AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

300, 400, 500, 600, 700, 800, 900 1000, 1200, 1500 LEF Work load [kg] Note 2) Horizontal 15 30 55 30 45 85 Vertical 3 5 10 6 10 20 LEJ Up to 500 1800 1200 600 1800 1200 600 501 to 600 1580 1050 520 1800 1200 600 601 to 700 1170 780 390 1800 1200 600 701 to 800 910 600 300 1390 930 460 801 to 900 720 480 240 1110 740 370 901 to 1000 580 390 190 900 600 300 1001 to 1100 480 320 160 750 500

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Specifications Model LEJS40 LEJS63 Stroke [mm] Note 1) 200, 300, 400, 500, 600, 700, 800 900, 1000, 1200 300, 400, 500, 600, 700, 800, 900 1000, 1200, 1500 Work load [kg] Note 2) Horizontal 15 30 55 30 45 85 LEF Vertical 3 5 10 6 10 20 Up to 500 1800 1200 600 LEJ 1800 1200 600 501 to 600 1580 1050 520 601 to 700 1170 780 390 LEL 701 to 800 910 600 300 1390 930 460 801 to 900 720 480 240 1110

Table of Contents

100 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200, 1300 DIntermediate strokes and short strokes other than the above are produced upon receipt of order.

Integrated Controller

Product Precautions Model EQFS16H EQFS25H EQFS32H EQFS40H Stroke [mm]1 50 to 500 50 to 800 50 to 1000 150 to 1200 Work load [kg]2 Horizontal 10 15 18 15 26 40 40 39.5 50 68 68 26 60 75 80 Vertical 3 6 12 2 6 12.5 15 4 10 16 20 4.5 4.5 25 40 Up to 400 10 to 800 5 to 400 3 to 195 20 to 1200 12 to 850 6 to 450 3 to 225 24 to 1100 16 to 750 8 to 450 4 to 125 30 to 1200 20 to 1000 10 to 500 5

Cylinder with Lock Series CLS

98 5 30 345 75 40 133 368 98 345 368 Up to 1200 30 to 1200 0.2 stroke 9 3/4 106 5 30 388.5 409.5 75 40 141 409.5 106 388.5 Up to 1200 30 to 1200 0.2 stroke 3/4 111 448 85 45 153 466 115 452 470 Up to 998 30 to 1200 0.2 stroke 3/4 111 468 90 45 153 486 120 477 495 30 to 1200 0.17 stroke 1 141 579.5 105 55 176 595.5 790 Double Acting, Single Rod Series CLS Cylinder with Lock Axial foot type

Air Cylinder Series CA2

RY RT (mm) Stroke range (mm) A Bore size (mm) 40 50 63 80 100 AL B B1 C D E F G H1 J K KA LD LH LS LT With rod boot Without rod boot 20 to 800 Up to 800 30 27 60 22 44 16 32 10 15 8 M8 x 1.25 6 14 9.0 40 138 3.2 Up to 1200 20 to 1200 35 32 70 27 52 20 40 10 17 11 M8 x 1.25 7 18 9.0 45 144 3.2 Up to 1200 20 to 1200 35 32 85 27 64 20 40 10 17 11 M10 x 1.25 7 18 11.5 50 166 3.2 20 to 1400 Up

Electric Actuator

) 1000, (1200), (1500) Horizontal 66 (30) 121 (55) 99 (45) 187 (85) Work load lb [kg] Note 2) Vertical 11 (5) 22 (10) 22 (10) 44 (20) Up to 500 1200 600 1200 600 501 to 600 1050 520 1200 600 601 to 700 780 390 1200 600 701 to 800 600 300 930 460 801 to 900 480 240 740 370 Stroke Speed Note 3) [mm/s] Actuator specifications Electric 901 to 1000 390 190 600 300 range AC Servo Motor Specific

CLS

(Up to 1200) 180 Up to 1500 (Up to 2000) Up to 1200 (Up to 1200) 200 Up to 998 (Up to 2000) Up to 998 (Up to 1200) Holding Force of Spring Locking (Maximum static load) 250 (Up to 2400) (Up to 1200) Auto switches are not available with steel tube.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

300, 400, 500, 600, 700, 800, 900 1000, 1200, 1500 Work load [kg] Note 2) Horizontal 30 55 45 85 Vertical 5 10 10 20 Up to 500 1200 600 1200 600 501 to 600 1050 520 1200 600 601 to 700 780 390 1200 600 701 to 800 600 300 930 460 801 to 900 480 240 740 370 901 to 1000 390 190 600 300 1001 to 1100 320 160 500 250 1101 to 1200 270 130 420 210 1201 to 1300 360 180 1301 to 1400 310 150 1401

Compact

(1100), (1200), (1300), (1400), (1500) Page 170 2000 20 32 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, (700), (800), (900), (1000) Page 170 2000 25 10 LEMHT Linear guide double axis type 48 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, (700), (800), (900), (1000), (1100), (1200), (1300), (1400), (1500) Page 170 32 2000 20 Strokes shown in ( ) are produced upon

Electric Actuator

Weight [g] Precautions Caution D-M9N(V) D-M9P(V) D-M9B(V) Auto switch model 0.5 8 8 7 Fix the auto switch with the existing screw installed on the auto switch body.

Made to Order

1200 Specifications XC6 Standard model no.

Smooth Cylinder/Low Speed Cylinder

or less 1200 or less 1600 or less Made of stainless steel (With hard chrome plated piston rod) -XC68 RZQ Accessory -XC86 With rod end bracket Basic Foot Rod flange Head flange Single clevis Double clevis Center trunnion For the specifications of cylinders with auto switch, please refer to pages 1238 to 1240.

Mechanically Jointed Rodless Cylinder Series MY1

) (1200) (1200) (1200) (1200) (1200) MY1MW25 MY1MW25 MY1CW25 MY1CW25 (1000) (1000) (1000) (1000) MY1MW20 MY1MW20 30 30 (1000) (900) (1000) (900) (1000) (900) (1000) (900) Caution MY1CW20 MY1CW20 MY1CW16 MY1MW16 MY1MW16 MY1CW16 MY1CW16 (900) (900) (900) (900) 20 20 1.

Air Cylinder Series CS1

30 to 1200 56 53 182 144 40 90 59 43 14 18.5 17 36 19 106 206 9 M16 x 1.5 Up to 1200 30 to 1200 63 60 204 162 45 115 70 48 17 18.5 20 41 24 125 231 10 M18 x 1.5 Up to 1200 30 to 1200 Lube Non-lube 63 60 226 182 50 115 74 48 17 18.5 20 46 24 132 231 10 M20 x 1.5 Up to 1200 30 to 1200 71 67 277 225 60 140 86 60 20 23 25 56 29 160 301 12 M24 x 1.5 Up to 1200 30 to 1200 80 76 330 270 70 140

MY1

Support brackets are not for mounting; use them solely for providing support. m 90 MY1C63 MY1C63 MY1C63 MY1C63 80 (1600) (1600) (1600) (1600) (1600) (1600) 70 MY1C50 MY1C50 MY1C50 MY1C50 MY1C50 MY1C50 l l 60 (1400) (1400) (1400) (1400) (1400) (1400) MY1C40 MY1C40 MY1C40 MY1C40 50 MY1C32 MY1C32 MY1C32 MY1C32 MY1C32 MY1C32 40 (1200) (1200) (1200) (1200) (1200) (1200) MY1C25 MY1C25 MY1C25 MY1C25

Environment

A Work load [kg] Work load [kg] LEJ LEJ 40 Lead 20: LEJS63A Lead 16: LEJS40A Lead 30: LEJS63H 30 Lead 24: LEJS40H LEL A 20 A LEM 10 A A 0 LEY 0 200 400 600 800 1000 1200 1400 1600 1800 0 200 400 600 800 1000 1200 1400 1600 1800 Speed [mm/s] Speed [mm/s] LES Vertical Vertical LEPY LEPS 10 20 Lead 10: LEJS63B Lead 8: LEJS40B A Area where the regeneration option is required.

High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

CLS

Mounted directly to unlocking port Maximum value from range of 100 measured stopping positions 1600 or less 1000 or less 1000 or less 125, 140 1600 or less 1200 or less 1200 or less 160 2000 or less 1200 or less 180 Class 2 Pressure Vessel 2000 or less 1200 or less 200 A class 2 pressure vessel will be required for strokes exceeding those shown below. 2400 or less 1200 or less 250 Cylinder

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or less 1200 or less 1600 or less 160 Made of stainless steel (With hard chrome plated piston rod) -XC68 Accessory -XC86 With rod end bracket Basic Foot Rod flange Head flange Single clevis Double clevis Center trunnion For the specifications of cylinders with autoswitch, please refer to pages 21 to 24.