Electric Actuator

35% to 85% 5 to 20 60% to 95% Lead 16: LEY32A 112 Force [lbf] 21 to 50 60% to 85% 21 to 50 80% to 95% 90 1 to 4 20% to 65% 1 to 4 40% to 95% 67.4 LEY25lA LEY25l 5 to 20 35% to 65% 5 to 20 60% to 95% 45 21 to 35 50% to 65% 21 to 35 80% to 95% 22.5 1 to 4 20% to 85% 030 40 50 60 70 80 90 LEY32l 5 to 20 35% to 85% Set value of pushing force [%] 21 to 30 60% to 85% Max. 85% Note) For the vertical

High Vacuum Angle Valve

15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

ZP

-A3 ZP3A-T1-B3 ZP3A-T1-A6-B3 ZP3A-T3-A5 ZP3A-T3-B5 Note 1) ; in the table indicates the pad material.

Vacuum Pad

-A3 ZP3A-T1-B3 ZP3A-T1-A6-B3 ZP3A-T3-A5 ZP3A-T3-B5 Note 1) ; in the table indicates the pad material.

Vacuum Pad

-A3 ZP3A-T1-B3 ZP3A-T1-A6-B3 ZP3A-T3-A5 ZP3A-T3-B5 Note 1) ; in the table indicates the pad material.

Vacuum Pad

-A3 ZP3A-T1-B3 ZP3A-T1-A6-B3 ZP3A-T3-A5 ZP3A-T3-B5 Note 1) ; in the table indicates the pad material.

Electric Slide Tables

20 4 18 to 36 10 to 200 10 to 20 1.5 10 to 20 20 to 400 20 3 17.5 to 35 10 to 200 10 to 20 0.5 5 to 7.5 20 to 400 20 1 7.5 to 11 10 to 200 10 to 20 Servo Motor (24 VDC)/Step Motor (Servo/24 VDC) Actuator specifications Electric specifications Lock unit specifications Pushing force 50 to 100% [N] Note 2) LES LESH LECA6 LECP6 LEC-G LECP1 LECPA Speed [mm/s] Pushing speed [mm/s] Max. acceleration

Table of Contents

ZS-20-5A-50 . 1 pc.

Aluminum High Vacuum Angle Valve

15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

Integrated Controller

600 600 X 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Mey L5 [mm] L5 [mm] L5 [mm] L5 [mm] 600 600 600 600 m Wall L5 Y 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20

HRX-OM-X071

For HRR050-AF-20/40G thread adapter set 1 set For HRR050-AN-20/40NPT thread adapter set 1 set 1 In the case of option Z, not included.

CATALOG

~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC Material Polyurethane Polyurethane Polyurethane Polyurethane Polyurethane Polyurethane Polyurethane Polyurethane Polyurethane Polyurethane Courtesy of Steven Engineering, Inc. !

Electric Actuators

T4 = 0.2 [s] 200 Calculation example) T1 to T4 can be calculated as follows. T1 = V/a1 = 200/3000 = 0.067 [s], T3 = V/a2 = 200/3000 = 0.067 [s] 160 Overhang: L1 [mm] T2 = = = 0.033 [s] L 0.5 V (T1 + T3) V 20 0.5 200 (0.067 + 0.067) 200 120 T4 = 0.2 [s] Therefore, the cycle time can be obtained as follows.

SMC Electronic Switch Series Variations

1.5 16 18 20 16 18 20 11 11 13 13 9 9 Gasket 3.3 Gasket 3.3 3.10-5 Compact Pressure Switch ZSE2/ISE2 Dimensions/ISE2l01 T1 01 T1 01 T1 Grommet style/ISE2l-15 Connector style/ISE2l-15C trimmer Pressure setting trimmer Pressure setting Indicator light Indicator light PSE ZSE4 ISE4 15 Lead wire length 600 15 (3000) L H 20 20 ZSE5 ISE5 Lead wire length 600 ZSE6 ISE6 ZSE3 ISE3 (3000) GS 9.5 PS

1.1

Q = qm x C x (T2 T1) x qv x C x T 60 = x qv x 60 x C x T 860 = 1 x 25 x 60 x 1.0 x 2.0 860 = 1 x 25 x 4.2 x 2.0 60 = = 3.50 [kJ/s] 3.5 [kW] 3000 [kcal/h] 860 = Cooling capacity = Considering a safety factor of 20%, 3.5 [kW] x 1.2 = 4.2 [kW] 3.5 [kW] Cooling capacity = Considering a safety factor of 20%, 3.5 [kW] x 1.2 = 4.2 [kW] Thermo-cooler T1: Outlet temperature Q: Heat generation

240

LZ LC3F2 T4 = 0.2 [s] Calculation example) T1 to T4 can be calculated as follows. 200 T1 = V/a1 = 200/3000 = 0.067 [s], T3 = V/a2 = 200/3000 = 0.067 [s] 160 Overhang: L1 [mm] T2 = = = 0.033 [s] L 0.5 V (T1 + T3) V 20 0.5 200 (0.067 + 0.067) 200 120 T4 = 0.2 [s] 80 Therefore, the cycle time can be obtained as follows.

13

Average suction flow rate V x 60 T1 V x 60 T1 Q = Q = + QL T2 = 3 x T1 T2 = 3 x T1 Q : Average suction flow rate /min (ANR) V : Piping capacity () T1 : Arrival time to stable Pv 63% after adsorption (sec.) T2 : Arrival time to stable Pv 95% after adsorption (sec.) QL : Leakage at work adsorption /min (ANR) 2.

Step Motor Controller

Power supply cable (LEC-CK1-1) is an accessory.

Electric Rotary Table

Value when an external stopper is mounted.

Slider Type Ball Screw Drive/11-LEFS Series

Calculation example) T1 to T4 can be calculated as follows. L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time [s] T = T1 + T2 + T3 + T4 [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.