LEC-OM02904

DCDC 4 2 RA 11 27 11 (c) AERSBAN-SET SD (AB) 40 [mm] 2-5 2-5 17.5 30 L 10 L B0.3 7 A C 11 3 6 240.3 -0.2 35 0 24 0 6 22 M4 ()M4 35 .

Compact Cylinder

-40 -45 -50 -60 -80 -100 -125 -150 C(D)55B25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B80-10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 C(D)55B40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B50-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B63-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 7.2 11 9 Fix

HRX-OM-T004

Table 2.4-18 List of set values Set values Explanation Initial value (Default setting) N.O type N.C type 2.4 Setting and checking HRS090 Series 2-14 HRX-OM-T004 Chapter 2 Contact input/output communication Contact output 3 selected alarm Setting and checking 35. Press the [SEL] key once. The set screen of contact output 3 selected alarm is displayed on the digital display. PV SV 36.

HRX-OM-R028

Table 2.4-18 List of set values Set values Explanation Initial value (Default setting) N.O type N.C type 2.4 Setting and checking HRSH Series 2-14 HRX-OM-R028 Chapter 2 Contact input/output communication Contact output 3 selected alarm Setting and checking 35. Press the [SEL] key once. The set screen of contact output 3 selected alarm is displayed on the digital display. PV SV 36.

HRX-OM-M091

Table 2.4-18 Set values Set values Explanation Default setting N.O type N.C type Contact output 3 selected alarm Setting and checking 35. Press the [SEL] key once. The set screen of contact output 3 selected alarm is displayed on the digital display. PV SV 36. Select contact output 3 selected alarm from the table below with [] key or [] key, and confirm by pressing SEL.

HRX-OM-Q033

Table 2.4-18 List of set values Set values Explanation Initial value (Default setting) N.O type N.C type 2.4 Setting and checking HRSH Series 2-14 HRX-OM-Q033 Chapter 2 Contact input/output communication Contact output 3 selected alarm Setting and checking 35. Press the [SEL] key once. The set screen of contact output 3 selected alarm is displayed on the digital display. PV SV 36.

HRX-OM-S010

Table 2.4-18 List of set values Set values Explanation Initial value (Default setting) N.O type N.C type 2.4 Setting and checking HRS100/150 Series 2-14 HRX-OM-S010 Chapter 2 Contact input/output communication Contact output 3 selected alarm Setting and checking 35. Press the [SEL] key once. The set screen of contact output 3 selected alarm is displayed on the digital display.

Electric Actuators

Driver Energization type Divisions per rotation Full step 200 LC6D-220ADHalf step 400 Full step 500 LC6D-507ADHalf step 1000 Dimensions 100 97 52 42 Operation window 35 38 96 35 Label DIN rail holding plate Connectors (included) [Manufacturer: Molex Japan, Co., Ltd.] Quantity Description Part no.

LX

Driver Energization type Divisions per rotation Full step 200 LC6D-220ADHalf step 400 Full step 500 LC6D-507ADHalf step 1000 Dimensions 100 97 52 42 Operation window 35 38 96 35 Label DIN rail holding plate Connectors (included) [Manufacturer: Molex Japan, Co., Ltd.] Quantity Description Part no.

PFxx-OMX0002

Refer to the switch output modes list for the relationship between the set values and operation (page 35).

AC Servo Motor Driver (CC-Link Type ）

OFF: Lock is activated. 4 35 4.

AC Servo Motor Driver (CC-Link Type ）

[Unit: mm] Strip the cable sheath of the clamped area. cutter Cable Cable clamp Earth plate (A, B) cable 40 External conductor Clamp section diagram Dimensions [Unit: mm] [Unit: mm] Earth plate Clamp section diagram 25 hole 17.5 installation hole 30 24 L or less 10 B 0.3 C A 6 -0.2 0 35 11 3 24 + 0.3 0 7 6 22 (Note) M4 screw 35 Note. Screw hole for grounding.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

OPTIONS AND AUXILIARY EQUIPMENT Cable Cable clamp Earth plate (A,B) Strip the cable sheath of the clamped area. cutter 40 cable External conductor Clamp section diagram Outline drawing [Unit: mm] Earth plate Clamp section diagram 25 hole installation hole 17.5 30 L or less 10 B 0.3 A C 6 0.2 35 24 0 0.3 11 3 0 24 7 6 22 (Note)M4 screw 35 Note. Screw hole for grounding.

Digital Flow Switch ( compatible)

Nominal thread size Required torque Piping port size Width across flats of attachment Rc1/2, NPT1/2Rc3/4, NPT3/4 28 to 30 Nm 1/2 30 mm 3/4 35 mm Piping for the One-touch fitting For the one-touch fitting, use tubing with a tube inside diameter of 9 mm or more.

Digital Flow Switch ( compatible)

Nominal thread size Required torque Piping port size Width across flats of attachment Rc1/2, NPT1/2Rc3/4, NPT3/4 28 to 30 Nm 1/2 30 mm 3/4 35 mm Piping for the One-touch fitting For the one-touch fitting, use tubing with a tube inside diameter of 9 mm or more.

Vacuum

(LED, LCD backlighl) OFF Indicalion: Red LED flashes/Error cod6 displayed P1 P2 Window comparator mode (standard) 0d, EEs dren! E@s prEssu6, Dab nor, Prssu.e donng O.har Wndow comparalor mode (revrsed) Belu/n whole wir6 and c6e: lOoVAC 50/6OHz tor l min 'Bange issame for all display unil selections.

Vacuum

(LED, LCD backlighl) OFF Indicalion: Red LED flashes/Error cod6 displayed P1 P2 Window comparator mode (standard) 0d, EEs dren! E@s prEssu6, Dab nor, Prssu.e donng O.har Wndow comparalor mode (revrsed) Belu/n whole wir6 and c6e: lOoVAC 50/6OHz tor l min 'Bange issame for all display unil selections.

OMU0023

65 41 A 97 61 a 2 2 STX 34 22 " 66 42 B 98 62 b 3 3 ETX 35 23 # 67 43 C 99 63 c 4 4 EOT 36 24 $ 68 44 D 100 64 d 5 5 ENQ 37 25 % 69 45 E 101 65 e 6 6 ACK 38 26 & 70 46 F 102 66 f 7 7 BEL 39 27 ' 71 47 G 103 67 g 8 8 BS 40 28 ( 72 48 H 104 68 h 9 9 HT 41 29 ) 73 49 I 105 69 i 10 0A LF 42 2A * 74 4A J 106 6A j 11 0B VT 43 2B + 75 4B K 107 6B k 12 0C FF 44 2C , 76 4C L 108 6C l 13 0D CR 45 2D

Digital Gap Checker ( compatible)

series Table of Contents Before Use Safety Instructions 2 Features 7 Model Indication and How to Order 8 Summary of Product parts 14 Specification 15 About this product Specifications (ISA3) 15 Specifications (Regulator) 17 Specifications (2 port solenoid valve) 17 Characteristics graph 18 Dimensions 21 Mounting and Installation 27 Piping 27 Installation 30 Installation Wiring 35

1

(n: Number of auto switches) Different surfaces Same surface Different surfaces Same surface Air Cylinders D-M9l D-M9lW D-M9lA D-A9l 10 15 Note 1) 45 Note 1) 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 45 + 15 (n 2) (n = 2, 3, 4, 5) D-M9lV 5 15 Note 1) 35 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 25 (n 2) (n = 2, 3, 4, 5) D-M9lWV D-M9lAV 10 15 Note 1) 35 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3)