Cooling Capacity: 2 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: C+D

Cooling Capacity: 2 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: D+N

Cooling Capacity: 2 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: DI Control Kit

1

35 + 25 (n 2) (n = 2, 3, 4, 5) CJ2 D-A9lV 5 10 35 10 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 25 (n 2) (n = 2, 3, 4, 5) CM2 Band mounting CG1 D-H7l/H7lW D-H7BA D-H7NF 10 15 60 15 + 45(n 2) 2 (n = 2, 4, 6) Note 3) 60 + 22.5 (n 2) (n = 2, 3, 4, 5) MB D-C7l D-C80 10 15 50 15 + 40(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 20 (n 2) (n = 2, 3, 4, 5) CA2 D-H7C D-C73C D-C80C 10 15 65 15 + 50(n 2)

Air Cylinder Series CM2

2) 2 15 + 45 10 15 60 60 + 45(n 2) (n=2, 4, 6) CJ2 D-C73C D-C80C D-H7C (n 2) 2 15 + 50 CM2 10 15 65 65 + 50(n 2) (n=2, 4, 6) CG1 (n 2) 2 D-B5/B64 D-G5NTL 15 + 50 75 + 55(n 2) 10 15 75 (n=2, 4, 6) MB (n 2) 2 20 + 50 D-B59W 75 + 55(n 2) 15 20 75 MB1 (n=2, 4, 6) D-A3A(2) D-G39A D-K39A D-A44A CA2 35 + 30(n 2) 100 + 100(n 2) 10 35 100 CS1 Note 1) Auto switch mounting (The adjustment as

Air Cylinder

S 1 pc. n n pcs.

Table of Contents

Model Model L D L D TCU0805-1-N-X6 TCU0425-1-N-X6 1 N x 8 31 3 to 90 L x 5.2 + 200 N x 4 18 1 3 to 90 L x 5.9 + 200 8 5 TCU0805-2-N-X6 TCU0425-2-N-X6 2 42 3 to 40 L x 3 + 200 N x 16 L x 4.4 + 200 N x 8 2 3 to 90 4 2.5 28 TCU1065-1-N-X6 TCU0425-3-N-X6 1 52 3 to 45 L x 5 + 200 N x 10 N x 12 3 3 to 63 L x 2.9 + 200 28 10 6.5 TCU1065-2-N-X6 TCU0604-1-N-X6 2 3 to 35 N x 20 52 L x 3 + 200 N x 6

Stainless Steel 316 Fittings

alcohol Propylene glycol Bromochloroethane n-Hexane n-Hexyl alcohol Note 1) [ ] denotes the concentration.

Fluoropolymer Piping Equipment

M N LVQ 25 1 1/4 LVP Class 6 (E) Port size Class 2 to 5 R (NPT) LVW Metric sizes Inch sizes LQ1 LQ1 Connection threads R/NPT A E H L M N Min. port size W Connection threads R/NPT A E H L M N Min. port size W Model Applicable tubing O.D. Model Applicable tubing O.D.

SMC Pneumatic Clean Series

"n" pcs.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

2 pcs. 1 pc. n pcs.

One-touch Fittings

P D [inch] M 2 x N m: A (Brass), N (Brass + Electroless nickel plating) A L 2 x O D H Connection thread Q Q Branch Y: KQ2U (Sealant) thread NPT Model H (Width across flats) D L P A*1 M Q Mounting hole Effective area [mm2] Min. port size Connection Applicable Weight [g] O N Thickness Nylon Urethane tubing O.D.

KJ

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

Table of Contents

24 21 22 41 14 32 16 12.5 50 8 10 56.2 7 26.5 51 1/4 181 247 Axial foot style: RECL G H Width across flats B2 F G K A NA 2-RcP F AL Standard port 2-NN Pluged (M5 x 0.8) H1 H2 Width across flats B1 I D C B 4-LD LH MM 2-4 3.2 N N X X Y S + Stroke Y LX Z LS + Stroke LZ ZZ + Stroke (mm) A AL B B1 B2 C D F G H H1 H2 I K LD LH LS LX LZ MM N NA Bore (mm) Stroke range 20 M8 x 1.25 Up to 700 18 15.5

Standard Combinations

Note 4) Separate spacers are required for modular unit. 7 Series ACG20A/30A/40A Dimensions ACG20A N A E G P L C B C H2 H1 OUT IN SMC 2-L J OUT B M 2-K Port size O S O S Min. clearance for maintenance Drain D D Filter regulator Lubricator ACG30A/40A N A E P G L H2 H1 OUT IN SMC OUT L M K Port size Min. clearance for maintenance Drain Filter regulator Lubricator Metal bowl with level gauge

2

/A: Brass, N: Brass + Electroless nickel plated Bulkhead Connector: KQ2E H1 (Width across flats) H2 (Width across flats) L1 L2 Mounting hole M Effective area (mm2) Min. port size Applicable tubing O.D.

Smooth Cylinder/Low Speed Cylinder

(n=2, 3, 4, 5) (n-2) 2 35 + 35 (n-2) 20 + 35 (n=2, 4, 6) Note 3) D-M9V 5 35 20 (n=2, 3, 4, 5) (n-2) 2 25 + 35 (n-2) 15 + 35 (n=2, 4, 6) Note 3) D-A9V 5 25 15 (n=2, 3, 4, 5) (n-2) 2 D-M9WV D-M9AV 35 + 35 (n-2) 20 + 35 (n=2, 4, 6) Note 3) 10 35 20 (n=2, 3, 4, 5) (n-2) 2 50 + 45 (n-2) D-C7 D-C80 15 + 45 (n=2, 4, 6) Note 3) 10 50 15 (n=2, 3, 4, 5) D-H7 D-H7W D-H7NF (n-2) 2 60 + 45 (n-2) 15 +

Compact Hydraulic Cylinder

+ 55 140 + 55 n (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) 130 160 2 (Different surfaces), 1 15 125 140 150 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 D-F5NTL 15 + 55 130 + 55 160 + 55 125 + 55 140 + 55 150 + 55 n (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n

Proposals for Energy Saving

Hysteresis mode OFF n-1 n-2 Pressure [n] H (fixed hysteresis) = 2 digits (ZSE5B) or 3 digits (ISE5B) H H ON Window comparator mode NO OFF n-1 n-2 Pressure 122 &RXUWHV\RI6WHYHQ(QJLQHHULQJ,QF5\DQ:D\6RXWK6DQ)UDQFLVFR&$ *HQHUDO Digital Pressure Switch With Backlight Series ZSE5B/ISE5B Pressure Setting Setting procedure 1. Setting Value Input Mode 2. OUT1 Setting Value (1) Input 3.

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alcohol Propylene glycol MQR Bromochloroethane T n-Hexane IDK n-Hexyl alcohol Note 1) [ ] denotes the concentration.