AR20-B to AR60-B

Model Option AR20(K)-B AR25(K)-B AR30(K)-B AR40(K)-B AR40(K)-06-B AR50(K)-B AR60(K)-B Bracket assembly Note 1) AR23P-270AS AR28P-270AS AR33P-270AS AR43P-270AS AR52P-270AS Set nut AR23P-260S AR28P-260S AR33P-260S AR43P-260S Note 2) Round type Note 3) Standard G36-10-01 G46-10-01 0.02 to 0.2 MPa setting G36-4-01 G46-4-01 (with color zone) Standard G36-10-01-L G46-10-01-L Pressure Round type

AR Series Modular Type Regulator

v Note 7) v Note 7) v Note 7) v Note 7) Note 1) Option B, G, H, M are not assembled and supplied loose at the time of shipment.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

only)] G36-7-01 G46-7-02 Round type Note 2) 0.7 MPa Pressure gauge Square embedded type Note 3) GC3-7AS [GC3P-010AS (Pressure gauge cover only)] ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output / Wiring bottom entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top entry Note 4) Digital type ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

only)] G36-7-01 G46-7-02 Round type Note 2) 0.7 MPa Pressure gauge Square embedded type Note 3) GC3-7AS [GC3P-010AS (Pressure gauge cover only)] ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output / Wiring bottom entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top entry Note 4) Digital type ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

E-P HYREG ® Series VY1 1

G Description 04 06 10 02 03 04 02 03 04 VY110 0 1VY120 0 1VY130 0 1VY140 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 VY1D00-M5 VY1A0 0 1-M5 VY150 0 1VY1B0 0 1M 0 5 1 01 02 01 02 PPA B VEX9-32A VEX5-32A VEX7-32A VEX3-32A VEXA-18-2A VEX1-18-1A Bracket (With bolt, washer) AL F VEX1-18-2A VEXA-18-3A G27-10-R1-X207 G G46-10-01 G36-10-01 G27-10-01 Pressure gauge AN120-M5 AN120-M5 Pilot EXH port silencer

VEX1

Symbol Parts name VEX11001 02 VEX12001 02 VEX13002 03 04 04 06 10 VEX150VEX17010 12 VEX19014 20 VEX3-32A VEX5-32A VEX7-32A VEX9-32A VEX1-18-1A G27-10-01 G36-10-01 B F G Bracket (with bolt and washer) Air operated External pilot solenoid G46-10-01 VEX1-18-2A Pressure gauge (1) Note 1) When requring the gauge except mentioned above, specify the model number.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

, Fluorine-free (20-) 20-ARP20(K) 20-ARP30(K) 20-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G46-4-l01-X3 G46-4-l02-X3 0.4 MPa Pressure gauge G46-2-l01-X3 G46-2-l02-X3 Round type Note 2) 0.2 MPa G46-7-l01-X3 G46-7-l02-X3 0.7 MPa Clean Room Compliant, Copper-free, Fluorine-free (21-) 21-ARP20(K) 21-ARP30(K) 21-ARP40

Clean Regulator

Refer to back page 50 for Safety Instructions and pages 387 to 391 for Precautions on every series. 0 to 0.2 G46-2-02-SRB G46-4-02-SRA 0 to 0.4 G46-4-02-SRB MPa G46-7-02-SRA Caution Selection 0 to 0.7 G46-7-02-SRB G46-10-02-SRA 0 to 1.0 1) Avoid use in locations with strong pressure pulsation or vibration.

Water Regulator

Model Pressure range *1 Indication unit Connection thread Note MPa Port size 01 Rc1/8 02 Rc1/4 R1/8 R1/4 G46-7-02-SRB 0 to 0.7 R1/4 G46-10-02-SRB 0 to 1.0 G46-4-01 to 02-SRB 0 to 0.4 MPa Set pressure range: 0.05 to 0.69 MPa 02 WR110 X215 *1: Do not apply more pressure than the max. pressure displayed. It may cause a malfunction.

ZP

-A22 ZPX125 50-(B/N/T)01-A22 ZPX125 75-(B/N/T)01-A22 ZPX125 100-(B/N/T)01-A22 ZPB-X1 25-(B/N/T)01 ZPB-X1 50-(B/N/T)01 ZPB-X1 75-(B/N/T)01 ZPB-X1 25-(B/N/T)01 ZPB-X1 50-(B/N/T)01 ZPB-X1 75-(B/N/T)01 ZPB-X2 25-(B/N/T)01 ZPB-X2 50-(B/N/T)01 ZPB-X2 75-(B/N/T)01 ZPB-X2 25-(B/N/T)01 ZPB-X2 50-(B/N/T)01 ZPB-X2 75-(B/N/T)01 ZPB-X3 25-(B/N/T)01 ZPB-X3 50-(B/N/T)01 ZPB-X3 75-(B/N/T)01 ZPB-X3 100-(B

ZP

-A22 ZPX125 50-(B/N/T)01-A22 ZPX125 75-(B/N/T)01-A22 ZPX125 100-(B/N/T)01-A22 ZPB-X1 25-(B/N/T)01 ZPB-X1 50-(B/N/T)01 ZPB-X1 75-(B/N/T)01 ZPB-X1 25-(B/N/T)01 ZPB-X1 50-(B/N/T)01 ZPB-X1 75-(B/N/T)01 ZPB-X2 25-(B/N/T)01 ZPB-X2 50-(B/N/T)01 ZPB-X2 75-(B/N/T)01 ZPB-X2 25-(B/N/T)01 ZPB-X2 50-(B/N/T)01 ZPB-X2 75-(B/N/T)01 ZPB-X3 25-(B/N/T)01 ZPB-X3 50-(B/N/T)01 ZPB-X3 75-(B/N/T)01 ZPB-X3 100-(B

ZP

-A22 ZPX125 50-(B/N/T)01-A22 ZPX125 75-(B/N/T)01-A22 ZPX125 100-(B/N/T)01-A22 ZPB-X1 25-(B/N/T)01 ZPB-X1 50-(B/N/T)01 ZPB-X1 75-(B/N/T)01 ZPB-X1 25-(B/N/T)01 ZPB-X1 50-(B/N/T)01 ZPB-X1 75-(B/N/T)01 ZPB-X2 25-(B/N/T)01 ZPB-X2 50-(B/N/T)01 ZPB-X2 75-(B/N/T)01 ZPB-X2 25-(B/N/T)01 ZPB-X2 50-(B/N/T)01 ZPB-X2 75-(B/N/T)01 ZPB-X3 25-(B/N/T)01 ZPB-X3 50-(B/N/T)01 ZPB-X3 75-(B/N/T)01 ZPB-X3 100-(B

・When mounting a pressure gauge with a non-standard pressure range on a VEX1 □3□ series regulator, keep in mind that the G36 and the G46 have a max. display pressure of either up to 0.2, up to 0.4, or up to 0.7 MPa.
The part numbers are as follows: G36(46)-2-01, G36(46)-4-01, G36(46)-7-01

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 7 (0.7MPa), Connection Thread: 02 (R 1/4), Attachment: None, Option: X2 (Nickel Plated)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 7 (0.7MPa), Connection Thread: 02M (R 1/4, M5 Female), Attachment: C (Clear Cover Non Removable, Wrench Tighten), Option: X2 (Nickel Plated)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 7 (0.7MPa), Connection Thread: 02M (R 1/4, M5 Female), Attachment: C2 (Clear Cover Removable, Wrench Tighten), Option: X2 (Nickel Plated)

LMU100/200 Series Mist Spray Unit

gauge 10 G46-10-01 1 Pressure gauge 11 G46-4-01-L 1 Pilot valve 12 81022P 1 O-ring 13 NBR KA00078 1 O-ring 14 FKM KA00099 2 Regulator 15 INA-13-717 1 VO307KG1-X328 1 2 5 1 2 5 VO315-00 G Solenoid valve 16 1 Solenoid valve 17 1 O-ring 18 NBR 4 KA00087 1065 A LMU100/200 Series Related Products Mixing Valve: LMV Series Specifications Inlet air pressure Ambient and fluid temperature 0.3 MPa

Water Regulator

Model Pressure range *1 Indication unit Connection thread Note MPa Port size 01 Rc1/8 02 Rc1/4 R1/8 R1/4 G46-7-02-SRB 0 to 0.7 R1/4 G46-10-02-SRB 0 to 1.0 G46-4-01 to 02-SRB 0 to 0.4 MPa Set pressure range: 0.05 to 0.69 MPa 02 WR110 X215 *1: Do not apply more pressure than the max. pressure displayed. It may cause a malfunction.

Booster Regulator Series VBA1110 to 4200 1

G46-10-01 2 pcs. G27-10-R1-X209 2 pcs. G27-10-R1-X209 2 pcs. G46-10-01 2 pcs.