ZP

Flat pad P. 11 3.5 x 7 4 x 10 4 x 20 4 x 30 5 x 10 5 x 20 5 x 30 6 x 10 6 x 20 6 x 30 8 x 20 8 x 30 W P. 17 Oval pad 3.5 x 7 2 x 4 4 x 10 U H P. 33 HT P. 33 Heavy-duty pad HB P. 35 HW P. 36 U P. 27 Mark-free pad H P. 28 Related pad S Sponge pad P. 30 Resin attachment K P. 29 Pad with ball spline buffer U P. 24 H P. 37 Heavy-duty ball joint pad HB P. 43 Cyclone pad (Non-contact pad) Made

Compact Cylinder

P P Rc1/8 P P P P Rc1/8 P P Rc1/4 P P Rc1/4 P P Rc3/8 P P Rc3/8 P P P P Through-hole (Standard) Built-in magnet Pneumatic Air-hydro M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Piping Pipe thread NPT1/8 G1/8 P P P P NPT1/8 G1/8 P P P P NPT1/4 G1/4 P P P P NPT1/4 G1/4 P P P P NPT3/8 G3/8 P P P P NPT3/8 G3/8 P P P P 2.

A

See Accessories Section S T R O K E O P T I O N S ( M M) For 8 . . .25, 50, 75, 100, 125, 150 For 12 . .50, 75, 100, 125, 150 For 16 . .75, 100, 125, 150, 175, 200 For 20 . .100, 125, 150, 175, 200, 225, 250 For 25 . . .100, 125, 150, 175, 200, 225, 250, 300 Model Pitch Moment Yaw Moment Roll Moment Mp/Mep My/Mey Mr MXW8 5 5 3 MXW12 10 10 6 MXW16 20 20 12 MXW20 40 40 25 MXW25 110 110 65 O

Stability of suction position,

P ZP3 P Vacuum Ejector or Pump and Number of Vacuum Pads ZP3E ZP3E Ejector and number of pads Vacuum pump and number of pads Vacuum line ZP2 ZP2V Tank ZP ZPT ZPR XT661 P P P P P P P P P Ideally, one pad should be used for each line. When more than one pad is attached to a single vacuum line, take the countermeasures listed below.

smcmaintenancepartslist

P.287 P.289 P.290 P.290 P.290 P.290 P.290 P.297 P.297 P.301 P.304 P.306 P.306 P.306 P.310 P.311 P.311 P.312 P.312 P.312 P.315 P.316 P.316 P.316 P.317 P.318 P.319 P.319 P.319 P.324 P.325 P.326 P.329 P.333 P.333 P.333 P.337 P.339 P.340 P.343 P.348 P.351 P.351 P.356 P.358 P.361 P.362 P.364 P.367 P.371 P.371 P.374 P.385 P.385 P.387 P.387 P.390 P.392 P.393 P.394 P.395 P.396 CJP2 MGPW Pin Cylinder

ZP

Flat pad P. 11 3.5 x 7 4 x 10 4 x 20 4 x 30 5 x 10 5 x 20 5 x 30 6 x 10 6 x 20 6 x 30 8 x 20 8 x 30 W P. 17 Oval pad 3.5 x 7 2 x 4 4 x 10 U H P. 33 HT P. 33 Heavy-duty pad HB P. 35 HW P. 36 U P. 27 Mark-free pad H P. 28 Related pad S Sponge pad P. 30 Resin attachment K P. 29 Pad with ball spline buffer U P. 24 H P. 37 Heavy-duty ball joint pad HB P. 43 Cyclone pad (Non-contact pad) Made

2

P R V Nil 1 2 3 Size Size Air compressor size Note) 100 100 kW 125 125 kW 150 150 kW Note) Note that the above values are for reference only.

Electric Actuators

Driver for Non-standard Motor Regenerative Absorption Unit Series LC7R Teaching Box Dedicated AC Servomotor Controller Series LC1 P. 205 P. 200 P. 185 P. 196 Features 5 Electric Actuator Line-up of Products Short Stroke Electric Actuator Series LX Series LX Stepper motor High Rigidity Slide Table Type Series LXS Low Profile Slide Table Series LXF Guide Rod Type Series LXP P. 250 P. 210 P

Table of Contents

Operating pressure P (MPa) P 0.7 MPa MTS 4.

NCQ2/CQ2

P P P P P P Rc1/8 NPT1/8 G1/8 P P P P P P Rc1/4 NPT1/4 G1/4 P P P P P P Rc1/4 NPT1/4 G1/4 P P P P P P Rc3/8 NPT3/8 G3/8 P P P P P P Rc3/8 NPT3/8 G3/8 P P P P Through-hole (Std.)

Vacuum Pad

Flat pad P. 11 3.5 x 7 4 x 10 4 x 20 4 x 30 5 x 10 5 x 20 5 x 30 6 x 10 6 x 20 6 x 30 8 x 20 8 x 30 W P. 17 Oval pad 3.5 x 7 2 x 4 4 x 10 U H P. 33 HT P. 33 Heavy-duty pad HB P. 35 HW P. 36 U P. 27 Mark-free pad H P. 28 Related pad S Sponge pad P. 30 Resin attachment K P. 29 Pad with ball spline buffer U P. 24 H P. 37 Heavy-duty ball joint pad HB P. 43 Cyclone pad (Non-contact pad) Made

Vacuum Pad

Flat pad P. 11 3.5 x 7 4 x 10 4 x 20 4 x 30 5 x 10 5 x 20 5 x 30 6 x 10 6 x 20 6 x 30 8 x 20 8 x 30 W P. 17 Oval pad 3.5 x 7 2 x 4 4 x 10 U H P. 33 HT P. 33 Heavy-duty pad HB P. 35 HW P. 36 U P. 27 Mark-free pad H P. 28 Related pad S Sponge pad P. 30 Resin attachment K P. 29 Pad with ball spline buffer U P. 24 H P. 37 Heavy-duty ball joint pad HB P. 43 Cyclone pad (Non-contact pad) Made

Vacuum Pad

Flat pad P. 11 3.5 x 7 4 x 10 4 x 20 4 x 30 5 x 10 5 x 20 5 x 30 6 x 10 6 x 20 6 x 30 8 x 20 8 x 30 W P. 17 Oval pad 3.5 x 7 2 x 4 4 x 10 U H P. 33 HT P. 33 Heavy-duty pad HB P. 35 HW P. 36 U P. 27 Mark-free pad H P. 28 Related pad S Sponge pad P. 30 Resin attachment K P. 29 Pad with ball spline buffer U P. 24 H P. 37 Heavy-duty ball joint pad HB P. 43 Cyclone pad (Non-contact pad) Made

Vacuum Pad

Flat pad P. 11 3.5 x 7 4 x 10 4 x 20 4 x 30 5 x 10 5 x 20 5 x 30 6 x 10 6 x 20 6 x 30 8 x 20 8 x 30 W P. 17 Oval pad 3.5 x 7 2 x 4 4 x 10 U H P. 33 HT P. 33 Heavy-duty pad HB P. 35 HW P. 36 U P. 27 Mark-free pad H P. 28 Related pad S Sponge pad P. 30 Resin attachment K P. 29 Pad with ball spline buffer U P. 24 H P. 37 Heavy-duty ball joint pad HB P. 43 Cyclone pad (Non-contact pad) Made

Compact Hydraulic Cylinder

105 110 115 120 125 130 135 140 145 170 195 220 245 270 120 125 130 135 140 145 150 155 160 165 190 215 240 265 290 55 60 65 70 75 80 85 90 95 100 125 150 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 110 135 160 185 210 75 80 85 90 95 100 105 110 115 120 145 170 195 220 245 12.4 15.5 CHmKGB25 CHQ CHmKGB63 CHKm 10.4 CHN CHM 16 CHSm CHmKGB32 CH2m CHA CHmKGB80 Related

5 Port Solenoid Valve Series SY3000/5000/7000/9000

SY340 SY540 SY340 SY540 SY340 SY540 SY740 + + + + P. 198 EA P EB Type 41P P. 214 EA P EB In common Type 42 P. 198 + + + + + + + + EA P EB EA P EB SY340 SY540 SY740 Type 42P P. 214 EB P EA In common Type 43 SY940 + + + + P. 208 Base mounted Stacking type Flat ribbon cable Manifold stations can be increased or decreased.

Table of Contents

Dedicated Controller/LC1 P.73 Controller setup software P.80 Dedicated teaching box P.82 Options P.85 Dedicated Regenerative Absorption Unit/LC7R P.86 Non-standard Motor Compatible Drivers P.89 73 2 Series LC1 Controller Single Axis Type Built-in AC Servo Driver Series LTF: Standard Motor Compatible How to Order 2V LC1 F 1 H 1 L 3 Number of axes Mounting bracket 1 3 5 1 axis M3

CQ2

5.5 149 174 150 8 174 54 125 62 150 72 17 7 40 10 to 50, 75, 100 151.5 125.5 6.6 151.5 176.5 150.5 9 176.5 67 125.5 76 150.5 89 18 8 50 Refer to p.2.3-18 for rod end nut and optional brackets.

Air Cylinder Series CM2

Grease pack part no.: GR-S-010 (10 g) Basic Style (B) 20 P 20 25 Bore size Stroke P P (Head side pressure port) (Head side pressure port) P P (Rod side pressure port) (Rod side pressure port) Effective thread length FL Width across flats B2 H1 Width across flats B1 32 to 40 H2 Width across flats KA P E (Head side pressure port) I G G NA D Q MM NN AL N ZZ + Stroke S + Stroke N F K H A P QY

Air Cylinder Series MB

125 125 125 125 125 150 150 150 150 175 175 200 200 125 20 27 82 75 10 30 40 60 80 100 120 140 160 180 200 (mm) h Bore size (mm) 51 to 100 1 to 50 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 901 to 1000 801 to 900 32 40 50 63 80 100 98 106 114 114 126 126 86 94 102 102 114 114 111 119 127 127 139 139 136 144 152 152 164 164 161 169 177 177 189