Cooling Capacity: Cooling Capacity: 1100/1300W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: Automatic Water Supply Function

Cooling Capacity: Cooling Capacity: 1100/1300W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: M [Applicable to DI Water (Deionized Water) Piping]

Cooling Capacity: Cooling Capacity: 1100/1300W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: M + T

Cooling Capacity: Cooling Capacity: 1100/1300W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: Earth Leakage Breaker

Rotary Table/Rack & Pinion Style Series MSQ

Load A Displacement MSQ1A MSQ10 MSQB10 (Basic type) MSQB1A (Basic type) 100 Displacement m Displacement m 400 80 MSQA1A (High precision type) 60 350 40 10 20 30 40 MSQA10 (High precision type) 20 0 5 10 15 20 25 30 0 9 8 7 6 5 4 3 2 1 Load N Load N MSQ2A MSQ20 300 MSQB20 (Basic type) MSQB2A (Basic type) 100 Displacement m Displacement m 80 250 60 MSQA2A (High precision type) 10 20 30 40 190

Cooling Capacity: 024 (Cooling Capacity: 2100/2400W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: N (NPT w/PT-NPT Conversion Fitting Set), Option: BJ (B + J)

Cooling Capacity: 050 (Cooling Capacity: 4700/5100W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: N (NPT w/PT-NPT Conversion Fitting Set), Option: BJ (B + J)

Cooling Capacity: 060 (Cooling Capacity: 4900/5900, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: N (NPT w/PT-NPT Conversion Fitting Set), Option: BJ (B + J)

Type: -, Cooling Method: -, Cooling Capacity: 4,700/5,100 W (50/60 Hz), Piping thread type: NPT (PT-NPT conversion fitting set included), Optional specifications: With earth leakage circuit breaker / With automatic water supply

Cooling Capacity: Cooling Capacity: 2100/2400W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: B + J

Cooling Capacity: Cooling Capacity: 4900/5900, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: B + J

Vacuum Unit

Low noise 60 ZK2A07 (Silencer exhaust) ZK2G07 (High-noise reduction silencer exhaust) 46 dB (A) 1 50 1 Nozzle size: 0.7 (Under SMCs measurement conditions) 40 Noise level [dB (A)] 30 Reduces high-frequency range from 2000 to 20 Hz. 20 10 0 200 2000 20 Frequency [Hz] Suction flow Improved by up to approx. 20% Max. suction flow [L/min (ANR)] Nozzle size Exhaust type 40 80 Approx. 20% High-noise

Rotary Table/

M5 x 0.8 depth 5 M5 x 0.8 depth 5 (Vacuum port) DC DB DA High precision type 11-MSQAA 11-MSQAR Basic type 11-MSQBA 11-MSQBR DC DB DA (Vacuum port) HB HB HA HE (HD) (HD) 11.5 5.5 HC HC DD DD (mm) (mm) DA(h8) DB(h8) DC(h8) DD(h8) HA HB HC HD HE DA(h9) DB(h9) DC(h9) DD(h9) HB HC HD Size 10 20 30 50 Size 10 20 30 50 46 45 20 35 15.5 24 5 63 9.5 46 45 20 35 20 5 59 61 60 28 40 19.5 30 6 73 13.5

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

m 80 200 60 MSQA3A (High precision type) 50 130 150 40 MSQA30 (High precision type) 20 0 10 20 30 40 50 60 70 18 16 14 12 10 8 6 4 2 0 Load N Load N MSQ7A MSQ50 MSQB50 (Basic type) MSQB7A (Basic type) 100 200 Displacement m Displacement m MSQA7A (High precision type) 80 150 60 120 40 50 MSQA50 (High precision type) 20 24 22 20 18 16 14 12 10 8 6 4 2 0 20 40 60 80 100 120 0 Load N Load N

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

Reed switch Auto switch A90 Solid state M9B, M9N, F8B, F8N Size: 10, 20, 30, 50 11 Vacuum suction type Clean series 10 Size 20 30 50 11 MSQ B 10 A M9B 22 MSQ B 10 A M9B Number of auto switches A High precision type B Basic type Nil S n 2 pcs. 1 pc. n pcs.

LZ-OM003xx

31 Auto switch mount bracket BJ 31 11.

Thermo-chiller/Rack Mount Type

0 5 10 15 20 25 Circulating fluid flow rate [L/min] Circulating fluid flow rate [L/min] HRR050-A-20, HRR050-W-20 0.5 Circulating fluid pressure [MPa] Outlet: 60 Hz 0.4 0.3 Outlet: 50 Hz Return port Return port (Option Z) 0.2 Allowable operating range 0.1 0 0 10 20 30 40 Circulating fluid flow rate [L/min] Required Facility Water Flow Rate 012 018 024 030 HRR -W HRR010-W-20 30 20 Facility

Thermo-chiller

25C Ambient temperature 2C 0.5 0.5 Ambient temperature 2C 0 0 15 20 25 Circulating fluid temperature [C] 15 20 25 Circulating fluid temperature [C] HRLE050-W-20 HRLE050-W-20 [50 Hz] [60 Hz] 2 2 Heating capacity [kW] Heating capacity [kW] 1.5 1.5 Facility water temperature 25C, 32C, 40C Facility water temperature 25C, 32C, 40C 1 1 0.5 0.5 0 0 15 20 25 Circulating fluid temperature [C] 15

HRL

-Am-20 (CH1) HRL100-Am-20 (CH1) 0.6 0.6 60 60 0.5 0.5 50 50 Circulating fluid outlet Circulating fluid outlet 0.4 0.4 40 40 Usable flow rate range Usable flow rate range 0.3 0.3 30 30 0.2 0.2 20 20 Circulating fluid return port 0.1 0.1 10 10 Circulating fluid return port 0 0 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Pump Circulating fluid Pump

filter to be done easily and without tools.Compact type thermal-chiller , Single phase, 100/115VAC, Cooling method: air-cooled or water-cooled , Self diagnosis and check display for easy maintenance , Functions: timer operation, low tank level detecting, power failure auto-restart, anti-freezing, LEFT SIDE PANEL (HRS012-AN-20), OTHERS, HRS THERMO-CHILLERS, 21, HRS - NO SIZE RATING,