CRQ2

, 15, 20, 30, 40 10, 15 10, 15 20, 30, 40 Chart 5.

CJ2X/CUX/CQSX/CQ2X/CM2X

MVGQ 10 16 20, 25 32 0.54 10% M3 CUX32-PS Grease pack (10 g): 1 pc. 1.23 10% M4 It is impossible to replace seals in bore size 10 mm. CC 2.55 10% M5 4.02 10% M6 2. Grease pack When maintenance requires only grease, use the following part numbers to order. Grease pack GR-L-005 (5 g) GR-L-010 (10 g) GR-L-150 (150 g) RB Operating Precautions J Warning 1.

CJ2X/CUX/CQSX/CQ2X/CM2X

MVGQ 10 16 20, 25 32 0.54 10% M3 CUX32-PS Grease pack (10 g): 1 pc. 1.23 10% M4 It is impossible to replace seals in bore size 10 mm. CC 2.55 10% M5 4.02 10% M6 2. Grease pack When maintenance requires only grease, use the following part numbers to order. Grease pack GR-L-005 (5 g) GR-L-010 (10 g) GR-L-150 (150 g) RB Operating Precautions J Warning 1.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

37.5 32 32 39.5 42.5 5.4 5.4 7 10 6 8 10 12 25 29 36 40 5 5 5.5 5.5 32 38 47 52 5 6 8 10 3.5 3.5 4.5 5 15.5 20 25.5 28 6.5 6.5 9 9 7 7 10 10 4 4 7 7 0.5 0.5 1 1 3.5 3.5 5.4 5.4 5, 10 For the following bore/stroke sizes, through-hole is threaded over the entire length.

CXS

20 CY 15 10 MG 0.1 10 CX 0.1 6 6 D-X 0.03 5 5 10 20 30 40 50 100 10 20 30 40 50 100 20Overhang L (mm) Overhang L (mm) Graph (4) V = Up to 800 mm/s (Up to 700 mm/s for 15, 20) Data CXSJM CXSJL Graph (3) V = Up to 600 mm/s CXSJM CXSJL 20 32 0.5 25 1 15 20 0.5 15 Weight m (kg) 10 0.1 10 0.1 6 6 10 20 30 40 50 100 5 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Note) V = 700 mm/s for 15

CXS

10 to 32 Graph (3) V = 200 mm/s Graph (4) V = 400 mm/s 4 20 3 10 32 5 25 1 Weight m (kg) Weight m (kg) 32 20 25 0.5 1 20 15 0.5 15 10 CXSM CXSL CXSM CXSL 10 5 0.1 5 0.1 10 20 30 40 50 100 10 20 30 40 50 100 Overhang l (mm) Overhang l (mm) Graph (5) V = 600 mm/s Graph (6) V = 700 mm/s (800 mm/s for 10) 2 0.6 20 32 25 0.4 1 15 20 Weight m (kg) Weight m (kg) 0.5 15 0.2 10 10 CXSM CXSL CXSM

SMC

10 10 10 10 10 58 70 87 NN 2 2 2 2 3 4 5 6 7 H 45 45 45 55 35 35 35 38 44 G 15 15 15 15 15 19 37 41 19 N 4 4 4 4 6 6 6 8 8 NA 2 2 2 2 2 2 4 4 4 HA 35 35 35 35 35 70 70 76 88 FF 40 40 40 50 35 60 70 70 80 GA 25 25 25 35 50 54 107 155 195 KA 169 223 275 13-/22-MXS20L-10 13-/22-MXS20L-20 13-/22-MXS20L-30 13-/22-MXS20L-40 13-/22-MXS20L-50 13-/22-MXS20L-75 13-/22-MXS20L-100 13-/22-MXS20L-125

Compact Cylinder

Minimum Auto Switch Mounting Stroke (mm) Auto switch model D-M9W D-M9A Bore size (mm) D-A9 D-A9V D-M9 D-M9V D-M9WV D-M9AV D-P3DW No. of auto switch mounted 2 pcs. 1 pc. 2 pcs. 1 pc. 2 pcs. 1 pc. 2 pcs. 1 pc. 2 pcs. 1 pc. 10 10 10 10 10 10 10 5 10 10 10 5 10 5 10 5 10 5 10 5 15 15 10 10 10 10 10 5 15 15 15 15 15 15 15 15 15 15 15 15 5 5 5 5 5 5 5 5 5 5 10 5 10 5 10 5 10 5 10 5 10 10 10 10

MTS

48 48 (63) 0 (10) 40 D-M9, D-M9V 10 (17) 0 0 54 59 (66) 48 58 (65) 5 (12) D-F9W, D-F9WV 10 (17) 0 0 54 59 (66) 48 58 (65) 5 (12) ( ): Denotes the values of D-A9V, D-M9V and D-F9WV.

Compact Type

Bore size/Stroke (mm) Bore size 6 10 15 20 25 32 Standard strokes 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 Applicable Auto Switches/Refer to page 15 for detailed auto switch specifications.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-4-17

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Specifications Suction flow rate of vacuum suction type (Reference

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-4-17

Compact Type Dual-Rod Cylinder Series CXSJ

Bore size/Stroke (mm) Bore size 6 10 15 20 25 32 Standard strokes 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 Applicable Auto Switches/Refer to page 15 for detailed auto switch specifications.

MXH

Eccentricity 200 mm 1 10 10 0.1 Weight m (kg) Weight m (kg) Weight m (kg) 1 1 20 16 20 16 10 6 20 16 10 6 0.01 0.1 0.1 10 6 0.01 0.001 0.01 80 100 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 Overhang L (mm) Overhang L (mm) Overhang L (mm) Selection Example 1.

MXH Series Compact Slide

10 1 10 1 0.1 Weight m(kg) Weight m(kg) Weight m(kg) 20 16 10 6 20 1 20 16 16 0.1 0.01 10 10 6 6 0.01 0.001 0.1 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L(mm) Overhang L(mm) Overhang L(mm) 1 kg = 2.2046 lb 1 kg = 2.2046 lb 1 kg = 2.2046 lb Graph 5 Load eccentricity 100mm Graph 8 Load eccentricity 100mm Graph 11 Load eccentricity 100mm 1 10 10 0.1 1 Weight m(kg) Weight

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

10 10 10 10 10 58 70 87 NN 2 2 2 2 3 4 5 6 7 H 45 45 45 55 35 35 35 38 44 G 15 15 15 15 15 19 37 41 19 N 4 4 4 4 6 6 6 8 8 HA 35 35 35 35 35 70 70 76 88 NA 2 2 2 2 2 2 4 4 4 FF 40 40 40 50 35 60 70 70 80 GA 25 25 25 35 50 54 107 155 195 KA 169 223 275 13-/22-MXS20L-10 13-/22-MXS20L-20 13-/22-MXS20L-30 13-/22-MXS20L-40 13-/22-MXS20L-50 13-/22-MXS20L-75 13-/22-MXS20L-100 13-/22-MXS20L-125

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 0.05 0.05 0.06 0.04 Table displacement mm Table displacement mm Table displacement mm 0.04 0.03 0.04 0.03 0.02 0.03 0.02 0.02 0.01 0.01 0.01 0 10 20 30 40 Load N 0 10 20 30 50 Load N 0 10 20 30 40 Load N 40 10 10 10 L = 100mm L = 100mm L = 100mm MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.04 0.03 0.08 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10

CRQ2

I = I + IA kgm (m to m : Mass of I to I kg) D Calculation example When d1 = 0.1m, d = 0.05m, D = 0.04m, a = 0.04m, b = 0.02m m = 1kg, m = 0.4kg, m = 0.5kg, m = 0.2kg, Gear tooth ratio = 2 Cylinder: I I = 0.2 x = 0.03 x 10 -3kg m I = 1 x = 1.25 x 10 -3 kgm 0.1 8 0.04+0.02 12 b IB = (0.13 + 0.1 + 0.03) x 10 -3= 0.26 x 10 -3 kgm 0.05 8 I = 0.4 x = 0.13 x 10 -3 kgm a IA = 2 x 0.26 x 10 -3 = 1.04

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

I = I + IA kgm (m to m : Mass of I to I kg) D Calculation example When d1 = 0.1m, d = 0.05m, D = 0.04m, a = 0.04m, b = 0.02m m = 1kg, m = 0.4kg, m = 0.5kg, m = 0.2kg, Gear tooth ratio = 2 Cylinder: I I = 0.2 x = 0.03 x 10 -3kg m I = 1 x = 1.25 x 10 -3 kgm 0.1 8 0.04+0.02 12 b IB = (0.13 + 0.1 + 0.03) x 10 -3= 0.26 x 10 -3 kgm 0.05 8 I = 0.4 x = 0.13 x 10 -3 kgm a IA = 2 x 0.26 x 10 -3 = 1.04