Stability of suction position,

Flat type with groove (UM) Bellows type with groove (BM) 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EA-F1-AL6 V V V V ZP3EA-F2-AL6 V V ZP3EA-F3-AL12 V V V ZP3EA-F4-AL12 V V ZP3EA-F5-AL12 V V ZP3EA-F6-AL12 V w Holder r Pad Seal washer Form/Diameter Part no.

MY1

F1 -X L2 L1 50 50 50 L3 2040 40 40 30 30 30 Data 20 20 20 1.

LG1H

LG1H/ Aluminum body LG1TH/ Stainless steel body LJ1 LG1 LC1 LX LC6D/LC6C Switches 50 10 10 50 Horizontal load 100% Horizontal load 50% 20 10 20 10 Horizontal load 100% Horizontal load 50% Amount of deflection m Amount of deflection m 500 1000 1000 500 200 100 200 100 50 20 50 20 10 10 5 5 Lateral load 100% Lateral load 100% 0.5 1 2 0.5 1 2 Lateral load 50% Lateral load 50% Horizontal empty

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

N1, N2, F1, F2 Straight Symbol Port size Rated flow range 1 2 5 10 25 50 100 200 01 Rc1/8 V V V V V V N1 NPT1/8 V V V V V V F1 G1/8 V V V V V V 02 Rc1/4 V V N2 NPT1/4 V V F2 G1/4 V V C4*1 4 V V V V C6 6 V V V V V V C8 8 V V N7 1/4" V V V V Straight w Flow adjustment valve/Piping entry direction valve Piping entry direction Rated flow range 1 2 5 10 25 50 100 200 Nil None Straight

LG1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil G R Y Lead screw type Ground ball screw Rolled ball screw Slide screw P N S Motor output 100W 2 Power supply voltage 100/110VAC (50/60Hz) 100/115VAC (50/60Hz) 200/220VAC (50/60Hz) 200/230VAC (50/60Hz) Without motor 1 The tables above show the definition for each symbol only and cannot be used for actual model selection. 2 0

Intrinsically Safe Valve

Equipment Type of actuation 53-SY5000 53-SY7000 53-SY9000 Uo (or Voc) lo (or Isc) Po Co (or Ca) Lo (La) Ui li Pi Ci + Ccable Li + Lcable 2-position single 26 or less 38 or less 50 or less 2-position double 22 or less 30 or less 50 or less 3-position 38 or less 56 or less If the cable capacitance and inductance are unknown, use the following values: Ccable = 60 pF/ft., Lcable = 0.2 H/ft.

Modular F.R.L. Units

75.2 40 9 18 5 48 AC40-06-B 3/4 1/8 235.4 149.1 37.8 38.4 77.6 110 33.8 3 50 80.2 40 9 18 5 48 AC50-B 3/4, 1 1/8 282.4 220.1 41.2 93.1 110 43.3 3.2 70 96.2 50 11 20 6 60 AC55-B 1 1/8 292.4 234.1 44.7 98.1 110 43.3 3.2 70 96.2 50 11 20 6 60 AC60-B 1 1/8 297.4 234.1 44.7 98.1 110 43.3 3.2 70 101.2 50 11 20 6 60 Optional specifications Semi-standard specifications Metal bowl with level

5 Port Air Operated Valve Series SYA3000/5000/7000 1

VR VH Body ported single solenoid Foot bracket VFA3122 F 02 VHS Body ported For 30 type manifold VFA3 1 0 3 02 Base mounted For 40 type manifold VFA3 1 0 4 02 Port size For 50 type manifold VFA3 1 50 W/o sub-plate (Pilot port: Rc) Nil W/o sub-plate (Pilot port: Other than Rc) Thread type for pilot port 00 For 60, 61,70, 71 manifold VFA3 1 0 6 02 02 03 1 4 3 8 Nil 00F 00N 00T Rc G NPT NPTF

SX

for 1/4" (Inch size) N3: With One-touch fitting for 5/32" N7: With One-touch fitting for 1/4" N9: With One-touch fitting for 5/16" SX 000-50-3AP PG PH SX 000-50-4AFor 45(N) (Flat ribbon cable) SX 000-50-5ASX 000-50-6AT T1 For 45 (Terminal block) SX 000-50-7A1-6-110 111 Base Mounted Series SX3000/5000 How to Increase Manifold Bases (1) Loosen bolt (a) fixing the manifold base until it begins

Table of Contents

, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion on both

ZP

S U F GN GS 20 108.5 58.5 50 20 25 36 15.5 12.5 12 30 118.5 68.5 50 163.5 88.5 75 J K ZP T F Width across flats L 2 12 3 10 99 49 16.5 20 109 59 Width across flats M 36.5 16 13 50 32 D C 12 30 119 69 50 164 89 75 Rc1/8 B01 N01 T01 A14 M14 NPT1/8 19 4 12 13 10 101.5 51.5 x 1 16.5 20 111.5 61.5 E NPTF1/8 50 40 Width across flats N F2 39 18.5 12.5 12 30 121.5 71.5 50 166.5 91.5 75 30 2.5 19

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Bore size 6 6 mm 10 10 mm Magnetic holding force 50 50 mm Switch rail Applicable bore size (mm) Holding force type 63 63 mm H 6, 10, 50, 63 Nil With switch rail L 50, 63 N Without switch rail Refer to Magnetic Holding Force on page 8-15-33. Note 1) Symbol N is standard type only. Note 2) With the switch rail, a built-in switch magnet is also included.

REA/REB

(kg) 25 32 40 50 63 Bore size (mm) Basic weight 0.71 1.34 2.15 3.4 5.7 Additional weight per each 50 mm of stroke 0.05 0.07 0.08 0.095 0.12 Calculation: (Example) REA32-500 1.34 + 0.07 x 500 50 = 2.04 kg Basic weight Additional weight Cylinder stroke 1.34 (kg) 0.07 (kg/50 st) 500 (st) 10-2-6 6 Sine Rodless Cylinder Basic Type Series REA Precautions Be sure to read before handling.

REA/REB

(kg) 25 32 40 50 63 Bore size (mm) Basic weight 0.71 1.34 2.15 3.4 5.7 Additional weight per each 50 mm of stroke 0.05 0.07 0.08 0.095 0.12 Calculation: (Example) REA32-500 1.34 + 0.07 x 500 50 = 2.04 kg Basic weight Additional weight Cylinder stroke 1.34 (kg) 0.07 (kg/50 st) 500 (st) 10-2-6 6 Sine Rodless Cylinder Basic Type Series REA Precautions Be sure to read before handling.

REA/REB

16 92 M6 x 1.0 x 10 21 46 19 M32 x 2.0 S W X ZZ R T Model REA25 REA32 REA40 111 50 30 137 8 17 124 50 40 156 8 17 High Precision Guide Type REAH 150 60 40 182 10 19 REA 50, 63 14 2 -Rc 1/4 L 0 -0.2 NA 33 14 Max.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Response time (ms) (0.5 MPa) Type of actuation 52-SY5000 26 or less 22 or less 38 or less 52-SY7000 38 or less 30 or less 56 or less 52-SY9000 50 or less 50 or less 70 or less 2-position single 2-position double 3-position Note 1) According to dynamic performance test JIS B8375-1981. Note 2) Response time when barriers were combined with a valve.

E-P HYREG

Proper tightening torque (Nm) Connection thread size (R, NPT) 3 to 5 8 to 12 15 to 20 20 to 25 28 to 30 36 to 38 40 to 42 48 to 50 48 to 50 1 8 1 4 3 8 1 2 3 4 Ground nut 1 1 1 2 Washer Retaining screw 1 4 1 2 Grommet (Rubber) Housing Operating Fluid Caution 1.

CY1

50 50 60 60 70 X 25 30 40 40 60 70 ZZ 132 137 156 182 180 192 Model CY1B20 CY1B25 CY1B32 CY1B40 CY1B50 CY1B63 Mounting nut/included (2pcs.)

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Maximum Allowable Load MY3A, MY3B/m1 MY3A, MY3B/m2 MY3A, MY3B/m3 200 50 40 30 100 100 50 40 20 30 50 40 10 20 30 63 63 5 4 20 10 Load weight kg Load weight kg Load weight kg 63 3 40 10 40 5 4 2 3 25 5 4 1 25 40 2 3 25 0.5 0.4 16 2 1 16 0.3 16 1 0.2 0.5 0.1 0.5 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max. MY3A max. MY3B max.

17

Load Mass Allowable Moment MY1B/M1 MY1B/M3 MY1B/M2 MY1B/m1 200 200 200 300 400 500 20 30 40 50 100 100 50 20 30 40 100 50 10 40 30 20 30 40 50 5 4 3 2 10 Load mass kg Moment Nm Moment Nm Moment Nm 20 5 4 3 2 10 1 10 MY1B40 5 4 3 2 MY1B40 MY1B40 MY1B32 MY1B25 MY1B40 0.2 0.3 0.4 0.5 MY1B32 5 4 3 1 MY1B32 MY1B32 MY1B25 0.5 0.4 1 MY1B25 MY1B25 D0.1 0.3 0.2 2 0.5 0.4 0.3 0.05 0.04 0.03 0.2 -X