Cooling Capacity: 018 [1600/1800, (50/60 Hz)], Cooling Method: Water-cooled, Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option 1: M + T, Option 2: -

Cooling Capacity: 018 [1600/1800, (50/60 Hz)], Cooling Method: Water-cooled, Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option 1: None, Option 2: -

Cooling Capacity: 018 [1600/1800, (50/60 Hz)], Cooling Method: Water-cooled, Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option 1: M+T1, Option 2: -

Cooling Capacity: 018 [1600/1800, (50/60 Hz)], Cooling Method: Water-cooled, Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option 1: None, Option 2: w/Feet and No Rack Mounting Brackets

Cooling Capacity: 018 [1600/1800, (50/60 Hz)], Cooling Method: Water-cooled, Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option 1: Applicabe to DI Water Piping, Option 2: No Flow Sensor, Water Leakage Sensor, Particle Filter, Bypass Valve or Retaining Clip

Cooling Capacity: 018 [1600/1800, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option: MU (M+U)

Cooling Capacity: 018 [1600/1800, (50/60 Hz)], Cooling Method: W (Water-cooled), Pipe Thread: F [G (w/Rc-G Conversion Fitting Set)], Option 1: M (Applicabe to DI Water Piping)

Cooling Capacity: 018 [1600/1800, (50/60 Hz)], Cooling Method: Air-cooled, Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option: M+U

Cooling Capacity: 018 [1600/1800, (50/60 Hz)], Cooling Method: Water-cooled, Pipe Thread: F [G (w/Rc-G Conversion Fitting Set)], Option 1: Applicabe to DI Water Piping, Option 2: -

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Critical pressure 0.6 0.5 Sonic 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 JSXD30 Port size 1/4 JSXD30 Port sizes 3/8, 1/2 JSXD40 Port size 3/8 JSXD40 Port size 1/2 JSXD50 Port size 3/4 JSXD60 Port size 1 10 1000 2000 3000 10 1000 2000 3000 4000 15 2000 4000 6000 8000 15 2500 5000 7500 10 20 5000 10 15000 25 5000 10 15000 20 Flow rate Q [L/min (ANR)] For Air (Orifice diameter: 35 mm, 40 mm, 50 mm

Plate Cylinder

MU-D02 MU-D03 MU-D04 MU-D05 MU-D06 Size 25 32 40 50 63 8 10 10 14 14 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 8 10 10 14 14 CL 26 42 54 64 72 CR 5.3 6.4 8.4 10.5 13 CT 9.5 11 14 17 20 CX 9 11 13 16 16 CZ 8 10 10 14 16 DL 26 42 54 64 72 DR 5.3 6.4 8.4 10.5 13 DX 18 22 26 32 32 DY 9 11 13 16 16 DZ 8 10 10 14 16 DT 9.5 11 14 17 20 Applicable pin

MU

MU-D02 MU-D03 MU-D04 MU-D05 MU-D06 Bore (mm) 25 32 40 50 63 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 DZ 8 10 10 14 16 CZ 8 10 10 14 16 DY 9 11 13 16 16 CX 9 11 13 16 16 DX 18 22 26 32 32 CT 9.5 11 14 17 20 DT 9.5 11 14 17 20 CR 5.3 6.4 8.4 10.5 13 DR 5.3 6.4 8.4 10.5 13 CL 26 42 54 64 72 DL 26 42 54 64 72 Applicable pin CD-MU02 CD-MU03 CD-MU04

MU

MU-D02 MU-D03 MU-D04 MU-D05 MU-D06 Bore (mm) 25 32 40 50 63 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 DZ 8 10 10 14 16 CZ 8 10 10 14 16 DY 9 11 13 16 16 CX 9 11 13 16 16 DX 18 22 26 32 32 CT 9.5 11 14 17 20 DT 9.5 11 14 17 20 CR 5.3 6.4 8.4 10.5 13 DR 5.3 6.4 8.4 10.5 13 CL 26 42 54 64 72 DL 26 42 54 64 72 Applicable pin CD-MU02 CD-MU03 CD-MU04

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

style: CQ2F/CDQ2F RQ A Without auto switch B A FT FV FX FD FZ B With auto switch Bore size (mm) MU 5 st 5 st 10 st 5 st 10 st 5 st 10 st 10 st 20 st 20 st 20 st 20 st 32 40 50 56 62 76 5.5 5.5 6.6 28 50 60 38 65 72 89 60 33 70 43 8 8 9 45 54 67 D34.5 66.5 44.5 66.5 39.5 76.5 49.5 56.5 68.5 40.5 78.5 50.5 88.5 50.5 98.5 60.5 -X L L1 M Bore size (mm) 5 st 10 st 20 st 5 st 10 st 20 st 2032

MU

MU-D02 MU-D03 MU-D04 MU-D05 MU-D06 8 10 10 14 14 8 10 10 14 14 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 Applicable pin DZ 8 10 10 14 16 CZ 8 10 10 14 16 DY 9 11 13 16 16 CX 9 11 13 16 16 DX 18 22 26 32 32 CT 9.5 11 14 17 20 DT 9.5 11 14 17 20 CR 5.3 6.4 8.4 10.5 13 DR 5.3 6.4 8.4 10.5 13 CL 26 42 54 64 72 DL 26 42 54 64 72 Part No.

CQ2

8.5 5.5 5.5 8 8 7.5 7.5 7.5 10.5 12.5 12.5 6.5 9.5 CU CQS 14.5 14.5 CQ2 10 8.5 MU Auto Switch Mounting Bracket Part No.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

YA 03 YA-03 32, 40 42 6 16 6.8 18 6.5 10 MU YA-05 50, 63 50 8 20 9 20 6.5 12 Applicable air cylinder bore YA-08 80 62 10 25 11 26 8.5 16 D03 05 08 10 For 32, 40 For 50, 63 80 100 Mounting bracket YA-10 100 76 12 30 14 31 10.5 18 YA YB YU Type A mounting bracket -X Bore size (mm) U V W Weight (g) Part no.

Free Mount Cylinder Series CU

Applicable bore size (mm) d MU H1 B1 C1 M3 x 0.5 1.8 5.5 6.4 6 10 16 20 25 32 NTP-006 NTP-010 NTJ-015A NT-015A NT-02 NT-03 M4 x 0.7 2.4 7 8.1 M5 x 0.8 4 8 9.2 M6 x 1.0 5 10 11.5 M8 x 1.25 5 13 15.0 M10 x 1.25 6 17 19.6 (mm) Bore size (mm) A A' B C D E F FL FK FY GA GB H J L MM K 6 10 16 20 25 32 7 10 11 12 15.5 19.5 12.5 14 18 22 13 15 20 26 32 40 22 24 32 40 50 62 3 4 6 8 10 12 7 7 7 9

mlu

MU-C02 MU-C03 MU-C04 MU-C05 Part no. MU-D02 MU-D03 MU-D04 MU-D05 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 8 10 10 14 Applicable pin no.

MLU

MU-C02 MU-C03 MU-C04 MU-C05 Part no. MU-D02 MU-D03 MU-D04 MU-D05 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 8 10 10 14 Applicable pin no.