CLA

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ZR

Example) ZR100-K15MZ-E . 1 ZR1-RV3 . 1 13-3-37 37 Series ZR Valve Unit: ZR1-V Specifications ZR1-V Valve unit part no.

Flow Sensor Series PFMV

(mm) Type Port size Model 4 M5 x 0.8 M-5AN-4 Barb fitting for nylon tube 6 M-5AN-6 Internal Construction Component Parts q w e r t y e w q Material No.

MTS

7 q e @0 !0 o @2 @3 !5 u t !8 @1 r @4 w MX MTS MY 12 to 40 CY @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !

Microspeed Cylinder

Measuring conditions 10-CQSXB20-50D Chamber volume Cleanliness of air supplied to chamber 15l (0.53ft3) Same quality as supply air Hitachi Electronics Engineering Corporation TS-6200 Min. measurable particle dia. 0.1m Intake rate 28.3l/min (0.99CFM) Sampling time: 5min Interval time: 55min Operation frequency: 30cpm Average piston speed: 100mm/s (3.9inls) Mounting: Horizontal no-load Supply

Size, Body, Valve Type: 15L (Size: 1; Body Mat'l: Stainless Steel; Port Size: 1/4; Orifice Dia: 2, N.C.), Voltage and Electrical Entry: G (24VDC; DIN Terminal w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: E (Oil-free, NPT Thread), Mounting: XB (w/Bracket)

Size, Body, Valve Type: 15L (Size: 1; Body Mat'l: Stainless Steel; Port Size: 1/4; Orifice Dia: 2, N.C.), Voltage and Electrical Entry: G (24VDC; DIN Terminal w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: E (Oil-free, NPT Thread)

Size, Body, Valve Type: 15L (Size: 1; Body Mat'l: Stainless Steel; Port Size: 1/4; Orifice Dia: 2, N.C.), Voltage and Electrical Entry: A (24VDC; Grommet), Other Voltages and Electrical Options: None, Other Options: E (Oil-free, NPT Thread)

This is a legacy product, and replaced byCDRA1BS80-190Z, ACTUATOR, ROTARY, SW CAPABLE, ACTUATOR, CRA ROTARY ACTUATOR, RE, 80MM CRA DBL-ACT AUTO-SW, 12.57450 lb

Actuator, Rotary, Rack & Pinion Type, ROTARY ACTUATOR, 509, 5.1 lb

HRX-OM-X071

Control method PID control Ambient temperature andhumidity and altitude 12 Temperature:5 to 40,Humidity:30 to 70%,Altitude: Less than 3000m Circulating fluid*3 Tap water, 15% ethylene glycol aqueous solution Operating temperature range1 5 to 35 Cooling capacity (50/60Hz) 4 W 4600/ 5100 4800/ 5800 Heating capacity (50/60Hz) 5 W 1000/ 1200 1100/ 1200 Temperature stability 6 0.1 7 MPa 0.34(at 15L

HRX-OM-K003

min 4 15 30 40 (1.1 [gal]/min) (4.0 [gal]/min) (7.9 [gal]/min) (10.6 [gal]/min) Facility water minimum necessary flow rate L/min 10 15 25 40 (2.6 [gal]/min) (4.0 [gal]/min) (6.6 [gal]/min) (10.6 [gal]/min) Operating temperature range C 20 to 90 Temperature stability *1 C 0.3 Circulating fluid *2 Ethylene glycol solution60% 0.35 / 0.55 0.45 / 0.65 0.40 / 0.60 0.35 / 0.55 (At 4L/min) (At 15L

PAB-OM-O003

port Rc,NPT,G 1/8 Female thread, 1/4 PFA tube, LQ1 size 2 with nuts, LQ3 size 2 with nuts Port size Pilot air Supply / Exhaust port Rc,NPT,G 1/8 Female thread Body wetted areas New PFA Diaphragm PTFE Material Check valve New PFAPTFE Liquid contact seals PTFE Maximum discharge rate 1000mL/min Note1) Average discharge pressurer 0 to 0.4MPa Pilot air pressure 0.2 to 0.5MPa Air consumption 15L

Process Pump

Specifications and how to order Specifications Model PAF3413 Actuation Air operated Main fluid: Suction/Discharge port RcGNPT 3/8 Female thread, 1/2 Tube extension, With nut (size 4, 5) Port size Pilot air: Supply/Exhaust port Rc, G, NPT 1/8 Body wetted areas newPFA Material Diaphragm/Seal PTFE Check valve newPFA, PTFE Discharge flow rate 1 to 15L/min Average discharge pressure 0 to 0.4MPa

PFMV5

PF2A ZS-36-A1 ZS-36-A2 ZS-36-A3 ZS-36-A4 ZS-36-A5 2 L-type brackets, 2 mounting screws M3 x 15L For 1 station (for single unit) For 2 stations 2 L-type brackets, 2 mounting screws M3 x 25L PF2W For 3 stations 2 L-type brackets, 2 mounting screws M3 x 35L For 4 stations 2 L-type brackets, 2 mounting screws M3 x 45L PF2D For 5 stations 2 L-type brackets, 2 mounting screws M3 x 55L IF 951

Microspeed Cylinders CJ2X/CUX/CQSX/CQ2X/CM2X

Measuring conditions 10-CQSXB20-50D Chamber volume Purity of air supplied to chamber 15l Same quality as supply air Evaluation of air purity inside chamber 100 Particle concentration (particles/cf) Hitachi Electronics Engineering Corporation TS-6200 Min. measurable particle dia.: 0.1m Intake rate: 28.3l/min 10 Laser dust monitor 1 Sampling time: 5min Interval time: 55min Operation frequency

！ Contact our sales office regarding a delivery date or a price since this is a special model. SP158X-002E P.G.Information (Specialized Product) P: TS SMC Corporation Liquid Dispense Pump (Solenoid type) 4-14-1, SOTO-KANDA

Fluid Note4) PEEKPP Body Diaphragm Check valve Fluid contact material EPDMFKM EPDMFKM Repeatability Note1) 1%(2% when the dispense volume is 5 to 15L) *Under SMC's measuring conditions Dispense pressure Note2) 10kPa 15kPa 35kPa Suction pressure Dry Wet Max.operating frequency Note3) 2Hz(Minimum ON time 200msec/Minimum OFF time 300msec) Fluid temperature 10 to 50(No freezing) Ambient temperature

Size, Body, Valve Type: 15L (Size: 1; Body Mat'l: Stainless Steel; Port Size: 1/4; Orifice Dia: 2, N.C.), Voltage and Electrical Entry: C (110VAC; Grommet w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: B (NPT Thread), Mounting: XB (w/Bracket)

Size, Body, Valve Type: 15L (Size: 1; Body Mat'l: Stainless Steel; Port Size: 1/4; Orifice Dia: 2, N.C.), Voltage and Electrical Entry: C (110VAC; Grommet w/Surge Voltage Suppressor)

Size, Body, Valve Type: 15L (Size: 1; Body Mat'l: Stainless Steel; Port Size: 1/4; Orifice Dia: 2, N.C.), Voltage and Electrical Entry: G (24VDC; DIN Terminal w/Surge Voltage Suppressor)