Information

Function Function Terminal name Terminal name 24 V 1 1 COM+ COM+ 24 V 0 V 2 2 COM COM 0 V Pulse signal 3 3 NP+ NP+ Pulse signal Pulse signal 4 4 NP NP Pulse signal Note 1) Note 1) Pulse signal 5 5 PP+ PP+ Pulse signal Pulse signal 6 6 PP PP Pulse signal Input 7 7 SETUP SETUP Input Input 8 8 RESET RESET Input Input 9 9 SVON SVON Input Input 10 10 CLR CLR Input 11 11 12 12 Load Load 13 Output

Controller Mounting: S (Screw Mounting), Cable Length: 1 (1 m), Inlet Port Silencer: A (AN10-01, 62 dB), Digital Pressure Switch: P (ISE20A-Y-01-J-X603), Exhaust Check Valve: K (AKH06-00, for 6mm tubing)

Controller Mounting: Screw Mounting, Cable Length: 1 m, Inlet Port Silencer: AN10-01, 62 dB, Digital Pressure Switch: ISE20A-Y-01-J-X603, Exhaust Check Valve: AKH06-00, for 6mm tubing, Exhaust Solenoid Valve: -

Direct Solenoid

6uretd-a.c. 11t120 v.60 Hr 2301210V.@H.

COQ2BP

E30 s : V g 20 Danger ~ Zone V 10 V 5000 10 15000 20 Welding Current (A) t2 SO 40 Safe 130 . ~ 20 S Zone . , .. ., , is 10 , , " 0 5000 10 15000 20 Welding Current (A) Series CD02BP High Magnetic Reid Resislance Through Hole Mount:COQ2BPO D DM-OO p 050 Hs z w o 4-" N Throu h hole 4X2-00 Counter bore Both Ends Tapped: COQ2APO -O OM-OO ~~ NOle: Female thread and rod dimensions

Controller Mounting: S (Screw Mounting), Cable Length: 1 (1 m), Inlet Port Silencer: B (ANB1-01, 55 dB), Digital Pressure Switch: P (ISE20A-Y-01-J-X603), Exhaust Check Valve: (None), Exhaust Solenoid Valve: V (V124-5LU-M5)

Controller Mounting: Screw Mounting, Cable Length: 1 m, Inlet Port Silencer: ANB1-01, 55 dB, Digital Pressure Switch: ISE20A-Y-01-J-X603, Exhaust Check Valve: (None), Exhaust Solenoid Valve: V124-5LU-M5

Controller Mounting: S (Screw Mounting), Cable Length: 1 (1 m)

Controller Mounting: Screw Mounting, Cable Length: 1 m, Inlet Port Silencer: -, Digital Pressure Switch: -, Exhaust Check Valve: -, Exhaust Solenoid Valve: -

NCQ2/CQ2

12 V 12 V 5 V, 12 V 12 V 5 V, 12 V 12 V IC circuit Reed auto switch Solid state auto switch IC circuit Diagnostic indication (2-color indication) 24 V Relay, PLC Yes Grommet Water resistant (2-color indication) IC circuit M9PAV M9PA M9BAV M9BA 3-wire (NPN equivalent) A96V A96 IC circuit 5 V Yes Grommet A93V A90V A93 A90 100 V 12 V Relay, PLC 2-wire 24 V IC circuit 100 V or less 5

Compact Cylinder

12 V 12 V 5 V, 12 V 12 V 5 V, 12 V 12 V IC circuit Reed auto switch Solid state auto switch IC circuit Diagnostic indication (2-color indication) 24 V Relay, PLC Yes Grommet Water resistant (2-color indication) IC circuit M9PAV M9PA M9BAV M9BA 3-wire (NPN equivalent) A96V A96 IC circuit 5 V Yes Grommet A93V A90V A93 A90 100 V 12 V Relay, PLC 2-wire 24 V IC circuit 100 V or less 5 V,

High Vacuum Angle Valve

ULTIC ARMOR is a registered trademark of Nippon Valqua Industries, Ltd. 427 B XLF/XLFV Series Specifications Model XLF(V)-16 XLF(V)-25 XLF(V)-40 XLF(V)-50 XLF(V)-63 XLF(V)-80 XLF(V)-100 XLF(V)-160 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum XLF 5 to 60 (High temperature type: 5 to 150) Operating temperature (C) XLFV 5 to 50 Operating pressure

Aluminum High Vacuum Angle Valve

U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd. 417 XLA/XLAV Series Specifications Model XLA(V)-16 XLA(V)-25 XLA(V)-40 XLA(V)-50 XLA(V)-63 XLA(V)-100 XLA(V)-160 XLA(V)-80 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum XLA 5 to 60 (High temperature type: 5 to 150) Operating temperature (C) XLAV 5 to 50 1 x 10-6 to atmospheric pressure Operating

Vacuum Module Series ZX

V V V Vacuum port (V) M5 (or M6) 4.2 Pitch = 21 22.5 Vacuum port (V) M5 (or M6) Vacuum port (V) M5 (or M6) 919 Series ZX Vacuum port (V) Vacuum port (V) Vacuum Pump System Manifold: Type K1 Common EXH port (EXH.)

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

port S99 Heavy-duty cord 3-wire (NPN) Yes Yes Yes Yes No No Change threaded hole to through-hole S99V 5 V, 12 V For 10 and 15 Change the screw position S9P Relay, PLC 3-wire (PNP) IC circuit 24 V Grommet Change rotation range S9PV Change rotation range between 0 and 200 90 5 V, 12 V 5 V, 12 V, 24 V Parallel cord Change rotation range between 0 and 110 5 V, 12 V, 100 V 5 V, 12 V, 24 V, 100

LEC-OM071xx

Positioning completed n.09 Speed feedforward 1 V/1000 min-1 n.0A Torque feedforward 1 V/100% rated torque n.0B Active gain *1 1st gain: 1 V 2nd gain: 2 V Gain type indicated by output voltage. n.0C Completion of position reference Completed: 5 V Not completed: 0 V Completion indicated by output voltage. n.0D External encoder speed 1 V/1000 min-1 Value at motor shaft 1.

Metal Seal/Rubber Seal Series VQ Body Ported

24 V DC 100 V 110 V AC 200 V 220 V AC 50/60 Hz 50/60 Hz 4/2 5/3 (A/B R1/R2) 3 position Closed center Double Single Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal VQ130 0.73 0.84 Plug lead Cassette Plug-in Series VQ1000 Latching Latching Latching Latching Latching VQ131 1.0 0.84 P. 2-4-10 P. 2-4-8 VQ040 0.50 0.36 Series

Base Mounted Metal Seal/Rubber Seal Series VQ

G T L S M kit (Flat ribbon cable with terminal block) kit (Terminal box) kit (Lead wire) kit (Serial transmission unit) kit (Multi-connector kit) Number of pins: 20 (VQ2000 only) 2-4-113 Valve Specifications Sonic conductance Type of actuation Voltage Electrical entry Manual override C [dm3/(sbar)] 4/2 5/3 (A/B R1/R2) 12 V 24 V DC 100 V 110 V AC 200 V 220 V AC 50/60 Hz 50/60 Hz Push type

Controller Mounting: D (DIN Rail Mouting), Cable Length: 1 (1 m), Inlet Port Silencer: A (AN10-01, 62 dB), Digital Pressure Switch: P (ISE20A-Y-01-J-X603), Exhaust Check Valve: K (AKH06-00, for 6mm tubing), Exhaust Solenoid Valve: V (V124-5LU-M5)

Controller Mounting: DIN Rail Mouting, Cable Length: 1 m, Inlet Port Silencer: AN10-01, 62 dB, Digital Pressure Switch: ISE20A-Y-01-J-X603, Exhaust Check Valve: AKH06-00, for 6mm tubing, Exhaust Solenoid Valve: V124-5LU-M5