1.1

EMO circuit An EMO (EMergency Off) circuit is an electrical circuit provided to shut off all power and ensure safe conditions when an emergency stop button (EMO button) is pressed in an emergency. Hardware interlock This is an equipment control circuit for shutting off power in case of trouble.

Vacuum Pad

Suffix of how to order (@) U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3A-T2-A5 ZP3A-T2-B5 ZP3A-T2-A10-B5 ZP3A-T2-A10-04 Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.

Vacuum Pad

Suffix of how to order (@) U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3A-T2-A5 ZP3A-T2-B5 ZP3A-T2-A10-B5 ZP3A-T2-A10-04 Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.

Vacuum Pad

Suffix of how to order (@) U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3A-T2-A5 ZP3A-T2-B5 ZP3A-T2-A10-B5 ZP3A-T2-A10-04 Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.

HRX-OM-X071

Applicable model HRR050-A/W-40-T1 HRR050-A/W-40-T2 Rated flow50/60Hz common*1 L/min 16 24 Maximum pump head 50/60Hz common*2 m 50 Pump Output W 400 750 Circuit protector A 10 Recommended earth leakage breaker capacity A 10 Due to an increase in heat generation of the pump. The cooling reduces about 400W from the value in the catalog.

13

(Sequence in selection graph (4), ) T2: 12 seconds.

Vacuum Equipment

the internal pressure in the 5 l tank is discharged to 95% (T2) of the final vacuum pressure through the use of a valve with an effective area of 18 mm 2.

Electric Actuators

T1 = V/a1 = 200/3000 = 0.067 [s], T3 = V/a2 = 200/3000 = 0.067 [s] 40 0.5 200 (0.067 + 0.067) 200 T2 = = = 0.133 [s] L 0.5 V (T1 + T3) V T4 = 0.2 [s] Therefore, the cycle time can be obtained as follows.

Slider Type Ball Screw Drive/11-LEFS Series

Check SpeedWork Load Graph (Guide) on pages 39 and 40. Furthermore, if the cable length exceeds 5 m, then it will decrease by up to 10% for each 5 m. Note 3) A reference value for correcting an error in reciprocal operation.

240

40 40 0 0.2 0.4 0.6 0.8 1 0 0 0.2 0.4 0.6 0.8 1 0 0.0 0.4 0.8 1.2 1.6 2.0 0 0.0 0.4 0.8 1.2 1.6 2.0 0 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 200 200 200 200 Horizontal/Bottom 160 160 160 160 L2 L2 [mm] L2 [mm] L2 [mm] L2 [mm] 120 120 120 120 Me m Y 80 80 80 80 40 40 40 40 0 0 0.2 0.4 0.6 0.8 1 0 0.0 0.4 0.8 1.2 1.6 2.0 0 0.0 0.4 0.8 1.2 1.6 2.0 0 0 0.2 0.4 0.6 0.8 1

Stability of suction position,

The vacuum pressure when using an ejector is approximately 40 to 60 kPa as a guide. The theoretical lifting force of a pad can be found by calculation or from the theoretical lifting force table.

Metal Seal/Rubber Seal Series VQ Body Ported

The spacers specification can be changed (from an individual SUP spacer to an individual EXH spacer) by changing the coupling of the fittings and bushing.

Environment

20 Work load [kg] 0 10 20 30 40 Work load [kg] 1500 1500 1500 L4 1000 1000 1000 L4 [mm] L4 [mm] L4 [mm] X 500 500 500 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] 1500 1500 1500 Mey 1000 1000 1000 L5 [mm] L5 [mm] L5 [mm] m Wall Y L5 500 500 500 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load

Cooling Capacity: 200 (CH1: 19 kW; CH2: 1 kW), Pipe Thread: Rc, Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz); 3-phase 460 to 480 VAC (60 Hz)], DI Option: CH2 w/Electric Conductivity Control, Pump Option: T2 (20 L/min, CH2 Optical Head)

Cooling Capacity: CH1: 19 kW; CH2: 1 kW, Pipe Thread: Rc, Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz); 3-phase 460 to 480 VAC (60 Hz)], DI Option: CH2 w/Electric Conductivity Control, Pump Option: 20 L/min, CH2 Optical Head

Table of Contents

Retainer prevents an accidental loss of needle.

Electric Slide Tables

Power supply cable (LEC-CK1-1) is an accessory.

Environment

Note 15) For an actuator with lock, add the power consumption for the lock.

Vacuum

units al available, wilhod magnal lor auloswilch capabiltv a10 s16-s32 i/5 x 0.8 M5 x 0.8 5-30 5 7 20 32 2 7 8 28 16.5 31 N,l5 x 0.8 1/8 (PT) 5-50 6.6 8 26 40 o l o 20 33 1 9 M5 x 0.8 1i8 (Pn 5-CU 8 32 50 10 1 0 '10 20 22 43.5 zcDUKDs2 l1/8(PT) 1/8 (PT) 5-50 1 1 . 5 10.5 40 62 5 1 2 11 't2 29 22 35 R 40 1 9 , 5 7.6 Depth 12.5 15.5 85.5 1 2 T'6 46 21 9.5 Deplh at '13,5 5 1S.5 96 33 20 M5

Vacuum

units al available, wilhod magnal lor auloswilch capabiltv a10 s16-s32 i/5 x 0.8 M5 x 0.8 5-30 5 7 20 32 2 7 8 28 16.5 31 N,l5 x 0.8 1/8 (PT) 5-50 6.6 8 26 40 o l o 20 33 1 9 M5 x 0.8 1i8 (Pn 5-CU 8 32 50 10 1 0 '10 20 22 43.5 zcDUKDs2 l1/8(PT) 1/8 (PT) 5-50 1 1 . 5 10.5 40 62 5 1 2 11 't2 29 22 35 R 40 1 9 , 5 7.6 Depth 12.5 15.5 85.5 1 2 T'6 46 21 9.5 Deplh at '13,5 5 1S.5 96 33 20 M5