5

(10) 15 (5) 15 With 2 pcs. 5 10 10 10 15 (10) 15 (5) 15 REC Note 1) 25 is only applicable for the D-P3DWAl.

Made to Order

10 + 15 (n2)Note) (n=4, 6...) 4.5 4 4.5 5 5 6 6 6 10 15 15 + 15 (n2)Note) (n=4, 6...)

Electric Actuator/Slider Type

Description Material Note 15 Cover plate Aluminum alloy Coating No.

High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

0 5 10 15 20 25 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 Horizontal/Bottom 800 800 800 L2 L2 [mm] L2 [mm] L2 [mm] 600 600 600 Y 400 400 400 Mer m 200 200 200 0 0 0 0 1 2 3 4 5 0 5 10 15 0 5 10 15 20 25 Work load [kg] Work load [kg] Work load [kg] 1500 1500 1500 Mep 1000 1000 1000 L3 [mm] L3 [mm] L3 [mm] m L3 Z 500 500 500 0 0 0 0 1 2 3 4 5 0 5 10 15 0 5 10 15 20 25 Work

Air Cylinder

50 15 + 45(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 45 (n 2) (n = 2, 3, 4, 5) MB MB1 D-H7 D-H7W D-H7BA D-H7NF 10 15 60 15 + 45(n 2) 2 (n = 2, 4, 6) Note 3) 60 + 45 (n 2) (n = 2, 3, 4, 5) CA2 CS1 D-H7C D-C73C D-C80C 5 15 65 15 + 50(n 2) 2 (n = 2, 4, 6) Note 3) 65 + 50 (n 2) (n = 2, 3, 4, 5) CS2 D-G5 D-K59 D-B5 D-B64 5 15 75 15 + 50(n 2) 2 (n = 2, 4, 6) Note 3) 75 + 55 (n 2) (n = 2, 3, 4,

2–4

5 15 10 10 2 pcs. 10 15 20 2 pcs. 5 10 15 15 20 20 25 15 32, 40, 50 32, 40, 50 5 15 10 5 1 pc. 10 10 20 1 pc. 5 5 10 15 15 20 25 15 Besides the models listed in How to Order, the following auto switches are applicable.

Integrated Controller

10 15 0 5 10 15 20 25 0 1 2 3 4 5 6 Vertical L7 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L8 [mm] L8 [mm] L8 [mm] L8 [mm] 600 600 600 600 Z 400 400 400 400 Mep m 200 200 200 200 0 0 0 5 10 15 0 0 0 5 10 15 0 5 10 15 20 25 0 1 2 3 4 5 6 L8 Work load [kg] Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting

15

0 0 0 1 2 3 4 5 0 5 10 15 0 5 10 15 20 25 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] 600 600 600 Z 400 400 400 200 200 200 0 0 0 0 5 10 15 0 5 10 15 20 25 0 1 2 3 4 5 Work load [kg] Work load [kg] Work load [kg] 807 A LEFB Series Motorless Type Calculation of Guide Load Factor Mounting Orientation 1.

MHZ

11 7 52.8 0.016 0.043 MHZ2-16E 16f8 20 10 15 58.7 D2 0.020 0.053 MHZ2-20E 20f8 22 12 19 70.5 0.020 0.053 D1 MHZ2-25E 25f8 15 25 24 82.9 Other dimensions and specifications correspond to the standard.

MHZ

11 7 52.8 0.016 0.043 MHZ2-16E 16f8 20 15 10 58.7 D2 0.020 0.053 MHZ2-20E 20f8 12 22 19 70.5 0.020 0.053 D1 MHZ2-25E 25f8 15 25 24 82.9 Other dimensions and specifications correspond to the standard.

Compact Type

CAT.ES20-174 A Compact Type Dual-Rod Cylinder 15, 20, 25, 32 additionally released. Series CXSJ/6, 10, 15, 20, 25, 32 Series CXSJ/6, 10, 15, 20, 25, 32 Auto switches can be installed from 3 directions.

Compact Type Dual-Rod Cylinder Series CXSJ

Compact Type Dual-Rod Cylinder 15, 20, 25, 32 additionally released. Series CXSJ/6, 10, 15, 20, 25, 32 Series CXSJ/6, 10, 15, 20, 25, 32 Auto switches can be installed from 3 directions.

Table of Contents

x 18l 18 5 5 M3 x 18l 18 5 5 M3 x 18l 18 5 With Auto Switch For Axial Mounting For Lateral Mounting B 27 29 31 33 38 27 29 31 33 38 43 27 29 31 33 38 43 C D Model Mounting bolt CDUJB6-4 -6 -8 -10 -15 CDUJB8-4 -6 -8 -10 -15 -20 CDUJB10-4 -6 -8 -10 -15 -20 Model Mounting bolt CDUJB6-4 -6 -8 -10 -15 CDUJB8-4 -6 -8 -10 -15 -20 CDUJB10-4 -6 -8 -10 -15 -20 A M3 x 27l M3 x 29l M3 x 31l M3 x 33l

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

15 20 17 32 32 49 116 Nut 2 pcs. 5 10 15 15 20 20 30 With rubber bumper 7 9 18 31 56 Note) For detailed specifications on auto switch, refer to page 7-9-1.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

3H9 3.5 M5 x 0.8 8 32 27 3H9 3.5 19 3H9 3.5 M10 x 1.5 15 M6 x 1 M10 x 1 M5 x 0.8 37 117 10 12 60 25 54 20.5 4H9 4.5 M6 x 1 10 43 36 4H9 4.5 24 4H9 4.5 M10 x 1.5 15 M6 x 1 M10 x 1 Rc 1/8 40 127 11.5 14 65 25 57 23 4H9 4.5 M6 x 1 10 48 39 4H9 4.5 28 4H9 4.5 M12 x 1.75 18 M8 x 1.25 M14 x 1.5 Rc 1/8 46 152 14.5 15 75 31.4 66 26.5 5H9 5.5 M8 x 1.25 12 55 45 5H9 5.5 33 5H9 5.5 11-9-21 22 Series

CQS

16 5, 10, 15, 20 25, 30 7-4-20 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 7-4-12 Solid state switch D-M9N/M9NV D-M9P/M9PV D-M9B/M9BV D-F9NW/F9NWV D-F9PW/F9PWV D-F9BW/F9BWV D-F9BAL Series CQSK 12 16 5, 10, 15, 20 25, 30 7-4-28 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQSS 12 16 5, 10, 15, 20 25, 30 (1) 7-4-36 20 25 5, 10, 15, 20 25, 30, 35,

Auto Switch Guide

Weight (g) D-F7BA D-F7BAV Auto switch model 0.5 Lead wire length (m) 3 50 50 Auto Switch Internal Circuit 5 81 81 Dimensions OUT (+) Brown D-F7BAL 3.2 mounting hole Main circuit of switch Indicator light 15 OUT () Blue Indicator light/Display method Most sensitive position Operating range D-F7BAVL 3.2 mounting hole Indication Green Red Red 8 Indicator light 15 Optimum operating position

Compact Cylinder

Minimum Auto Switch Mounting Stroke (mm) Auto switch model Bore size (mm) D-A9 A9V D-M9 D-M9V D-F9W D-F9WV D-F9BAL Number of auto switches 2 pcs. 10 5 15 10 20 10 15 20 1 pc. 5 5 15 5 20 10 15 2 pcs. 10 5 10 10 20 10 10 25,32,40,50 1 pc. 5 5 10 5 20 10 10 2 pcs. 10 5 10 10 15 10 10 63 1 pc. 5 5 10 5 15 5 5 Besides the models listed in How to Order, the following auto switches are applicable

Compact Cylinder with Solenoid Valve/

Minimum Stroke for Auto Switch Mounting (mm) D-M9 10 D-M9V 5 D-M9W 15 D-M9WV 10 D-A9 10 D-A9V 5 Number of auto switches mounted Bore size (mm) 32 1, 40 50 2, 63 1 10 5 15 15 10 10 2 1 The outline dimensions for 5 mm stroke will be the same as those for 10 mm stroke. 2 The outline dimensions for 10 mm stroke will be the same as those for 15 mm stroke. 7 Prior to Use Auto Switches Common Specifications