3

Head flange CQS-F012 CQS-F016 MKZ-F020 MKZ-F025 MK2T-F032 MK2T-F040 MK2T-F050 MK2T-F063 MKZ-RF012 MKZ-RF016 MKZ-RF020 MKZ-RF025 MKZ-RF032 MKZ-RF040 MKZ-RF050 MKZ-RF063 12 16 20 25 32 40 50 63 Special hexagon socket head cap screw (4 pcs.) 390 B Rotary Clamp Cylinder: Standard MK Series Weight Clamp Arm Mounting Bore size (mm) Unit: g Caution Clamp stroke (mm) 10 20 30 50 12 69 84 99 16 94

CE

Magnetic resistance 145 gauss Power supply 12 to 24VDC (10%) (power supply ripple: 1% or less) Current consumption 40mA Foot Flange Bore size (mm) Double clevis Resolution 0.1mm/pulse 12 20 32 40 50 63 CQ-L012 CQ-D012 CQ-F012 Accuracy 0.2mm Note 1) CQ-L020 CQ-D020 CQ-F020 Output type Open collector (24VDC, 40mA) CQ-L032 CQ-D032 CQ-F032 Output signal A/B phase difference output CQ-L040 CQ-D040

Series CE1

Position detection system CC 145 gauss Magnetic resistance 12 to 24V DC (10%) (Power supply ripple: 1% or less) Power supply Foot Flange Bore size (mm) Double clevis 40mA Current consumption 12 20 32 40 50 63 CQ-L012 CQ-F012 CQ-D012 0.1mm/pulse Resolution CQ-L020 CQ-F020 CQ-D020 0.05mm Accuracy CQ-L032 CQ-F032 CQ-D032 Open collector (24V DC, 40mA) Output style CQ-L040 CQ-F040 CQ-D040 A/B

Microspeed Cylinder

IC circuit 5V A96 A96V 3 wire (NPN) F9N F9NV IC circuit 5V 12V Relay, PLC 3 wire (PNP) F9P F9PV Mounting bracket part numbers F9B F9BV 2 wire 12V Double clevis type Bore size (mm) Foot type Note 1) Flange type Yes 24V Grommet 3 wire (NPN) F9NW F9NWV 12 16 20 25 CQS-L012 CQS-F012 CQS-D012 Diagnostic indication (2 color indicator) IC circuit 5V 12V CQS-L016 CQS-F016 CQS-D016 3 wire (PNP)

CE

Magnetic scale rod Sensor head RZQ Position detection method MI W S 14.5 mT Magnetic field resistance Mounting Bracket Part No. 10.8 to 26.4 VDC (Power supply ripple: 1% or less) Power supply CEP1 40 mA Current consumption 0.1 mm/pulse Resolution Foot Flange Bore size (mm) Double clevis CE1 0.2 mm (at 20C) (1) Accuracy 12 20 32 40 50 63 CQ-L012 CQ-D012 CQ-F012

CJ2X/CUX/CQSX/CQ2X/CM2X

Grease pack GR-L-005 (5 g) GR-L-010 (10 g) GR-L-150 (150 g) Bore size (mm) Foot (1) Flange Double clevis -X 12 16 20 25 CQS-L012 CQS-F012 CQS-D012 20CQS-L016 CQS-F016 CQS-D016 CQS-L020 CQS-F020 CQS-D020 CQS-L025 CQS-F025 CQS-D025 Note 1) When ordering foot bracket, order 2 pieces per cylinder. Note 2) Parts belonging to each bracket are as follows.

1

New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2

Compact Cylinder: Standard Type Double Acting, Single Rod Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 2

CQ-D012 CQ-D016 CQ-D020 CQ-D025 CQ-D032 CQ-D040 CQ-D050 CQ-D063 CQ-D080 CQ-D100 CQ-F012 CQ-F016 CQ-F020 CQ-F025 CQ-F032 CQ-F040 CQ-F050 CQ-F063 CQ-F080 CQ-F100 12 16 20 25 32 40 50 63 80 100 CQ-L012 CQ-L016 CQ-L020 CQ-L025 CQ-L032 CQ-L040 CQ-L050 CQ-L063 CQ-L080 CQ-L100 Description Bore size 12, 16 20, 25 32, 40 50 to 100 Stroke range 6 to 29 6 to 49 6 to 99 11 to 99 Bore size 12, 16 20,

NCQ2/CQ2

Fluorine free series Construction and Parts Standard Cylinders, Non-Rotating Rod, and High Lateral Load Bore size (mm) Foot Note 1) e g n a l F Model Double clevis CQ2 D CQ2 DZ CQ2 D CQ2 DZ CQ2 D CQ2 DZ CQ2 D CQ2 DZ CQ2 DZ CQ2 DZ CQ2 DZ CQ2 DZ CQ2 DZ CQ2 DZ CQ-L012 CQ-LZ12 CQ-L016 CQ-LZ16 CQ-L020 CQ-LZ20 CQ-L025 CQ-LZ25 CQ-L032 CQ-L040 CQ-L050 CQ-L063 CQ-L080 CQ-L100 Without switch 12 CQ-F012

Compact Cylinder: Standard Double Acting, Single Rod Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100

XC36 -X144 -X202 -X203 -X271 -X525 -X526 -X636 -X1876 With coil scraper, 32 to 100 only Double clevis With boss on rod end CQ2ll-lD CQ2ll-lDZ CQ2ll-lD CQ2ll-lDZ CQ2ll-lD CQ2ll-lDZ CQ2ll-lD CQ2ll-lDZ CQ2ll-lDZ CQ2ll-lDZ CQ2ll-lDZ CQ2ll-lDZ CQ2ll-lDZ CQ2ll-lDZ CQ-L012 CQ-LZ12 CQ-L016 CQ-LZ16 CQ-L020 CQ-LZ20 CQ-L025 CQ-LZ25 CQ-L032 CQ-L040 CQ-L050 CQ-L063 CQ-L080 CQ-L100 Without switch 12 CQ-F012

Rotary Clamp Cylinder: Standard ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63 MK Series

MK-A032Z MK-A050Z Mounting Bracket/Flange Head flange CQS-F012 CQS-F016 MKZ-F020 MKZ-F025 MK2T-F032 MK2T-F040 MK2T-F050 MK2T-F063 Bore size (mm) Rod flange Accessories Special hexagon socket head cap screw (4 pcs.) Special hexagon socket head cap screw (2 pcs.)

Microspeed Cylinder: Double Acting/Single Rod Series CQSX ø 12, ø 16, ø 20, ø 25 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Double clevis type Bore size (mm) Foot type Note 1) Flange type 3-wire (NPN) F9N F9NV IC circuit 5V 12V Relay PLC 12 16 20 25 CQS-D012 CQS-L012 CQS-F012 3-wire (PNP) F9P F9PV CQS-D016 CQS-L016 CQS-F016 CQS-D020 CQS-L020 CQS-F020 F9B F9BV 2-wire 12V Yes 24V Grommet CQS-D025 CQS-L025 CQS-F025 3-wire (NPN) F9NW F9NWV Note 1) When ordering foot brackets, order 2 pieces per cylinder.

CE

Magnetic scale rod Sensor head RZQ Position detection method MI W S 14.5 mT Magnetic field resistance Mounting Bracket Part No. 10.8 to 26.4 VDC (Power supply ripple: 1% or less) Power supply CEP1 40 mA Current consumption 0.1 mm/pulse Resolution Foot Flange Bore size (mm) Double clevis CE1 0.2 mm (at 20C) (1) Accuracy 12 20 32 40 50 63 CQ-L012 CQ-D012 CQ-F012

Stroke Reading Cylinder and Counter

Magnetic field resistance 14.5 mT Power supply 10.8 to 26.4 DC (Power supply ripple: 1% or less) Current consumption 40 mA Foot Note 1) Flange Bore size (mm) Double clevis Resolution 0.1 mm/pulse 0.2 mm (at 20C) (1) Accuracy 12 20 32 40 50 63 CQ-L012 CQ-F012 CQ-D012 Output type Open collector (24 VDC, 40 mA) CQ-L020 CQ-F020 CQ-D020 Output signal A/B phase difference output CQ-L032 CQ-F032

CJ2X/CUX/CQSX/CQ2X/CM2X

Grease pack GR-L-005 (5 g) GR-L-010 (10 g) GR-L-150 (150 g) Bore size (mm) Foot (1) Flange Double clevis -X 12 16 20 25 CQS-L012 CQS-F012 CQS-D012 20CQS-L016 CQS-F016 CQS-D016 CQS-L020 CQS-F020 CQS-D020 CQS-L025 CQS-F025 CQS-D025 Note 1) When ordering foot bracket, order 2 pieces per cylinder. Note 2) Parts belonging to each bracket are as follows.

Smooth Cylinder/Low Speed Cylinder

Bore size (mm) Foot (1) Compact foot Flange Double clevis 12 16 20 25 CQS-L012 CQS-F012 CQS-LC012 CQS-D012 CQS-L016 CQS-F016 CQS-LC016 CQS-D016 CQS-L020 CQS-F020 CQS-LC020 CQS-D020 CQS-L025 CQS-F025 CQS-LC025 CQS-D025 Note 1) When ordering foot bracket, order 2 pieces per cylinder. Note 2) Parts belonging to each bracket are as follows.

CE

Magnetic scale rod Sensor head RZQ Position detection method MI W S 14.5 mT Magnetic field resistance Mounting Bracket Part No. 10.8 to 26.4 VDC (Power supply ripple: 1% or less) Power supply CEP1 40 mA Current consumption 0.1 mm/pulse Resolution Foot Flange Bore size (mm) Double clevis CE1 0.2 mm (at 20C) (1) Accuracy 12 20 32 40 50 63 CQ-L012 CQ-D012 CQ-F012

CJ2X/CUX/CQSX/CQ2X/CM2X

Grease pack GR-L-005 (5 g) GR-L-010 (10 g) GR-L-150 (150 g) Bore size (mm) Foot (1) Flange Double clevis -X 12 16 20 25 CQS-L012 CQS-F012 CQS-D012 20CQS-L016 CQS-F016 CQS-D016 CQS-L020 CQS-F020 CQS-D020 CQS-D025 Note 1) When ordering foot bracket, order 2 pieces per cylinder. Note 2) Parts belonging to each bracket are as follows.

Type: Standard, Anti-lateral, Microspeed, Mounting: F (Flange), Applicable Bore: 012 (12mm)

Mounting: F (Flange), Applicable Bore: 12mm (All Mountings)