MY1

needle NW Z + Stroke 2-P (Hexagon socket head taper plug) MW (mm) Bore size (mm) B 6 C 3.5 CH 25 G 8.5 GB 16.2 H 52 HG 13.5 J M5 x 0.8 K 10 L 110 LD 3.6 LH 38 LL 35 LW 84 M 6 MM M4 x 0.7 MW N 20 NC 13.5 NE 49.5 NG A 90 16 20 25 32 40 13.5 110 7.5 4.5 26 10.5 20 58 17 M6 x 1 12 130 4.8 39 45 88 7.5 M5 x 0.8 25 17 55.5 17 120 9 5.5 25.7 16 24.5 66 22 M6 x 1 9.5 142 5.6 38.7 49 100 10 M5

Magnetically Coupled Rodless Cylinder

$2 are for 20 to 40.

Cooling Capacity: 030 (Cooling Capacity: 2600/3200W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: N (NPT w/PT-NPT Conversion Fitting Set)

Type: -, Cooling Method: -, Cooling Capacity: 2,600/3,200 W (50/60 Hz), Piping thread type: NPT (PT-NPT conversion fitting set included), Optional specifications: None

1

COM. 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 COM. COM. 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 9 10 7 8 7 8 7 8 7 8 5 6 5 6 5 6 5 6 3 4 3 4 3 4 3 4 1 2 1 2 1 2 1 2 COM. COM. (P: 26 pins) (PG: 20 pins) (PH: 10 pins) (J,G: 20 pins PC wiring) Mixed wiring of single and double wiring can be specified on the manifold specification.

15

The bore size is 25, so the allowable load by thrust will be 20 kg. Work load is 5.5 kg < 20 kg. OK The load is restricted to 20 kg when the stroke is 600 mm and Z = 100 mm taken from Graph (5) z (Refer to page 1495). (2) Allowable load by stroke Work load is 5.5 kg < 20 kg.

HRX-OM-T002

drawing shows HRS090-W-20.)

HRX-OM-R026

HRSH090 A 20 Option Cooling capacity None Nill 090 9.5kW Earth leakage breaker B1 DI water (pure water) piping M Cooling method Automatic water-fill J A Air-cooled refrigeration CE / UL S Fixed SI unit W W Water-cooled refrigeration 1: In case of power supply '40' and option S, this is standard. 2: Power supply '20' only. *3: Unit : MPa/ degree Celsius) Piping thread type Power supply 20

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

(N) CB 1 mm or less Non-locking style, Locking style Back rush Manual release CV/MVG Allowable Kinetic Energy CXW 20 25 32 40 Bore size (mm) CXS Allowable kinetic energy (J) Rubber bumper 0.27 0.4 0.65 12 Effective cushion length(mm) CXT 11.0 11.0 11.0 11.8 Air cushion Cushion sectional area(cm2) 2.09 3.30 5.86 9.08 MX Absorbable kinetic energy J 0.54 0.78 1.27 2.35 MXU Standard Stroke Long

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

CBAIB63SCBA13, #2 CBAIB80SCBA14, #2 CBAIB100SCBA15, #2 f ZZ Bore (mm) e Stroke range (mm) h l 40 50 63 80 100 1/4 stroke 154 43 59 20 to 500 11.2 1/4 stroke 167 52 66 20 to 600 11.2 1/4 stroke 178 52 66 20 to 600 11.2 1/4 stroke 213 65 80 20 to 750 12.5 1/4 stroke 224 65 81 20 to 750 14 3.4-16 End Lock Cylinder Series CBA1 Dimensions: With Mounting Bracket -H -R -W N L Axial foot: CBA1L Bore

Air Cylinder

0.4 J 0.65 J 1.2 J Rubber bumper Female thread 0.11 J 0.18 J 0.29 J 0.52 J Allowable kinetic energy CG3 Male thread 0.54 J (11.0) 0.78 J (11.0) 1.27 J (11.0) 2.35 J (11.8) Air cushion (Effective cushion length (mm)) JMB Symbol Female thread 0.11 J 0.18 J 0.29 J 0.52 J Rubber bumper MB Standard Strokes MB1 Bore size (mm) Standard stroke (mm) Note 1) Maximum manufacturable stroke (mm) CA2 20

CA2

G H1 J KA Without rod boot With rod boot +0.058 0 0.1 0.3 10 15.0 up to 500 20 to 500 30 27 60 22 44 16 32 10 15 8 M8 x 1.25 6 14 40 +0.070 0 0.1 0.3 12 18.0 up to 600 20 to 600 35 32 70 27 52 20 40 10 17 11 M8 x 1.25 7 18 50 +0.070 0 0.1 0.3 16 25.0 up to 600 20 to 600 35 32 85 27 64 20 40 10 17 11 M10 x 1.25 7 18 63 +0.084 0 0.1 0.3 20 31.5 102 13 up to 750 20 to 750 40 37 32 78 25 52 14

Air Cylinder Series CA2

RY RT (mm) Stroke range (mm) A Bore size (mm) 40 50 63 80 100 AL B B1 C D E F G H1 J K KA LD LH LS LT With rod boot Without rod boot 20 to 800 Up to 800 30 27 60 22 44 16 32 10 15 8 M8 x 1.25 6 14 9.0 40 138 3.2 Up to 1200 20 to 1200 35 32 70 27 52 20 40 10 17 11 M8 x 1.25 7 18 9.0 45 144 3.2 Up to 1200 20 to 1200 35 32 85 27 64 20 40 10 17 11 M10 x 1.25 7 18 11.5 50 166 3.2 20 to 1400 Up

Air Cylinder Series CM2

J 1.2 J Rubber bumper Allowable kinetic energy CM2 Air cushion (Effective cushion length (mm)) 0.54 J (11.0) 0.78 J (11.0) 1.27 J (11.0) 2.35 J (11.8) CG1 MB Standard Stroke Standard stroke (mm) (1) Maximum manufacturable stroke (mm)(2) Bore size (mm) MB1 20 1000 25, 50, 75, 100, 125, 150 25 1500 25, 50, 75, 100, 125, 150, 200 CA2 32 2000 25, 50, 75, 100, 125, 150, 200 CS1 40 2000 25, 50

HRX-OM-Q040_E

HRS-PF001, HRS-PF002 HRS01-A-10-, HRS01-W-10HRS050-A20-, HRS050-W-20Particle Filter Set HRS01-A-20-, HRS01-W-20HRS060-A20-, HRS060-W-20HRS024-A-20-, HRS024-W-20Thermo-chiller HRS030-A-20-, HRS030-W-20Caution HRS040-A-20-, HRS040-W-20Applicable model: HRS Series Mounting of the case should be performed by hand-tighten.

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 9 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21.5 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8 4.5

o

120-5LGM3 vJ10-20-4A.20 @ 0 0 0 Ma nifo I d 2 t o 2 0 ";:':;,#!: Type 2o(for 5 port body ported type) Applicable valvea NVV5J3-2oq) NVJ30200-O-M3 NVJ30230-O-M3 Stationso j fu c$h ild( dlb lrdy vJ3000-a-2A Type 31 & Type 3l S31(for 4 port base mounted type) NVvsJ3o31@M3 Applicable valves NVJ30300-O NVJs0330-O Pociton d A.B md.

o

120-5LGM3 vJ10-20-4A.20 @ 0 0 0 Ma nifo I d 2 t o 2 0 ";:':;,#!: Type 2o(for 5 port body ported type) Applicable valvea NVV5J3-2oq) NVJ30200-O-M3 NVJ30230-O-M3 Stationso j fu c$h ild( dlb lrdy vJ3000-a-2A Type 31 & Type 3l S31(for 4 port base mounted type) NVvsJ3o31@M3 Applicable valves NVJ30300-O NVJs0330-O Pociton d A.B md.

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

120-5LGM3 vJ10-20-4A.20 @ 0 0 0 Ma nifo I d 2 t o 2 0 ";:':;,#!: Type 2o(for 5 port body ported type) Applicable valvea NVV5J3-2oq) NVJ30200-O-M3 NVJ30230-O-M3 Stationso j fu c$h ild( dlb lrdy vJ3000-a-2A Type 31 & Type 3l S31(for 4 port base mounted type) NVvsJ3o31@M3 Applicable valves NVJ30300-O NVJs0330-O Pociton d A.B md.