Series AP500

0.14 0 10 0.00 0.07 0 100 200 300 400 Flow rate (slpm, N2) 0.69 (17.5) Max. 5.6 (142.2) AP1000 100 psig (0.69 MPa) 40 psig (0.28 MPa) Inlet pressure: 80 psig (0.55 MPa) 20 psig (0.14 MPa) 1.5 (38.1) 50 0.34 2.25 (57.2) 40 0.28 Delivery pressure (MPa) Delivery pressure (psig) 30 0.21 20 0.14 2.00 (50.8) A 10 0.07 0 0.00 0.88 (22.4) 0 20 40 60 80 Flow rate (slpm, N2) 2 x 10-32 UNF depth 0.3

Process Pump

Switching valve kit KT-PAF3-37 Note) KT-PAF5-37 Note) Pilot valve kit KT-PAF3-38 KT-PAF5-38 Foot kit KT-PAF3-40 KT-PAF5-40 Leakage sensor KT-PAF3-47 KT-PAF5-47 606 Process Pump Automatically Operated Type/Air Operated Type PAF Series Piping and Operation: Automatically Operated Type (PAF3410, 5410) Piping diagram Reset button Air operated reset port PA Pilot air supply port AIR SUP Discharge

AZ1000

140 160 180 200 Flow rate (slpm, N2) AZ1000 100 psig (0.69 MPa) 40 psig (0.28 MPa) Inlet pressure: 80 psig (0.55 MPa) 20 psig (0.14 MPa) 1.5 (38.1) 50 0.34 2.25 (57.2) 40 0.28 Delivery pressure (MPa) Delivery pressure (psig) 30 0.21 0.69 (17.5) 20 0.14 2.00 (50.8) 10 0.07 A 0 0.00 0.88 (22.4) 0 20 40 60 80 Flow rate (slpm, N2) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) Connections inch

Pulse Valve

JSXFA(E, F, H)-10-BJSXF-10B-KT JSXFA(E, F, H)-10-B-A JSXF-10B-A-KT JSXFA(E, F)-14-BJSXF-14B-KT JSXF-14B-KT2 AN30-03 (14R, 14F), AN30-N03 (14N) Disassembly/Assembly Procedure Caution Port size: 06, 10 Port size: 14 1.

IR1000/2000/3000

KT-IRV2000 KT-IRV3000 Repair kit no.

SL5200

0.14 30 0.21 15 0.10 20 0.14 10 0.07 10 0.07 5 0.03 0 0.00 0 0.00 0 20 40 60 80 100 120 Flow rate (slpm, N2) 0 4 8 12 16 20 24 28 32 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

25

Description PB1000A series PB1011A KT-PB1A-9 PB1013A KT-PB1A-2 Diaphragm kit Check valve kit Port set Packing kit Foot kit Solenoid valve kit KT-PB1A-1 KT-PB1A-7 Note) Air supply port Suction port KT-PB1A-4 Air exhaust port KT-PB1-3 SYJ314M-5H-Q KT-PB1A-4 Note) One of Nil, F or N is entered as a thread symbol.

Title not found

Bar stock type 20 S Y E Valve Series Efsvsooo ] EI SYsOOO I -svzooo ] None Foot (Sinole solenoid onl Side Type of Actu.

Series AK1000

22.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 0 0.00 0 20 40 60 80 Flow rate (slpm, N2) AK1000HF 100 psig (0.69 MPa) 30 psig (0.21 MPa) Inlet pressure: 50 psig (0.34 MPa) 60 0.41 50 0.34 Delivery pressure (psig) Dlivery pressure (MPa) 40 0.28 30 0.21 20 0.14 10 0.07 0 0.00 0 20 40 60 80 100 120 140 160 180 200 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International

IR1000/2000/3000

Note 3) KT-IR1010 KT-IR3120 Service parts kit no.

Cooling Capacity: 100 (11.5kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting), Option: ABK (A + B + K)

Cooling Capacity: 100 (11.5kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting), Option: B1K (B1 + K)

Cooling Capacity: 100 (11.5kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting), Option: K (w/Fluid Fill Port)

Cooling Capacity: 100 (11.5kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting), Option: S (Conforming to CE/UL Standards)

Cooling Capacity: 100 (11.5kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting), Option: AKS (A + K + S)

Cooling Capacity: 100 (11.5kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting), Option: KS (K + S)

Cooling Capacity: 100 (11.5kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting), Option: A (w/Caster Adjuster-foot)

Cooling Capacity: 100 (11.5kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting), Option: AK (A + K)

Cooling Capacity: 100 (11.5kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting), Option: KST (K + S + T)

Cooling Capacity: 100 (11.5kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting), Option: KMST (K + M + S + T)