Slider Type Ball Screw Drive/11-LEFS Series

2 Controller/Driver mounting (CC-Link direct input type) LEC T T-branch type communication plug connector*3 Nil Screw mounting D DIN rail mounting* AN LECPA*2 *4 (Pulse input type) NPN AP PNP *1 When Without controller/driver is selected for controller/driver types, I/O cable cannot be selected.

Controller Mounting: Screw Mounting, Cable Length: 1 m, Inlet Port Silencer: -, Digital Pressure Switch: -, Exhaust Check Valve: -, Exhaust Solenoid Valve: -

Controller Mounting: S (Screw Mounting), Cable Length: 1 (1 m)

High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 A XLS Series Dimensions XLS/Without control power supply D Lead wire AWG20, O.D.: 2.63 mm E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT

Aluminum High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 XLS Series Dimensions XLS/Without control power supply D E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT C B L (mm) Grommet (G) A B C

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

of short shaft length Change of double shaft length Change of short shaft length Change of double shaft length XA45 CRA1 XA46 XA47 XA48 CRQ2 Y Y Y Y Y XA49 XA50 MSQ K K, T K K J K K K J K, T K K XA51 K K J J J K K J J J K K K J J J J XA52 MSZ XA53 J J J J J J J XA55 CRQ2X MSQX J XA57 J Reversed shaft, Change of double shaft length A combination

Table of Contents

Y A J K B Y C D Misc.

Series VQ Base Mounted Metal Seal/Rubber Seal

Connector location Connector location P.1.10-124 P.1.10-128 P.1.10-132 Top (vertical) Side (honzontal) Top (vertical) Side (honzontal) Without cable With cable (1.5m) With cable (3m) With cable (5m) Without cable Without cable F F S0 S1 S2 S3 P P S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 0 1 2 3 (2) (2) (2) G 2 to 16 stations With cable (1.5m) With cable (3m) With cable

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Series VQ1000 Body Ported Plug-in Unit: Flip Type How to Order Manifold VV5Q1 N S1 F 3 08 Option Series VQ1000 Kit type None DIN rail mounting style Special wiring specifications (Except double wiring) Nil D (2) Manifold K (3) 3 Plug-in unit/Flip With name plate Built-in silencer, direct exhaust N S (4) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

Series VQ Metal Seal/Rubber Seal Body Ported

Note 3) Consult SMC for the following serial transmission kits; Matsushita Electric Works Ltd., Allen-Bradley Co., Sunx, Fuji Electric company Ltd.,OMRON Corp.. 1.10-28 VQ0 Body Ported Plug Lead Unit/Flip Style How to Order Manifold VV5Q 0 D S1 F 4 08 Series Option None (C kit only) DIN rail mounting Special wiring specification (Not double wiring) VQ0 0 Manifold Plug lead unit/Flip D K N

CRB2/CRBU2/CRB1

Applicable shaft type: K The long shaft can be further shortened by machining a middle-cut chamfer into it. (The position of the chamfer is same as the standard one.) (If shortening the shaft is not required, indicate "" for dimension X.) Applicable shaft types: J, K, T (mm) W1 X L1 max. L3 max. (mm) Shaft type J K T J K T J K T J K T Size Size Y W2 L2 max. L4 max.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

J K Refer to S page 11-2-8.

Table of Contents

J K Refer to S page 11-2-8.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

J K Refer to S page 11-2-8.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Combination of [B] and [K] is not possible.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Combination of [B] and [K] is not possible.

Electric Actuators

24 66 to 400 110 104 LJ1H102NH-K 28 70 to 400 LJ1H202PA-K 34 76 to 500 112 106 LJ1H202NA-K 38 80 to 500 LJ1H102PB-K 26 68 to 600 145 110 104 LJ1H102NB-K 30 72 to 600 LJ1H202PF-K 32 74 to 250 112 106 LJ1H202NF-K 36 78 to 250 LJ1H303PA-K 40 82 to 500 114 108 LJ1H303NA-K 42 84 to 500 Page Standard stroke (mm) and Speed (mm/s) Nonstandard motor Model Standard motor Deflection 100 200 300

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stroke W S QL QB P NL 800 700 600 500 400 300 200 100 50 -X CC63-S1-G CC100-S1-G CC100-L1-G CC160-L1-G CC63-S1-G CC100-1-G CC160-L1-G 9.5 11 0 30 86 3 28 62.5 728.5 603.5 503.5 378.5 278.5 228.5 7 13 2 32 120 5 33 82.5 611 511 386 286 836 736 207 13 2 32 120 5 33 92 624 524 399 949 849 749 1049 Hexagon socket head cap screw is used for mounting hole. 7 20 2.5 46 185 0 29 120 Data 10-17

Vacuum

Model A c o E F G H J K L M N 2F810105 26 53 54 22.5 12.5 24 17 -5 1 5 50 15.514.4 12.8 8,5 zFB101-07 242 17.7 114" zFB201-07 52 28 24.51 13.s1 27.21 19.71 t6 G1 17.5116.6115.21 1t4" 9.5 zFB301-11 30 70 27 14.5go.221.7 17 21.5 s 18.53A 11 zFuol-13 64.5 34 8?.