Piping: G (Centralized Piping), Bore Size: 10mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 100mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)

Piping: G (Centralized Piping), Bore Size: 10mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 100mm, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Piping: G (Centralized Piping), Bore Size: 10mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 100mm, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: Z (5m)

Piping: G (Centralized Piping), Bore Size: 10mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 100mm, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)

Piping: Centralized Piping, Bore Size: 10mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 100mm, Auto Switch: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Piping: Centralized Piping, Bore Size: 10mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 100mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Piping: Centralized Piping, Bore Size: 10mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 100mm, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -

Piping: Centralized Piping, Bore Size: 10mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 100mm, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 5m, Number: -

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 10, Stroke(mm): 100, Max.

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dual 3-port valve Operating pressure range Internal pilot operating pressure range (MPa) 0.1 to 0.7 (High pressure type: 0.1 to 1) 100 kPa to 0.7 (4-position: 100 kPa to 0.6) 100 kPa to 0.7 (High pressure type: 100 kPa to 1) 2-position single 2-position double 3-position External pilot operating pressure range (MPa) Pilot pressure range 0.25 to 0.7 0.1 to 0.7 (High pressure type: 0.1 to

High Vacuum Angle Valve

XLC/XLCV Series How to Order XLC M9N A 16 Flange size 16, 25, 40 XLC M9N A 50 1 Flange size 50, 63, 80, 100, 160 q t y w e r u XLC16 to 40 q Flange size e Pilot port direction w Flange type Rear flange surface Applicable flange 16, 25, 40, 50, 63, 80 100, 160 63, 80, 100, 160 Type Symbol Size 16 25 40 50 63 80 100 160 Symbol Nil K L M Pilot port direction Flange side Left flange surface Rear

Table of Contents

100 Gripping point L (mm) Gripping point L (mm) Misc.

Aluminum High Vacuum Angle Valve

A 16 Flange size 16, 25, 40 XLG M9N A 50 1 Flange size 50, 63, 80, 100, 160 XLG q t y w e r u e Pilot port direction w Flange type q Flange size Symbol Nil K L M Pilot port direction Flange side Left flange surface Rear flange surface Right flange surface Size 16 25 40 50 63 80 100 160 Symbol Applicable flange 16, 25, 40, 50 63, 80, 100, 160 63, 80, 100, 160 Type Rear flange surface Nil

Piping: G (Centralized Piping), Bore Size: 10mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 400mm

Piping: G (Centralized Piping), Bore Size: 10mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 300mm

Piping: G (Centralized Piping), Bore Size: 10mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 50mm

Piping: G (Centralized Piping), Bore Size: 10mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 500mm

Piping: G (Centralized Piping), Bore Size: 10mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 450mm

Piping: G (Centralized Piping), Bore Size: 10mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 350mm

Piping: G (Centralized Piping), Bore Size: 10mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 200mm