SMC

3) Although wire length should not affect switch function, use a wire 100m or shorter. 7. Do not use a load that generates surge voltage. When driving a load such as a relay that generates a surge voltage, use a switch with a built-in contact protection circuit or a contact protection box.

Size: 16, Motor Mounting Position: D3 (Size 16, In-line, Top Side), Motor Type: H (Battery-less Absolute, Step Motor 24 VDC), Lead, mm: A (Size 16: 10; Size 25: 12; Size 32: 16), Stroke: 50mm, Motor Option: without Option, Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: Ends Tapped, Body Bottom Tapped, Controller Position: B (Integrated Controller), Parallel Input

Size: 16, Motor Mounting Position: D3 (Size 16, In-line, Top Side), Motor Type: H (Battery-less Absolute, Step Motor 24 VDC), Lead, mm: A (Size 16: 10; Size 25: 12; Size 32: 16), Stroke: 150mm, Motor Option: without Option, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped, Body Bottom Tapped, Controller Position: B (Integrated Controller), Parallel Input: 6 (PNP)

Size: 16, Motor Mounting Position: D3 (Size 16, In-line, Top Side), Motor Type: H (Battery-less Absolute, Step Motor 24 VDC), Lead, mm: A (Size 16: 10; Size 25: 12; Size 32: 16), Stroke: 30mm, Motor Option: without Option, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped, Body Bottom Tapped, Controller Position: B (Integrated Controller), Parallel Input: 6 (PNP)

Size: 25, Motor Mounting Position: Top Side Parallel, Motor Type: H (Battery-less Absolute, Step Motor 24 VDC), Lead, mm: H (Size 25: 20; Size 32: 24), Stroke: 100mm, Motor Option: without Option, Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: Ends Tapped, Body Bottom Tapped, Controller Position: B (Integrated Controller), Parallel Input: 6 (PNP)

Size: 25, Motor Mounting Position: Top Side Parallel, Motor Type: H (Battery-less Absolute, Step Motor 24 VDC), Lead, mm: A (Size 16: 10; Size 25: 12; Size 32: 16), Stroke: 100mm, Motor Option: without Option, Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: Ends Tapped, Body Bottom Tapped, Controller Position: B (Integrated Controller), Parallel Input: 6 (PNP)

Size: 25, Motor Mounting Position: D (In-line), Motor Type: H (Battery-less Absolute, Step Motor 24 VDC), Lead, mm: A (Size 16: 10; Size 25: 12; Size 32: 16), Stroke: 100mm, Motor Option: without Option, Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: Ends Tapped, Body Bottom Tapped, Controller Position: B (Integrated Controller), Parallel Input: 6 (PNP)

Size: 32, Motor Mounting Position: Top Side Parallel, Motor Type: H (Battery-less Absolute, Step Motor 24 VDC), Lead, mm: A (Size 16: 10; Size 25: 12; Size 32: 16), Stroke: 100mm, Motor Option: without Option, Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: Ends Tapped, Body Bottom Tapped, Controller Position: B (Integrated Controller), Parallel Input: 6 (PNP)

Size: 25, Motor Mounting Position: D (In-line), Motor Type: H (Battery-less Absolute, Step Motor 24 VDC), Lead, mm: H (Size 25: 20; Size 32: 24), Stroke: 100mm, Motor Option: without Option, Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: Ends Tapped, Body Bottom Tapped, Controller Position: B (Integrated Controller), Parallel Input: 6 (PNP)

Size: 16, Motor Mounting Position: D3 (Size 16, In-line, Top Side), Motor Type: H (Battery-less Absolute, Step Motor 24 VDC), Lead, mm: B (Size 16: 5; Size 25: 6; Size 32: 8), Stroke: 100mm, Motor Option: without Option, Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: Ends Tapped, Body Bottom Tapped, Controller Position: B (Integrated Controller), Parallel Input

Size: 16, Motor Mounting Position: D3 (Size 16, In-line, Top Side), Motor Type: H (Battery-less Absolute, Step Motor 24 VDC), Lead, mm: C (Size 16: 2.5; Size 25: 3; Size 32: 4), Stroke: 100mm, Motor Option: without Option, Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: Ends Tapped, Body Bottom Tapped, Controller Position: B (Integrated Controller), Parallel Input

Size: 16, Motor Mounting Position: Top Side Parallel, Motor Type: H (Battery-less Absolute, Step Motor 24 VDC), Lead, mm: C (Size 16: 2.5; Size 25: 3; Size 32: 4), Stroke: 100mm, Motor Option: without Option, Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: Ends Tapped, Body Bottom Tapped, Controller Position: B (Integrated Controller), Parallel Input: 6 (PNP)

Size: 25, Motor Mounting Position: Top Side Parallel, Motor Type: Battery-less Absolute, Step Motor 24 VDC, Lead, mm: Size 25: 20; Size 32: 24, Stroke: 100mm, Motor Option: without Option, Rod End Thread: Rod End Male Thread, 1 Rod End Nut Included, Mounting: Ends Tapped, Body Bottom Tapped, Controller Position: Integrated Controller, Parallel Input: PNP

Size: 25, Motor Mounting Position: Top Side Parallel, Motor Type: Battery-less Absolute, Step Motor 24 VDC, Lead, mm: Size 25: 12; Size 32: 16, Stroke: 100mm, Motor Option: without Option, Rod End Thread: Rod End Male Thread, 1 Rod End Nut Included, Mounting: Ends Tapped, Body Bottom Tapped, Controller Position: Integrated Controller, Parallel Input: PNP

Size: 25, Motor Mounting Position: In-line, Motor Type: Battery-less Absolute, Step Motor 24 VDC, Lead, mm: Size 25: 12; Size 32: 16, Stroke: 100mm, Motor Option: without Option, Rod End Thread: Rod End Male Thread, 1 Rod End Nut Included, Mounting: Ends Tapped, Body Bottom Tapped, Controller Position: Integrated Controller, Parallel Input: PNP

Size: 32, Motor Mounting Position: Top Side Parallel, Motor Type: Battery-less Absolute, Step Motor 24 VDC, Lead, mm: Size 25: 12; Size 32: 16, Stroke: 100mm, Motor Option: without Option, Rod End Thread: Rod End Male Thread, 1 Rod End Nut Included, Mounting: Ends Tapped, Body Bottom Tapped, Controller Position: Integrated Controller, Parallel Input: PNP

Step Motor Controller

B1 B2 B3 B4 B5 B6 B7 B8 B9 B10 B11 B12 B13 Dot color Dot mark Cable color Connector pin No.

ZP

Form w 1 Material e Vacuum inlet r Connection thread 10 13 16 04 B5 B6 4 20.6 10.4 3 N S U F GN GS 06 6 21.6 12.8 4 04 B5 B6 B8 4 23.3 10.4 3 06 6 24.3 12.8 4.5 08 8 26.2 15.2 6 40 50 06 B6 B8 6 24.3 12.8 4.5 08 8 26.2 15.2 6 20 25 32 ZP R U 1 N: NBR, S: Silicone rubber, U: Urethane rubber, F: FKM, GN: Conductive NBR, GS: Conductive silicone rubber 2 Indicates the minimum hole size of the

Step Motor Controller

B1 B2 B3 B4 B5 B6 B7 B8 B9 B10 B11 B12 B13 Dot color Dot mark Cable color Connector pin No.

1

LOCK FREE A B A 14 A B A 14 12 B 12 B 12 B Valve/Series SY3000 (Mixed Mounting) Plug 3/5(E) port Upward (Type U) Downward (Type B) Downward (Type B) [SUP/EXH block] [Valve] LOCK FREE LOCK FREE One-touch fitting [4(A), 2(B) port] Applicable tube O.D.: 4, 5/32" : 6, 1/4" LOCK FREE LOCK FREE ( ) B6 : 10.7 BN7 : 13.2 6.5 16.9 4(A) port ( ) L6 : 32.9 LN7 : 35.4 2(B) port ( ) B6 : 9.7 BN7 : 7.2