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Cooling Capacity: 090 (9.5 kW Air/ 11.0kW Water), Cooling Method: W (Water-cooled Refrigeration), Power Supply: 20 [3-phase 200VAC (50 Hz); 3-phase 200 to 230VAC (60 Hz)]

Cooling Capacity: 090 (9.5 kW Air/ 11.0kW Water), Cooling Method: W (Water-cooled Refrigeration), Power Supply: 20 [3-phase 200VAC (50 Hz); 3-phase 200 to 230VAC (60 Hz)], Option: CM (Compressor Inverter + Applicable to DI Water Piping)

OFF 45 ON Max. 6 38 24.5 Symbol 3 port (A) 2 (A) 2 1.5 3 1.5 28 82 (110) 12 12 1 (P) R port (5 port only) 5 port (A) 2 (A) 2 12 12 1 (P) 3 (R) 3 (R) 32 16 40 R port (5 port only) 3 x 1/4 53.2 25 25 * 0.5 MPa supply 63.5 F.O.F.* 40 N T.T. 45 Foot pedal VM220-02-40A VM230-02-40A 3 x 6.5 mounting hole Symbol 2 port 54 71 (A) 2 152 12 10 159 1 (P) 177 3 port (A) 2 1/4 2(A) T.T. 12 10 1 (P) 3

www.stevenengineering.com I 6.11 VACUUM VACUUM PADS SERIES ZP H O W T O O R D E R ZPT P A D V E R T I C A L T Y P E W I T H O U T B U F F E R ZPT V A C U U M E N T R Y ( A L S O M O U N T I N G T H R E A D D I A) P A D D I A M E T E R S Y M B O L T H R E A D D I A M E T E R 2~ 8 10~ 16 20~ 32 40 50 02 2 04 4 06 6 08 8 10 10 13 13 16 16 20 20 25 25 32 32 40 40 50 50 P A D M AT E R I A L Male

AFD20-A) and NPT1/4 (applicable to the AFM30-A/40-A, AFD30-A/40-A).

A G E A P P L I C A T I O N S S E E N E X T P A G E Courtesy of Steven Engineering, Inc. !

P.194 Note 1) P.195 P.196 P.197 P.197 P.198 P.199 Switch P.201 P.202 P.202 P.203 P.204 P.205 P.205 P.206 P.207 Note 1) For 40 to 63 only. 12 to 32 are available as a special product.

Note 3) Separate spacers are required for modular unit. 227 Regulator with Built-in Pressure Gauge ARG20(K)/30(K)/40(K) Replacement Procedure is P.431 Construction ARG20/30/40 ARG20K/30K/40K B-B A-A B-B y r IN OUT !0 t o o i u B A A P K U C S O H L to The numbers are the same as the "Construction" of the Best Pneumatics No.5 Series ARG. B Replacement Parts Part no.

-XC88 -XC89 CA2 Basic: CA2B G 2 x P 2 x Cushion valve G Width across flats KA 4 x J MM D E B C H1 AL WA WA B C B1 A K N ZZ + Stroke S + Stroke N F M H (mm) Bore size (mm) 40 50 63 80 100 AL B B1 C D E F G H1 J K KA M MM N P S WA H ZZ A 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 17.5 15 15 19 19 15 17 17 21 21 8 11 11 13 16 M8

, D-Y7PWV, D-Y7BWV MY1CW25/32/40/50/63 B A Reed Switch Solid State Switch D-Z73, D-Z76, D-Z80 (mm) D-Y7BAL (mm) D-Y7NW(V), D-Y7PW(V), D-Y7BW(V) D-Y59 , D-Y69 , D-Y7P(V) A B A B 63 50 40 32 25 Mounting position 63 50 40 32 25 Mounting position 40 32 25 Mounting position A A A 323.5 278.5 157.5 127.5 97.5 278.5 157.5 127.5 97.5 323.5 157.5 127.5 97.5 B B B 136.5 121.5 182.5 152.5 122.5 121.5

Dimensions ZP2-Z002 ZP2-Z003 40 20 0.1 0.2 A A 20 0.1 0.2 40 A A 20 40 A-A A-A w q q w 11 20 9 18 90 4 x 4 90 4 x 4 4 e e 5 5 () 12 () 4 x 2.4 1.8 1.5 4 x 2.4 1.5 0.9 20 9.4 Component Parts Component Parts Part no. Description No. ZP2-Z2A ZP2-Z2B ZP2-Z2C Material PTFE FKM Aluminum alloy Note Clear anodized Part no. Description No.

Without auto switch With auto switch CQ2 C NCQ2 C CQ2 H NCQ2 H inch Stroke range (mm) Bore size (mm) E D F Q P (CQ2) M5 x 0.8 A B F 5.5 B P (CQ2) P (NCQ2) A P (NCQ2) M5 X 0.8 Q 11.5 5 10 to 50 75, 100 5 to 50 75, 100 10 to 50 75, 100 30 40 36.5 46.5 38.5 48.5 23 33 29.5 39.5 30.5 40.5 32 13 13.3 16 45 33 7.5 Rc 1/8 NPT1/8 10.5 40 M8 x 1.25 5/16-24UNF Rc 1/8 NPT 1/8 10.5 7.5 40 13 18.3 52

Dimensions ZP2-Z002 ZP2-Z003 40 20 0.1 0.2 A A 20 0.1 0.2 40 A A 20 40 A-A A-A w q q w 11 20 9 18 90 4 x 4 90 4 x 4 4 e e 5 5 () 12 () 4 x 2.4 1.8 1.5 4 x 2.4 1.5 0.9 20 9.4 Component Parts Component Parts Part no. Description No. ZP2-Z2A ZP2-Z2B ZP2-Z2C Material PTFE FKM Aluminum alloy Note Clear anodized Part no. Description No.

R 30 (Rotating angle) 40, 50 Construction p. 120 Buffer Assembly p. 130 66 A Basic Pad Bellows Type ZP Series How to Order Dimensions/ Models Construction Mounting Bracket Assembly ZP 06 B N p. 68 p. 115 p. 117 From p. 121 Pad unit ZP T 06 B N A5 From p. 69 p. 115 p. 117 From p. 121 With adapter ZP T 06 B N J 6 B3 A8 From p. 79 p. 116 p. 118 From p. 124 With buffer q w e r t y u i Bellows

A Auto switch 50 to 100 50 to 100 HS HS 12 12 SMC SMC 24.5 24.5 A 33 B A 33 Auto switch B D-C73C/C80C 20 to 40 D-H7C 20 to 40 HS HS Auto switch Auto switch B A B A 50 to 100 50 to 100 HS HS 8.5 8.5 SMC SMC 16 16 A 36.7 Auto switch A 38.2 B Auto switch D-A3/G39/K39 D-A44 Auto switch HS HS 36 36 Auto switch A 49 B A 49.5 B G 1/2 (Applicable cable O.D. 6.8 to 11.5) G 1/2 (Applicable

Rod Side Trunnion Style (U) CM2U P Bore size Stroke 20 20 25 P P (Head side pressure port) (Head side pressure port) P P Width across flats B2 Width across flats B1 (Rod side pressure port) (Rod side pressure port) 32 to 40 NN Width across flats KA P (Head side pressure port) H1 I TD G G TY D Q K A AL TX TZ MM QY NA P TT N S + Stroke ZZ + Stroke H Z N (Rod side pressure port) D(mm) A AL B1

Dimensions ZP2-Z002 ZP2-Z003 40 20 0.1 0.2 A A 20 0.1 0.2 40 A A 20 40 A-A A-A w q q w 11 20 9 18 90 4 x 4 90 4 x 4 4 e e 5 5 () 12 () 4 x 2.4 1.8 1.5 4 x 2.4 1.5 0.9 20 9.4 Component Parts Component Parts Part no. Description No. ZP2-Z2A ZP2-Z2B ZP2-Z2C Material PTFE FKM Aluminum alloy Note Clear anodized Part no. Description No.