Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

4.5 9.5 33h9 34 h9 17H9 5.3 2.5 4.2 10 4.2 7.5 4.5 2.5 6 4 M5 x 0.8 M5 x 0.8 7 5.5 45 30 18.4 12.2 50 5 7 39h9 40 h9 20H9 6.5 2.5 4.5 11.5 4.2 7.5 4.5 2.5 6 5 (mm) JJ M3 x 0.5 M3 x 0.5 M3 x 0.5 M4 x 0.7 JK JU M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 P M3 x 0.5 M3 x 0.5 M3 x 0.5 M5 x 0.8 PA M3 x 0.5 M3 x 0.5 M3 x 0.5 M5 x 0.8 Q S SD SF SU UU WA WB WC WD M3 x 0.5 M3 x 0.5 M3 x 0.5 M4 x 0.7 WE WF

Thermo-chiller

type 0.1 5 to 40 V V V HRS090 Standard type 0.5 5 to 35 V Indoor use (400 V as standard) Outdoor installation IPX4 (400 V as standard) HRS100/150 Standard type 1.0 5 to 35 V V HRSH090 Inverter type 0.1 5 to 40 V Indoor use (400 V as standard, 200 V as an option) (Only 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 V V V V V (400 V as standard, 200 V as an option

53

Applicable model HRS-WL003 HRS090-mm-20/40 Parts List q No.

1

32, 40 1001 to 2000 100 to 1000 CY3B 20, 25, 32, 40 2001 to 3000 100 to 1000 CY1B 50, 63 From 2001 200 to 2000 2001 to 4000 (25, 32) 2001 to 5000 (40) 2001 to 6000 (50, 63) REA 25, 32, 40, 50, 63 200 to 1000 (5), 10, 15, 20, 25, 30 35, 40, 45, 50, 75, 100 CQ2AH 125, 150, 175, 200, 250, 300 32, 40, 50, 63, 80, 100 6-17-31 27 Made to Order Common Specifications: Long Stroke Made to Order Common

HRX-OM-W002

1000 40 1000 1000 1000 1000 500 500 500 500 500 500 500 500 500 500 0 0 0 0 0 0 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 0 10 20 30 40 0 0 0 0 10 20 30 40 0 10 20 30 40 [] Circulating fluid temperature[] Circulating fluid temperature[] Circulating fluid temperature[] Circulating fluid temperature[] [] 0 10 0 10 20 30 40 Circulating fluid temperature[] Circulating

NCM

8 6 7 8 6 11.5 9 125 13 7 5 6 7 5.5 10.5 8 150 (40) (40) (40) (40) (12) (12) (40) (40) 25 Type 1 Type 2 Type 3 (40) (40) (40) (12) (12) (40) (40) 34 50 (40) (12) (12) (40) (40) 36 27.5 32.5 75 1, 2 (40) (12) (12) (40) 31 24 28 36 100 W W (40) (12) (12) W 27.5 21 25 38 32 125 (40) (12) (12) 25 19 22.5 34.5 29 150 (40) (12) (12) (40) 30 23 27 35 25 (12) (12) 35 20.5 15.5 18.5 29 24 50 (12)

HRX-OM-X084

Ambient temp. 500 Heating capacity [W] Heating capacity [W] 400 40 40 400 32 32 300 300 25 25 5 5 200 200 100 100 0 0 10 15 20 25 30 35 40 10 15 20 25 30 35 40 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9-11 Heating capacity (HRR010-A-20-) 9.5.4 HRR010-W-20400 400 Facility water temp.

Shock Absorbers and Rate Controls

50.0 0.3,4.3 2,300 t2,000 6i,000 0 200 t2,000 t.0 0ttl3,Ofix3.J 40 90.0 0.3"4.3 4,000 652,000 67,000 0 200 12,000 9.1 0Ill3.0ilx5 40 125.0 0.3.4.3 5,700 933,000 67,000 7l ?

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

end (E) 32 40 Head side pivot (C) 12 12 20 40 Double rod (W) Block mount (R) Note) Minimum stroke for mounting auto switches: 0.6 inch for 2 switches, 0.4 inch for one switch.

Cooling Method: W (Water-cooled Refrigeration), Pipe Thread: F [G (w/Rc-G Conversion Fitting)], Power Supply: 46 [3-phase 380 to 415 VAC (50/60 Hz); 3-phase 460 to 480 VAC (60 Hz)], Option: JM (J + M)

Compact Rotary Actuator Series CRQ2

, 15 10, 15 20, 30, 40 10, 15, 20, 30, 40 10, 15, 20, 30, 40 Change in angle adjustable range 0 to 100 Change in angle adjustable range 90 to 190 Chart 5.

CY1

25 98 7.0+Lo 32 180 8.6+Lo 40 364 10.4+Lo Bore size (mm) 6.

Possible to transfer a workpiece at low-speed.

20 30 40 Size 20 30 40 The figure shows the view from the long shaft end.

REA/REB

Speed 600 mm/s D 20, 25, 32, 40 Attached from top with cap bolt Floating block L LA A Attached from bottom with cap bolt XB WF 2-SS (helical insert thread) Body FG XA LF Bolt size: MD R Note 2) S HL FF Note 1) HB Note 1) High Precision Guide Type REBH Switch rail FC D' Section D-D' (mm) FF Note 1) FE Note 1) FC BA BB CC A Bore size FH HB Note 1) SS FG MD R Note 2) LF XB HL L LA S WF XA 10

CG5-S

6 33 M5 x 0.8 5.5 8 14 3.5 M10 x 1.25 29 1/8 9 83 13 32 10 24 to 300 22 19.5 17 20 32 12 18 12 40 6 38 M5 x 0.8 5.5 10 16 3.5 M10 x 1.25 35.5 1/8 11 85 15 40 10 to 500 24 30 27 19 26 40 16 19 13 50 8 47 M6 x 1.0 6 14 16 4 M14 x 1.5 44 1/8 11 93 15 50 14 40 to 600 35 32 27 32 50 20 21 14 58 11 58 M8 x 1.25 7 18 22 5.5 M18 x 1.5 55 1/4 15 21 109 63 14 40 to 600 35 32 27 38 60 20 21 14 58 11

Magnetically Coupled Rodless Cylinder

4-MM thread depth J L 0 0.1 H B 2-P (Piping port) G E G NN ( I ) D X NA R Mounting nut N W K N S + Stroke F F ZZ + Stroke H B E G Mounting nut NN NA F N CY3B15 (mm) Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 B 35 36 46 60 70 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 D 16.6 21.6 26.4 33.6 41.6 ZZ 103 132 137 156 182 E 3 2 2 2 3 N 11 18 18.5 20 26

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

Nil 20, 25, 32, 40 TN TF Standard stroke Refer to page 12 for standard stroke.

HRX-OM-X071

] 1000 32 32 25 25 1000 5 5 500 500 0 0 0 10 20 30 40 0 10 20 30 40 Circullating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9-11 Heating capacity (HRR050-A/W-20-) 9.5.2 HRR050-A/W-402000 2000 Ambient temp Ambient temp 1500 1500 Heating capacity[W] Heating capacity[W] 40 40 32 32 25 25 1000 1000 5 5 500 500 0 0 0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature

HRX-OM-R026

. 9-2 9.1.3 HRSH090-W-20. 9-3 9.1.4 HRSH090-W-40. 9-4 9.1.5 Refrigerant with GWP reference . 9-5 9.1.6 Communication specification . 9-6 9.2 Outline dimensions . 9-7 9.2.1 HRSH090-A-20/40. 9-7 9.2.2 HRSH090-W-20/40. 9-8 9.3 Flow diagram . 9-9 9.3.1 HRSH090-A-20/40. 9-9 9.3.2 HRSH090-W-20/40. 9-9 9.4 Cooling capacity . 9-10 HRSH Series HRX-OM-R026 Contents 9.4.1 HRSH090-A-20. 9-10 9.4.2 HRSH090

5-Port Solenoid Valve

Series SUP blocking disk assembly EXH blocking disk assembly SY3000 SY30M-40-1A SY30M-40-2A SY5000 SY50M-40-1A SY50M-40-1A SY7000 SY70M-40-1A SY70M-40-1A MLabel for blocking disk Label to indicate and confirm on the manifold where the SUP/EXH blocking disk assemblies were inserted. (3 sheets each) * If the blocking disk assembly is ordered using the manifold specification sheet and ordered