Series AP500

0.14 0 10 0.00 0.07 0 100 200 300 400 Flow rate (slpm, N2) 0.69 (17.5) Max. 5.6 (142.2) AP1000 100 psig (0.69 MPa) 40 psig (0.28 MPa) Inlet pressure: 80 psig (0.55 MPa) 20 psig (0.14 MPa) 1.5 (38.1) 50 0.34 2.25 (57.2) 40 0.28 Delivery pressure (MPa) Delivery pressure (psig) 30 0.21 20 0.14 2.00 (50.8) A 10 0.07 0 0.00 0.88 (22.4) 0 20 40 60 80 Flow rate (slpm, N2) 2 x 10-32 UNF depth 0.3

Process Pump

Switching valve kit KT-PAF3-37 Note) KT-PAF5-37 Note) Pilot valve kit KT-PAF3-38 KT-PAF5-38 Foot kit KT-PAF3-40 KT-PAF5-40 Leakage sensor KT-PAF3-47 KT-PAF5-47 606 Process Pump Automatically Operated Type/Air Operated Type PAF Series Piping and Operation: Automatically Operated Type (PAF3410, 5410) Piping diagram Reset button Air operated reset port PA Pilot air supply port AIR SUP Discharge

AZ1000

140 160 180 200 Flow rate (slpm, N2) AZ1000 100 psig (0.69 MPa) 40 psig (0.28 MPa) Inlet pressure: 80 psig (0.55 MPa) 20 psig (0.14 MPa) 1.5 (38.1) 50 0.34 2.25 (57.2) 40 0.28 Delivery pressure (MPa) Delivery pressure (psig) 30 0.21 0.69 (17.5) 20 0.14 2.00 (50.8) 10 0.07 A 0 0.00 0.88 (22.4) 0 20 40 60 80 Flow rate (slpm, N2) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) Connections inch

Pulse Valve

JSXFA(E, F, H)-10-BJSXF-10B-KT JSXFA(E, F, H)-10-B-A JSXF-10B-A-KT JSXFA(E, F)-14-BJSXF-14B-KT JSXF-14B-KT2 AN30-03 (14R, 14F), AN30-N03 (14N) Disassembly/Assembly Procedure Caution Port size: 06, 10 Port size: 14 1.

IR1000/2000/3000

KT-IRV2000 KT-IRV3000 Repair kit no.

SL5200

0.14 30 0.21 15 0.10 20 0.14 10 0.07 10 0.07 5 0.03 0 0.00 0 0.00 0 20 40 60 80 100 120 Flow rate (slpm, N2) 0 4 8 12 16 20 24 28 32 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

25

Description PB1000A series PB1011A KT-PB1A-9 PB1013A KT-PB1A-2 Diaphragm kit Check valve kit Port set Packing kit Foot kit Solenoid valve kit KT-PB1A-1 KT-PB1A-7 Note) Air supply port Suction port KT-PB1A-4 Air exhaust port KT-PB1-3 SYJ314M-5H-Q KT-PB1A-4 Note) One of Nil, F or N is entered as a thread symbol.

Title not found

Bar stock type 20 S Y E Valve Series Efsvsooo ] EI SYsOOO I -svzooo ] None Foot (Sinole solenoid onl Side Type of Actu.

Series AK1000

22.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 0 0.00 0 20 40 60 80 Flow rate (slpm, N2) AK1000HF 100 psig (0.69 MPa) 30 psig (0.21 MPa) Inlet pressure: 50 psig (0.34 MPa) 60 0.41 50 0.34 Delivery pressure (psig) Dlivery pressure (MPa) 40 0.28 30 0.21 20 0.14 10 0.07 0 0.00 0 20 40 60 80 100 120 140 160 180 200 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International

IR1000/2000/3000

Note 3) KT-IR1010 KT-IR3120 Service parts kit no.

KT10

However under Japanese regulation, only MPa is available in Japan. 0 600 psig/bar 1) 6 10 20 40 4.1 MPa 7 MPa 14 MPa 28 MPa 1000 psig/bar 1) 2000 psig/bar 1) 4000 psig/bar 1) 1) Under Japanese Measurement Law, this gauge should not be used in Japan.

Wedge Cam Operation Gripper Series MHK2

Material MHK2-12 MHKL2-12 MHK2-16 MHKL2-16 MHK2-20 MHKL2-20 MHK2-25 MHKL2-25 16 17 18 19 CR FKM Si Rod seal Piston seal NBR KT-MHK12 KT-MHK16 KT-MHK20 KT-MHK25 Piston retainer Tube seal P3318413 P3318413-1 P3318413-2 P3318405 P3318405-1 P3318405-2 P3318313 P3318313-1 P3318313-2 P3318305 P3318305-1 P3318305-2 P3318213 P3318213-1 P3318213-2 P3318205 P3318205-1 P3318205-2 P3318113 P3318113-1

Cooling Capacity: 150 (15.7kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting), Option: ABK (A + B + K)

Cooling Capacity: 150 (15.7kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting), Option: AK (A + K)

Cooling Capacity: 150 (15.7kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting), Option: AKS (A + K + S)

Cooling Capacity: 150 (15.7kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting), Option: BK (B+K)

Cooling Capacity: 150 (15.7kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting), Option: K (w/Fluid Fill Port)

Cooling Capacity: 150 (15.7kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting), Option: KS (K + S)

Cooling Capacity: 150 (15.7kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting), Option: S (Conforming to CE/UL Standards)

Cooling Capacity: 150 (15.7kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting), Option: A (w/Caster Adjuster-foot)