Aluminum High Vacuum Angle Valve

A Section Thread Tightening Torque Model XLD(V)-25 XLD(V)-40 XLD(V)-50 XLD(V)-63 XLD(V)-100 XLD(V)-160 XLD(V)-80 Tightening torque 0.08 Nm (0.8 kgfcm) or less 0.3 Nm (3 kgfcm) or less 451 A XLD/XLDV Series Dimensions XLD/Air operated (b) E C D E C Fn (KF flange) (K flange) Fd (a) (c) Heater (Option) E Auto switch (Option) J K H S M B G A A (mm) A B C D E Fn Fd G H J K Model XLD-25 XLD-40

Vacuum Module Series ZX

switch (ZSE3) ZX1-K1-D Adsorption confirmation switch (ZSP1) ZX1-K1-P A: Release flow rate adjusting needle with lock nut Spacer 1: ZX1-S1 ZA 8 DOWN button UP button (Needle fully open) Spacer 1 (ZX1-S1) (For side mounting) 2 x R1.8 Exhaust port ZX Adjustment needle Manual override (Non-locking) ZR 1 20.5 41.5 51.5 (Mounting hole) ZM This is inserted between a wall and a switch when the switch

Metal Seal/Rubber Seal Series VQ Body Ported

SOL. location A B A B A B A B () A B () () 0 1 2 3 4 5 6 Double Double Single SI unit A side B side 3 position A B A B B A B A B A VQC Double Double Single SI unit A side B side 3 position Stations 1 2 3 4 5 SQ The places of asterisk are not used. 3 position uses two stations for wiring.

1

Series CQS Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A B + Stroke S2 B + Stroke S1 A + Stroke (S1 + S2) Stroke Both of S1, S2 Bore size (mm) A B L 12 17 (22) 3.5 41 (51) 5 to 30 16 17 (22) 3.5 41 (51) 20 19.5 (29.5) 4.5 48 (68) 5 to 50 25 22.5 (32.5) 5 55 (75) Note 1) ( ): Denotes the dimensions with auto switch.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

CDRBU2W10, 15-S CDRBU2W20, 30-S CRB2 CRBU2 CRB1 2 x S2 2 x S1 2 x S1 MSU 2 x S2 CRJ Rotary actuator CRA1 CRQ2 2 x S1 2 x S1 2 x S1 2 x S1 Rotary actuator MSQ (34.5: Connector type) MSZ A port B port CRQ2X MSQX 2 x R A port B port 2 x R MRQ 1 Auto switch Auto switch 2 5 20.5 (26.5: Connector type) 1.

Electric Actuator

B-1 A-1 B-2 A-2 B-3 A-3 Nil Cable color Circuit 2 1 6 5 3 4 A A B B COM-A/COM COM-B/ Brown Red Orange Yellow Green Blue S Standard cable Cable color Connector D terminal no. Shield 12 13 7 6 9 8 3 Brown Black Red Black Orange Black Vcc GND A A B B B-4 A-4 B-5 A-5 B-6 A-6 Connector B terminal no.

LEC-OM071xx

n e l D i s p l a y a n d SigmaWin+TM 2.

SV

91.9 A A A A B A B A B A B A Dimensions are the ones for SV1300--.

Base Mounted Metal Seal/Rubber Seal Series VQ

Unused A Unused A A A B A B A B A B A B A B A VQC Double Double Double Double Single Single Single Single Single Single SI unit SI unit SQ Stations 1 2 3 4 5 Stations 1 2 3 4 5 VQ0 Single/Double mixed wiring (Option) Double wiring (Standard) VQ4 Type SC OMRON Corporation SYSBUS Wire System Type SD SHARP Corporation Satellite I/O Link System VQ5 VQZ ADDRESS NO. STATION NO.

Series CS1 air cylinder is SMCs largest bore cylinder. This series is available in bore sizes up to 12in. and stroke lengths up to 60in.. Additionally, the CS1 can be ordered auto-switch capable. Other options include, large bore sizes up to 12in. *, various mounting configurations, cushion for noise damping.Double acting, single rod, lube type, Bore sizes: 125mm to 300mm, Strokes up to

Electric Actuator

2 . ; A A LEFS40 : = B > > 8 @ A-A . ; 2 A A No.

Step Motor Controller

Connector A terminal no. B-1 A-1 B-2 A-2 B-3 A-3 Circuit Cable color Brown Red Orange Yellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

CRBU

Single vane type Double vane type +4 0 9 0 a a r r n n e n n g g g o o e e n i i t t 1 2 a a a 8 7 r t t 0 -5 +4 0 o o 0 0 n R R +4 0 +4 0 o 0 i 0 0 t a 9 1 t o e e R g g n n a a r r n n o o i i t t a a Chamfer Chamfer t t o o Chamfer A port B port Chamfer A port Chamfer R R A port B port B port A port B port A port B port For size 40 actuators, a parallel keyway will be used instead

Series SV

A A A A A 98.2 5.5 A B A B 58.9 17.5 29.6 56.3 12.2 Manual override Press and turn for the locking type.

Table of Contents

SOL. location A B A B A B A B () A B () () 0 1 2 3 4 5 6 Double Double Single SI unit A side B side 3 position A B A B B A B A B A VQC Double Double Single SI unit A side B side 3 position Stations 1 2 3 4 5 SQ The places of asterisk are not used. 3 position uses two stations for wiring.

Electric Actuator

To prevent danger and damage due to a breakdown or malfunction of these products, which may occur at a certain probability, a backup system should be arranged in advance by using a multiple-layered structure or by making a fail-safe equipment design, etc. 13. Avoid heat radiation from strong heat sources, such as direct sunlight or a hot furnace.

PC Wiring System Series PCW

8 9 A B C D E F 1 4.1 + *S2 S1 DC24V MADE IN JAPAN 2 3 4 (48.5) (50) 133 10.5 10.5 5.1 4.5 5 5 Models Output unit can be used for mixed connection with PCW series.

Table of Contents

Turn cover A counterclockwise until it stops (approx. 45). 4. Install a new element on cover A and insert it into the case. Cover A Case Cover A Case O L L Element O-ring Window 5.

ZX

Stabilize the source pressure by providing a tank and a vacuum regulator. Provide a vacuum switch valve to individual lines.

3 Port Solenoid Valve/

254.2 AW30-03G-A Y300T-A E300-03-A VP744-5DZ1-04-X538 34.4 75.2 118.7 262.7 AW40-04G-A Y400T-A E400-04-A VP744-5DZ1-04-X555 34.4 75.2 160.2 304.2 AW40-04G-A Y400T-A E400-04-A 17 VP500/700-X536, X538, X555 Specific Product Precautions Be sure to read this before handling.