Magnetically Coupled Rodless Cylinder

5 5 D-Z7/ Z80 6 9 A B CY1HT D-Y5/ Y6/ Y7 5 6 Some auto switches cannot be mounted.

5-Port Solenoid Valve

)4 1 (P) 2 (B) 3 (EB) 4 (A) 5 (EA) (EA)5 1 (P) 3(EB) Component Parts No.

Table of Contents

2 O-ring NBR 2 5.5 x 3.5 x 1.0 5.5 x 3.5 x 1.0 C-5 C-5 C-5 !

MG

5 @3 !0 !

Electric Slide Tables

400 450 0 50 100 150 200 250 300 350 400 450 0 50 100 150 200 250 300 350 400 450 Speed [mm/s] Speed [mm/s] Speed [mm/s] LESH16 LESH16A Horizontal Vertical Horizontal Vertical 7 6 2.5 2.5 Lead 5 (LESH16K) Lead 5 (LESH16K) Lead 5 (LESH16AK) Lead 5 (LESH16AK) 6 5 2 2 Work load [kg] 5 Work load [kg] Work load [kg] Work load [kg] 4 Lead 10 (LESH16J) 1.5 1.5 4 3 Lead 10 (LESH16AJ) Lead 10 (LESH16J

LJ1H

10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard Motor Mounting 143

24

1 pc. 5 *1 5 2 pcs. 10 *1 10 D-A9V 1 pc. 5 2 pcs. 10 D-Z7 D-Z80 1 pc. 5 *1 5 2 pcs. 10 D-Y59 D-Y7P 1 pc. 5 *1 5 2 pcs. 10 D-Y69 D-Y7PV 1 pc. 5 2 pcs. 5 D-Y7W D-Y7WV 1 pc. 5 *2 2 pcs. 10 *2 D-Y7BA 1 pc. 5 *2 2 pcs. 10 *2 D-P3DWA 1 pc. 15 2 pcs. 15 D-P4DW 1 pc. 5 *2, 3 2 pcs.

A

3 0 1.3 1.06 2.19 3/8-18 1 3/8 2.13 3 3/4 2.48 5 1/4 1 1 1/4 2 3/8 2 5/16 3/4-16 7/8 3/8 3/8 19/32 325 (3.25) 1 5/8 3.9 2 1 1/2 5/8 1 1/4 3/8-24 3 3/4 0 1.57 1.18 2.76 1/2-13 1 5/8 2.59 4 1/4 2.72 6 5/64 1 3/8 1 1/2 2 5/8 2 11/16 1-14 1/2 5/8 5/8 400 (4) 1 3/8 1 5/8 4.7 2 1 1/2 5/8 1 1/4 3/8-24 4 1/2 0 1.57 1.18 3.32 1/2-13 1 5/8 2.59 4 1/4 2.72 6 5/64 2 1/10 2 5/8 2 11/16 1-14 1/2 5/8 5/

Single Axis Electric Actuator Series LJ1H

Page 209 LXF/5 phase stepper motor . 210 LXP/2 phase stepper motor . 218 LXP/5 phase stepper motor . 234 LXS/2 phase stepper motor . 250 LXS/5 phase stepper motor . 266 Stepper Motor Driver/Positioning Driver Series LC6D/LC6C Dedicated Teaching Box . Page 313 Options . 315 Stepper Motor Driver/Positioning Driver LC6D/LC6C .

MLGP

9 @7 #9 #5 i o @5 #5 #9 @7 !9 i @5 o Section B-B' Section B-B' @5 !8@6!7 @5@6!7 !

MLGP

9 @7 #9 #5 i o @5 #5 #9 @7 !9 i @5 o Section B-B' Section B-B' @5 !8@6!7 @5@6!7 !

Compact Cylinder Series NCQ8

175 200 250 300 350 400 NCQ8B200-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B250-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 #4-40UNC3/4 7/8 1 1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-7/8 2-1/8 2-3/8 2-5/8 3-1/8 3-5/8 4-1/8 4-5/8 #6-32UNC3/4 7/8 1 1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-7/8 2-1/8 2-3/8 2-5/8 3-1/8 3-5/8 4-1/8 4-5/8 #6-32UNC1-1/8 1-1/4 1-3/8 1-

2

Note 5) Note 5) Note 5) Note 1) Option B, G, H, M are not assembled and supplied loose at the time of shipment.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

Refer to page 5.)

SQ1000/2000

-10A-3 (1 set) Stations 1 2 3 4 5 6 7 8 9 U side 3m SQ1000-10A-3 SQ1230-5-C6 SQ1230-5-C6 SQ1230-5-C6 SQ1230-5-C6 SQ1130-5-C6 SQ1130-5-C6 SQ1130-5-C6 SQ1130-5-C6 D-sub connector cable AXT100-DS25-030 Cylinder port fitting C6: 6 One-touch fitting D side Manifold base (9 stations) SS5Q13-09FD2-D F kit (D-sub connector kit) SS5Q13-09FD2-D . 1 set: F kit 9 station manifold base SQ1130-5-C6 .

0.4

5 1 (P) 3 (R2) 3 position: SQ1 40 3 4 5 3 position: SQ1 41 3 4 5 r e e q r q e w e w SQ1441 SQ1541 SQ1340 SQ1440 SQ1540 SQ1341 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) Dual 3 port valve: SQ1 41 A B C Component Parts r e e q w w No.

Secondary Batteries

(P) 3 (EB) 3 position pressure center (A) 4 (B) 2 5 5 (EA) 1 (P) 3 (EB) Rated voltage 4 position dual 3 port valve: N.C.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

0 0 1.0 0.5 1.5 2.0 Pressure loss [kPa] Pressure loss [kPa] 70 kPa 750 kPa 350 kPa 750 kPa 8 350 kPa 30 kPa 30 kPa 0 kPa 6 0 kPa 50 kPa 50 kPa 4 70 kPa 2 0 0 0.2 0.6 0.4 0.8 1.0 Flow [L/min] Flow [L/min] PF2M705(-L) 5 L/min PF2M710(-L) 10 L/min 10 20 Pressure loss [kPa] Pressure loss [kPa] 350 kPa 750 kPa 8 30 kPa 15 350 kPa 70 kPa 750 kPa 50 kPa 6 0 kPa 10 4 30 kPa 50 kPa 5 2 70 kPa 0 kPa

CATALOG VC10

NPT PORTS NPT PORTS WT. 0.25 350 350 1/16 1/16 .09 .09 73JJ9ZGV 73JJ9ZCV K73JJX 250 250 3/32 3/32 .22 .22 73KK9ZGV 73KK9ZCV K73KKX 175 175 1/8 1/8 .35 .35 73NN9ZGV 73NN9ZCV K73NNX 125 125 5/32 5/32 .45 .45 73OO9ZGV 73OO9ZCV K73OOX 100 100 3/16 3/16 .50 .50 73PP9ZGV 73PP9ZCV K73PPX 50 50 1/4 3/16 .78 .50 73RP9ZGV 73RP9ZCV K73RPX 3-WAY NORMALLY CLOSED GROMMET WHEN ORDERING VALVES OR REPAIR

TABLE OF CONTENTS

O 5/32 P 3/16 U 7/32 R 1/4 A 9/32 S 5/16 T 3/8 V 5/64 B 1/2 C 5/8 D 1 E 1 1/2 Y 3/4 F 2 W 3 D No Option Ports T Metering (1/32 1/8 orif.)