1 1/2 -12 1 3/4 NY-1400 2.531 2 5 1/2 2 15/16 1 1/4 2 15/16 2 1/2 3 1 7/8 -12 2 NY-1401 3.032 2 1/2 6 1/2 3 1/

Air Cylinder

Rod Clevises Part No CB CD CE CH CW F L A KK ER NY-150 0.765 0.5 1 1/2 1 1/2 1 3/4 3/4 7/16-20 1/2 NY-325 1.265 0.75 2 3/8 1 3/8 5/8 1 1/4 1 1/4 1 1/8 3/4-16 3/4 NY-800 1.515 1 3 1/8 1 1/2 3/4 1 1/2 1 1/2 1 5/8 1 -14 1 NY-1000 2.032 1 3/8 4 1/8 2 1 2 2 1/8 2 1 1/4 -12 1 3/8 NY-1200 2.531 1 3/4 4 1/2 2 3/8 1 1/4 2 3/8 2 1/4 2 1/4 1 1/2 -12 1 3/4 NY-1400 2.531 2 5 1/2 2 15/16 1 1/4 2 15/16

Air Cylinder NCA1 Series

-150 0.765 0.5 1 1/2 1 1/2 1 3/4 3/4 7/16-20 1/2 NY-325 1.265 0.75 2 3/8 1 3/8 5/8 1 1/4 1 1/4 1 1/8 3/4-16 3/4 NY-800 1.515 1 3 1/8 1 1/2 3/4 1 1/2 1 1/2 1 5/8 1 -14 1 NY-1000 2.032 1 3/8 4 1/8 2 1 2 2 1/8 2 1 1/4 -12 1 3/8 NY-1200 2.531 1 3/4 4 1/2 2 3/8 1 1/4 2 3/8 2 1/4 2 1/4 1 1/2 -12 1 3/4 NY-1400 2.531 2 5 1/2 2 15/16 1 1/4 2 15/16 2 1/2 3 1 7/8 -12 2 NY-1401 3.032 2 1/2 6 1/2 3 1/

Plate Cylinder

NY EY EY C AL B A K N N 4 x ND through Female thread bore size NE 4 x 2 x NC counterbore S + Stroke H ZZ + Stroke BY BY 2 x BT Rod end nut BX BS + Stroke BX P Cylinder port Element Note) Spring extend D1 C1 H1 B1 (mm) d H1 B1 C1 D1 Part no.

NCM

Applicable bore size A J B C D E F G H 0.19 K L NY-044 0.38 No.10-32 0.75 0.94 0.56 0.19 0.38 0.56 0.12 No.10-32 7/16", 9/16" NY-075 0.51 0.25 1/4-28 0.94 1.18 0.69 0.25 0.51 0.71 0.16 1/4-28 3/4", 7/8" NY-106 0.51 0.25 5/16-24 0.94 1.18 0.69 0.25 0.51 0.71 0.19 5/16-24 1-1/16" NY-125 0.75 0.38 7/16-20 1.31 1.69 0.94 0.38 0.75 1.02 0.25 7/16-20 1-1/4", 1-1/2" NY-G050 0.75 0.38 1/2-20 1.32