Compact Hydraulic Cylinder

52 25 to 1400 M10 x 1.25 58 38 16 32 15 37 31 3/8 39 141 11 25 16 16 209 22 38 40 12 15 52 52 25 to 1400 M10 x 1.25 65 45 12 32 15 36 30 3/8 42 141 11 25 16 16 209 22 38 1/3.5 stroke 50 15 15 55 52 25 to 1400 M10 x 1.25 76 52 15 40 19 43 35 1/2 46 155 13 31.5 20 20 230 25 45 63 15 20 65 55 25 to 1500 M12 x 1.5 90 63 15 42 19 43 35 1/2 52 163 15 40 31.5 31.5 261 40 63 80 17 20 80

Vacuum System Peripherals:

U D side D B Special specification M U side 2 to 10 stations 15 15 Includes number of blanking plate assembly .

Industrial Filters

D 3B (90) ORIENTATION N N OUT IN 250 DRAIN Rc3/8 Standard Models (mm) Maximum operating pressure Element length (L) Internal volume (L) IN/OUT Flange standard Weight (kg) N (Port size) A B C D Model 15 (1/2B) 185 380 447 467 15 20 (3/4B) 250 2 185 380 450 470 15 25 (1B) 185 385 467 487 15 JIS 10KFF 1 MPa FGC1 15 (1/2B) 185 645 712 732 19 20 (3/4B) 500 3 185 645 715 735 19 25 (1B) 185 650

1

2 (n = 2, 4, 6) Note 3) 50 + 27.5 (n 2) (n = 2, 3, 4, 5) CQ2 CQS Luberetainer D-M9lV 5 5 10 + 10 (n 2) (n = 4, 6) Note 4) D-A9lV 5 10 10 + 15 (n 2) (n = 4, 6) Note 4) JA D-M9l D-A9l 10 (5) Note 5) 10 15 + 15 (n 2) (n = 4, 6) Note 4) MXH D-M9lWV D-M9lAV 10 15 15 + 15 (n 2) (n = 4, 6) Note 4) MXQ D-M9lW 15 (10) Note 5) 15 20 + 15 (n 2) (n = 4, 6) Note 4) MGP D-M9lA 15 (10) Note

5-Port Solenoid Valve

SY3000 SY30M-15-1A SY5000/7000 SY50M-15-1A 15 4A SY30M Part number is for one assembly.

5 Port Solenoid Valve

COM. () COM. 23 24 (+) 26 21 Note) 22 Positive COM Negative 19 20 19 20 COM 17 18 17 18 15 16 15 16 13 14 13 14 Note) Mounting valve has no polarity.

Compact 5-Port Solenoid Valve

335.5 348 373 385.5 L4 150 162.5 187.5 200 212.5 225 250 262.5 275 300 312.5 325 337.5 362.5 375 L5 15 13 17 16 14 12 17 15 13 18 16 14 12 17 15 96 JSY1000/3000/5000 Series Common Dimensions Type 10/Side Ported Dimensions: JSY1000 Series External Pilot, Built-in Silencer JJ5SY1-10m (D) (S, R) U D B C2 C4 C6 Stations P, E port entry: D External pilot (Made to Order) U side D side (21.6) L

Table of Contents

C1 = C (mm) D1 = Q2 L2 max Y Size (mm) 10 D1 L1 max X Size 3 Y 1 2 to 8 C1 10 15 Y = 3 X 3 4 to 14 Y 1.5 3 to 9 3 to 4 C2 L1= L2 = 15 20 X 4 5 to 18 3 to 4 Y 1.5 3 to 10 3 to 5 X= 20 D2 = 30 X 4.5 6 to 20 3 to 5 Y 2 3 to 13 3 to 6 C2 = C 30 40 X 5 6 to 22 3 to 6 Y 4.5 6 to 15 3 to 8 Symbol: A7 Symbol: A8 The short shaft can be further shortened by machining it into a stepped round

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

C1 = C (mm) D1 = Q2 L2 max Y Size (mm) 10 D1 L1 max X Size 3 Y 1 2 to 8 C1 10 15 Y = 3 X 3 4 to 14 Y 1.5 3 to 9 3 to 4 C2 L1= L2 = 15 20 X 4 5 to 18 3 to 4 Y 1.5 3 to 10 3 to 5 X= 20 D2 = 30 X 4.5 6 to 20 3 to 5 Y 2 3 to 13 3 to 6 C2 = C 30 40 X 5 6 to 22 3 to 6 Y 4.5 6 to 15 3 to 8 Symbol: A7 Symbol: A8 The short shaft can be further shortened by machining it into a stepped round

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

C1 = C (mm) D1 = Q2 L2 max Y Size (mm) 10 D1 L1 max X Size 3 Y 1 2 to 8 C1 10 15 Y = 3 X 3 4 to 14 Y 1.5 3 to 9 3 to 4 C2 L1= L2 = 15 20 X 4 5 to 18 3 to 4 Y 1.5 3 to 10 3 to 5 X= 20 D2 = 30 X 4.5 6 to 20 3 to 5 Y 2 3 to 13 3 to 6 C2 = C 30 40 X 5 6 to 22 3 to 6 Y 4.5 6 to 15 3 to 8 Symbol: A7 Symbol: A8 The short shaft can be further shortened by machining it into a stepped round

CRB2/CRBU2/CRB1

X 15 Y1.5 3 to 9 3 to 4 C1 C2 Y = L2 = L1= 10 3 X1 2 to 14 20 Y1.5 3 to 10 3 to 5 15 X1.5 3 to 18 3 to 4 D2 = 30 Y2 3 to 13 3 to 6 C2 = C X = 20 X1.5 3 to 20 3 to 5 40 Y4.5 6 to 15 3 to 8 30 X2 3 to 22 3 to 6 Symbol: A7 Symbol: A8 The short shaft can be further shortened by machining it into a stepped round shaft with male threads.

7.5

4(A) 2(B) KJL03-C2 5/32" one-touch fitting assembly (Elbow type) KJL02-C2 2 one-touch fitting assembly (Elbow type) SJ3000 4(A) 2(B) KJL07-C2 1/4" one-touch fitting assembly (Elbow type) KJL04-C2 4 one-touch fitting assembly (Elbow type) KJW01-C2 1/8" one-touch fitting assembly (Long elbow type) KJL06-C2-N 6 one-touch fitting assembly (Elbow type) KJW03-C2 5/32" one-touch fitting assembly

Air Cylinder Series CM2

+ 45 10 15 Note 1) Note 1) 45 (n = 2, 4, 6) CLJ2 (n 2) 2 50 + 45 (n 2) 15 + 45 D-C7 D-C80 10 15 50 (n = 2, 4, 6) CLM2 D-H7 D-H7W D-H7BAL/H7NF (n 2) 2 60 + 45 (n 2) 15 + 45 10 15 60 CLG1 (n = 2, 4, 6) CL1 D-C73C D-C80C D-H7C (n 2) 2 15 + 50 10 15 65 65 + 50 (n 2) (n = 2, 4, 6) MLGC (n 2) 2 75 + 55 (n 2) 15 + 50 D-B5/B64 D-G5NTL CNG 10 15 75 (n = 2, 4, 6) MNB (n 2) 2 75 + 55 (n 2

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y Connection 4 4 thread 1.6 6 15 10 66 23 43 15 71 28 25 81 38 33 18 D B 02 1.2 Width across flats 12 A N S U F GN GS B3 B5 04 06 N4 U4 6 33 18 15 10 66 23 43 15 71 28 25 81 38 J K ZP T U 04 A8 1.6 6 33 18 J: 2.5 K: 2 15 10 66 23 43 15 71 28 25 81 38 06 08 C2 Dimensions Per Vacuum Inlet: Female Thread Vacuum inlet: One-touch

A_HEC-OM-K001

Signal 1 DC output 2 DC output 3 FG DC connector HED007-C2* (HED003-C2*, HED005-C2*) DDK D/MS3102A20-15S Connect the DC cable connector of Heat Exchanger. Pin No.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

L Dimension n : Stations L n 2 148 137.5 89 15 63 5 173 162.5 120.5 12 94.5 4 173 162.5 110 17 84 6 185.5 175 131 13 105 7 198 187.5 141.5 14 115.5 3 160.5 150 99.5 16 73.5 8 210.5 200 152 15 126 9 223 212.5 162.5 16 136.5 10 235.5 225 173 17 147 11 235.5 225 183.5 11.5 157.5 12 248 237.5 194 12.5 168 13 260.5 250 204.5 13.5 178.5 14 273 262.5 215 14.5 189 15 285.5 275 225.5 15.5 199.5 16

Air Cylinder

10 15 50 15 + 45 (n 2) 2 (n = 2, 4, 6)Note 3) 50 + 45 (n 2) (n = 2, 3, 4, 5) D-H7l D-H7lW D-H7BA D-H7NF 10 15 60 15 + 45 (n 2) 2 (n = 2, 4, 6)Note 3) 60 + 45 (n 2) (n = 2, 3, 4, 5) CG3 JMB MB D-H7C D-C73C D-C80C 10 15 65 15 + 50 (n 2) 2 (n = 2, 4, 6)Note 3) 65 + 50 (n 2) (n = 2, 3, 4, 5) D-G5NT D-B5l/B64 10 15 75 15 + 50 (n 2) 2 (n = 2, 4, 6)Note 3) 75 + 55 (n 2) (n = 2, 3, 4, 5)

No more element replacement!

Note Quantity 5 m END400-005 1 FN4102l 20 m END400-020 1 8 Series FN1/FN4 Dimensions: FN1 Rc1/4 0 315 45 OUT IN B.C.D230 135 225 4 x 11 42 G46-15-02M Pressure gauge port size Rc1/4 Note) Use the Rc1/4 port marked with an asterisk when designing an air release circuit. l108 Rc1/4 Head end cylinder port Rc1/4 Dustproof cover Rod end cylinder port (Manual lock release) Rc1/8 Unlocking port D

SMC Pneumatic Clean Series

88 64 62 62 42.5 34.5 30 24 47.3 37 37 30 21.5 15 15 15 46.5 37.5 33.5 28 7 5.5 5.5 5 1/8 143 113 111 107 154 122 120 116 M26 x 1.5 M26 x 1.5 M20 x 1.5 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 21 19.5 19.5 15.5 26-0.033 0 7 7 7 5 4 4 1/4 1/8 1/8 14 12 10 16 13 13 26-0.033 0 32-0.039 0 82 36 10 8 M32 x 2 With air cushion Cushion valve (Width across flats 1.5) WB C2 2-FD Relief port M5 x 0.8

CRBU

C1 = C (mm) D1 = Y 2 to 8 L2 max Size (mm) 10 L1 max X Size Y 1 C1 L1 = 10 3 to 9 15 X 1 2 to 14 Y 1.5 Y = L2 = C2 15 3 to10 20 X 1.5 3 to 18 Y 1.5 X = 20 3 to13 30 X 1.5 3 to 20 Y 2 C2 = C D2 = 30 6 to15 40 X 2 3 to 22 Y 4.5 Symbol: A7 The long shaft can be further shortened by machining it into a stepped round shaft with male threads.