Piping: Centralized Piping, Bore Size: 20mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 250mm, Auto Switch: M9N--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Piping: Centralized Piping, Bore Size: 20mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 300mm, Auto Switch: M9N--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: -, Number: -

1

Note 3) Refer to page 200 for dimensions of A or B port top-ported type.

Piping: G (Centralized Piping), Bore Size: 20mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 200mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Piping: G (Centralized Piping), Bore Size: 20mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 200mm, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m), Number: 3 pcs.

Piping: G (Centralized Piping), Bore Size: 20mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 200mm, Auto Switch: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: M (1m)

Piping: G (Centralized Piping), Bore Size: 20mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 200mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)

Piping: G (Centralized Piping), Bore Size: 20mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 200mm, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)

Piping: G (Centralized Piping), Bore Size: 20mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 200mm, Auto Switch: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal

Piping: Centralized Piping, Bore Size: 20mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 200mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Piping: Centralized Piping, Bore Size: 20mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 200mm, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: 3 pcs.

Piping: Centralized Piping, Bore Size: 20mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 200mm, Auto Switch: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 1m, Number: -

Piping: Centralized Piping, Bore Size: 20mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 200mm, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 20, Stroke(mm): 200, Max.

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 20, Stroke(mm): 200, Max.

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 20, Stroke(mm): 200, Max.

Table of Contents

200 300 300 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa 150 150 0.3 MPa 0.3 MP 0.3 MPa 0.3 MPa 0.3 MP 0.3 MPa 200 200 0.3 MPa 0.3 MPa 0.3 MPa 0.3 MP 0.3 MPa 100 100 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 100 100 50 50 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MP 0.1 MPa 0.1 MPa 0.1 MP 0.1 MPa 50 100 150 200 0 0 50 100 150 200 0 40 80 120 160 200 0 40 80

High Vacuum Angle Valve

How to Order [Option] XLGV M9N 16 A 1 G L Flange size 16, 25, 40 1 q e u r t XLGV M9N 50 A 1 G L Flange size 50, 63, 80 i w y o !0 !

Aluminum High Vacuum Angle Valve

Uniform baking temperature 108 154 10.6 300 138 200 18.5 800 Common to all series.

Table of Contents

Caution 5 150 100 200 300 1.