Vacuum Pad

ZPA-X3-B01-B10 ZPA-X3-N01-B10 ZPA-X3-T01-B10 ZPA-X3-B01-B12 ZPA-X3-N01-B12 ZPA-X3-T01-B12 Adapter assembly part no.

Vacuum Pad

ZPA-X3-B01-B10 ZPA-X3-N01-B10 ZPA-X3-T01-B10 ZPA-X3-B01-B12 ZPA-X3-N01-B12 ZPA-X3-T01-B12 Adapter assembly part no.

Vacuum Pad

ZPA-X3-B01-B10 ZPA-X3-N01-B10 ZPA-X3-T01-B10 ZPA-X3-B01-B12 ZPA-X3-N01-B12 ZPA-X3-T01-B12 Adapter assembly part no.

ZP

ZPA-X3-B01-B10 ZPA-X3-N01-B10 ZPA-X3-T01-B10 ZPA-X3-B01-B12 ZPA-X3-N01-B12 ZPA-X3-T01-B12 Adapter assembly part no.

ZP

ZPA-X3-B01-B10 ZPA-X3-N01-B10 ZPA-X3-T01-B10 ZPA-X3-B01-B12 ZPA-X3-N01-B12 ZPA-X3-T01-B12 Adapter assembly part no.

ZP

ZPA-X3-B01-B10 ZPA-X3-N01-B10 ZPA-X3-T01-B10 ZPA-X3-B01-B12 ZPA-X3-N01-B12 ZPA-X3-T01-B12 Adapter assembly part no.

Pressure Gauge Guide

VE 3 Bleed port Model (Made to Order) Pressure range Note) Indication unit Connection thread VY1 Note Model MPa G43-2-01 to 02-X2 G43-4-01 to 02-X2 G43-6-01-X2 G43-7-01 to 02-X2 G43-10-01 to 02-X2 G43-2-01 to 02-X3 G43-4-01 to 02-X3 G43-6-01-X3 G43-7-01 to 02-X3 G43-10-01 to 02-X3 G43-2-01 to 02-X4 G43-4-01 to 02-X4 G43-6-01-X4 G43-7-01 to 02-X4 G43-10-01 to 02-X4 0 to 0.2 0 to 0.4 0 to 0.6

G15/G27

Model (Made to Order) 3 Bleed port Pressure range (1) Connection thread Note Indication unit Model MPa 0 to 0.2 0 to 0.4 0 to 0.6 0 to 0.7 0 to 1.0 0 to 0.2 0 to 0.4 0 to 0.6 0 to 0.7 0 to 1.0 0 to 0.2 0 to 0.4 0 to 0.6 0 to 0.7 0 to 1.0 G43-2-01 to 02-X2 G43-4-01 to 02-X2 G43-6-01-X2 G43-7-01 to 02-X2 G43-10-01 to 02-X2 G43-2-01 to 02-X3 G43-4-01 to 02-X3 G43-6-01-X3 G43-7-01 to 02-X3 G43

Table of Contents

TU0425R-100-X3 Longer length reel Metric size: Suffix -X3 to the end of part number. Ex.) TU0425G-500-X3 20 m roll Inch size: Suffix -X4 to the end of part number. Ex.) TIUB01W-20-X4 Made to Order Availability Length Model Part no.

T

TS0425R-100-X3 Longer length reel Metric size: Suffix -X3 to the end of part number. Ex.) TS0425G-500-X3 20 m roll Inch size: Suffix -X4 to the end of part number. Ex.) TISA01BU-20-X4 Made to Order Availability Length Model Part no.

Table of Contents - Tubing

I.D. 427 TU0425-100-X3 TU0604-100-X3 TU0805-100-X3 TU1065-100-X3 TU1208-100-X3 4 6 8 10 12 2.5 4 5 6.5 8 285 Max. operating pressure 142 0 4 32 70 105 140 10Clean Series Operating temperature F Only available in 20m rolls.

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

G46-4-l02-X3 0.4 MPa Pressure gauge G46-2-l01-X3 G46-2-l02-X3 Round type Note 2) 0.2 MPa G46-7-l01-X3 G46-7-l02-X3 0.7 MPa Clean Room Compliant, Copper-free, Fluorine-free (21-) 21-ARP20(K) 21-ARP30(K) 21-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-l01MS-X3 G49-4-l02MS-X3 0.4 MPa Pressure gauge G49-2-l01MS-X3

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

G46-4-l02-X3 0.4 MPa Pressure gauge G46-2-l01-X3 G46-2-l02-X3 Round type Note 2) 0.2 MPa G46-7-l01-X3 G46-7-l02-X3 0.7 MPa Clean Room Compliant, Copper-free, Fluorine-free (21-) 21-ARP20(K) 21-ARP30(K) 21-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-l01MS-X3 G49-4-l02MS-X3 0.4 MPa Pressure gauge G49-2-l01MS-X3

CRB2/CRBU2/CRB1

D2 J K T J K T J K T Size C2 Y = 50 4 to 39.5 Y3 3 to 11.9 C1 L2 = 50 3 to 11.9 X3 4 to 39.5 63 Y3 3 to 14.9 4 to 45 63 3 to 14.9 X3 4 to 45 D2 = L1 = C2 = C 80 Y3 3 to 16.9 4 to 53.5 80 3 to 16.9 X3 4 to 53.5 X = 100 Y4 3 to 24.9 5 to 65 100 3 to 24.9 X4 5 to 65 80 Simple Specials Series CRB1 Axial: Top (Long-shaft side) Axial: Bottom (Short-shaft side) Symbol: A45 Symbol: A46 The short

Air Fittings & Tubing

Suffix -X3 to the end of part number. Ex.) T0425B-500X3 Available 150m for 10, 200m for 8, 500m for 4 and 6. Contact SMC for other lengths. Suffix -X3 to the end of part number. Ex.)

Table of Contents

Y3 X3 ZY -07L Max. vacuum pressure: 53 kPa Y3 X3 ZY -07S Max. vacuum pressure: 84 kPa Exhaust Characteristics Flow Characteristics Exhaust Characteristics Flow Characteristics 50 50 100 100 100 100 Vacuum pressure Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) 40 40 80 80 80 80 Vacuum pressure (kPa

Ejector Valve Unit Series ZYY/ZYX 1

Y3 X3 ZY -07L Max. vacuum pressure: 53 kPa Y3 X3 ZY -07S Max. vacuum pressure: 84 kPa Exhaust Characteristics Flow Characteristics Exhaust Characteristics Flow Characteristics 50 50 100 100 100 100 Vacuum pressure Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) 40 40 80 80 80 80 Vacuum pressure (kPa

Ejector Valve Unit, Series ZYY/ZYX

Exhaust Characteristics/Flow Rate Characteristics Y3 X3 ZY -07L Max. vacuum pressure: 53KPa {400mmHg} Y3 X3 ZY -07S Max. vacuum pressure: 84KPa{630mmHg} Exhaust characteristics Flow rate characteristics Exhaust characteristics Flow rate characteristics 50 50 -100 -100 -100 -100 Vacuum pressure Suction flow rate l/min(ANR) Air consumption flow rate l/min(ANR) Suction flow rate l/min(ANR)

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

G49-4-02MS-X3 0.4 MPa Pressure gauge G49-2-01MS-X3 G49-2-02MS-X3 Round type Note 2) 0.2 MPa G49-7-01MS-X3 G49-7-02MS-X3 0.7 MPa Note 1) Assembly includes a bracket and set nuts.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

G49-4-02MS-X3 0.4 MPa Pressure gauge G49-2-01MS-X3 G49-2-02MS-X3 Round type Note 2) 0.2 MPa G49-7-01MS-X3 G49-7-02MS-X3 0.7 MPa Note 1) Assembly includes a bracket and set nuts.