HRX-OM-X071

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C 3.3 Installation HRR Series 3-20 HRX-OM-X071 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

This is a legacy product, and replaced byCDRA1BS80-190Z, ACTUATOR, ROTARY, SW CAPABLE, ACTUATOR, CRA ROTARY ACTUATOR, RE, 80MM CRA DBL-ACT AUTO-SW, 12.57450 lb

Table of Contents

D. Applicable tube O. D.

MTS

30 25 20 15 10 5 D-A9 x x x (2) 2 pcs. on same side Standard piping type(1) D-M9, D-F9W x x (2) D-A9V x x x D-A9 (2) x 1 pc. each on 2 sides D-M9, D-F9W (2) 2-port size D-A9V x D-A9 (2) x x x 2 pcs. on same side Axial piping type D-M9, D-F9W (2) x x D-A9V x x x D-M9V, D-F9WV x x D-F8 D-A9 x (2) 1 pc. each on 2 sides D-M9, D-F9W (2) D-M9V x 2-port size D-M9V, D-F9WV D-F8 Note 1) With the

CLA

light/Operation D-AS9W, D-8S9W, D-FS*W, D-GS*W, D HJS9W, D-FS' F, D-J59W, D-KS9W, D-'SBAL Solid Stat.

Microspeed Cylinder

, D-F9WV D-F9P B, D-F9W D-A9V D-F9N D-F9V Number of auto switches 2 pcs. 15 (0.6) Note) 20 (0.80) Note) 10 (0.4) 10 (0.4) 5 (0.2) 10 (0.4) Note) 15 (0.6) Note) 20 (0.80) Note) 5 (0.2) 5 (0.2) 1 pc.

ZR

ZR1D1 D2 D3 10.2 SMC PRESURRE SWITCH RESET SET Attachment D Digital pressure switch Suction filter 71.3 (73.3 for D2, D3 types) 81 SMC 61 PV PD Filter block D 78.8 3 Note) 1 Dimensions for mounting bracket A 2 Dimensions for mounting spacer A Bracket A part no. : P3270153 (Standard accessory) Spacer A part no. : P3270156 13-3-19 19 Series ZR Suction Filter: ZR1-FX Specifications ZR1-FX

Actuator, Rotary, Rack & Pinion Type, ROTARY ACTUATOR, 509, 5.1 lb

Process Pump

Also, one piece of amp "HPX-EG00-1S-L02" manufactured by Azbil Corporation is required for one sensor to detect the fluid leakage (two amps are required in total). 13 Revision 18-Aug-2020 Revision D Completely revised by format change. Change the part number of amp for the sensor.

Flow Sensor Series PFMV

Front protective cover D Note Description Part no. Mounting screw (M3 x 8 l) Power supply / Output connector (2 m) ZS-28-A Bracket ZS-28-B With M3 x 5 l (2 pcs.) Panel mount adapter Sensor connector ZS-28-C 1 pc. Note) Options are shipped together, but not assembled. Panel mount adapter ZS-27-C With M3 x 8 l (2 pcs.)

PAB-OM-O003

port Rc,NPT,G 1/8 Female thread, 1/4 PFA tube, LQ1 size 2 with nuts, LQ3 size 2 with nuts Port size Pilot air Supply / Exhaust port Rc,NPT,G 1/8 Female thread Body wetted areas New PFA Diaphragm PTFE Material Check valve New PFAPTFE Liquid contact seals PTFE Maximum discharge rate 1000mL/min Note1) Average discharge pressurer 0 to 0.4MPa Pilot air pressure 0.2 to 0.5MPa Air consumption 15L

PFMV5

PF2A ZS-36-A1 ZS-36-A2 ZS-36-A3 ZS-36-A4 ZS-36-A5 2 L-type brackets, 2 mounting screws M3 x 15L For 1 station (for single unit) For 2 stations 2 L-type brackets, 2 mounting screws M3 x 25L PF2W For 3 stations 2 L-type brackets, 2 mounting screws M3 x 35L For 4 stations 2 L-type brackets, 2 mounting screws M3 x 45L PF2D For 5 stations 2 L-type brackets, 2 mounting screws M3 x 55L IF 951

Microspeed Cylinders CJ2X/CUX/CQSX/CQ2X/CM2X

Measuring conditions 10-CQSXB20-50D Chamber volume Purity of air supplied to chamber 15l Same quality as supply air Evaluation of air purity inside chamber 100 Particle concentration (particles/cf) Hitachi Electronics Engineering Corporation TS-6200 Min. measurable particle dia.: 0.1m Intake rate: 28.3l/min 10 Laser dust monitor 1 Sampling time: 5min Interval time: 55min Operation frequency

！ Contact our sales office regarding a delivery date or a price since this is a special model. SP158X-002E P.G.Information (Specialized Product) P: TS SMC Corporation Liquid Dispense Pump (Solenoid type) 4-14-1, SOTO-KANDA

Fluid Note4) PEEKPP Body Diaphragm Check valve Fluid contact material EPDMFKM EPDMFKM Repeatability Note1) 1%(2% when the dispense volume is 5 to 15L) *Under SMC's measuring conditions Dispense pressure Note2) 10kPa 15kPa 35kPa Suction pressure Dry Wet Max.operating frequency Note3) 2Hz(Minimum ON time 200msec/Minimum OFF time 300msec) Fluid temperature 10 to 50(No freezing) Ambient temperature

Size, Body, Valve Type: 15L (Size: 1; Body Mat'l: Stainless Steel; Port Size: 1/4; Orifice Dia: 2, N.C.), Voltage and Electrical Entry: C (110VAC; Grommet w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: B (NPT Thread), Mounting: XB (w/Bracket)

Size, Body, Valve Type: 15L (Size: 1; Body Mat'l: Stainless Steel; Port Size: 1/4; Orifice Dia: 2, N.C.), Voltage and Electrical Entry: C (110VAC; Grommet w/Surge Voltage Suppressor)

Size, Body, Valve Type: 15L (Size: 1; Body Mat'l: Stainless Steel; Port Size: 1/4; Orifice Dia: 2, N.C.), Voltage and Electrical Entry: G (24VDC; DIN Terminal w/Surge Voltage Suppressor)

Size, Body, Valve Type: 15L (Size: 1; Body Mat'l: Stainless Steel; Port Size: 1/4; Orifice Dia: 2, N.C.), Voltage and Electrical Entry: Z (Other Voltages and Electrical Options), Other Voltages and Electrical Options: 1W (24VAC; Conduit Terminal w/Surge Voltage Suppressor), Other Options: B (NPT Thread)

Size, Body, Valve Type: 15L (Size: 1; Body Mat'l: Stainless Steel; Port Size: 1/4; Orifice Dia: 2, N.C.), Voltage and Electrical Entry: C (110VAC; Grommet w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: B (NPT Thread)

Size, Body, Valve Type: 15L (Size: 1; Body Mat'l: Stainless Steel; Port Size: 1/4; Orifice Dia: 2, N.C.), Voltage and Electrical Entry: G (24VDC; DIN Terminal w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: B (NPT Thread)