Note AM IDG30/30H/30L IDG50/50H/50L IDG60/60H/60L/60S IDG75/75H/75L/75S IDG100/100H/100L/100S q w e r t Body Aluminum alloy Platinum silver coated Misc. Case Stainless steel Orifice Stainless steel Holder Aluminum alloy Aluminum Silencer Resin + Copper alloy Replacement Parts Part no. No.
Note AM IDG30/30H/30L IDG50/50H/50L IDG60/60H/60L/60S IDG75/75H/75L/75S IDG100/100H/100L/100S q w e r t Body Aluminum alloy Platinum silver coated Misc. Case Stainless steel Orifice Stainless steel Holder Aluminum alloy Aluminum Silencer Resin + Copper alloy Replacement Parts Part no. No.
x 80l x 85l x 90l x 95l x 100l M5 x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l 65 70 75 80 85 90 95 100 105 140 165 75 80 85 90 95 100 105 110 115 150 175 M5 x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 140l x 165l M5 x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 150l x 175l 80 85 90 95 100 105 110 115 120 155 180 90 95 100 105 110 115 120 125
Mounting bolt D C C Model D D 55 Mounting bolt C Model Mounting bolt 70 M5 x 55l CHKDB50 CHKDB20 M10 x 70l 5 (M) 5 (M) 75 x 60l x 75l 10 (M) 60 10 (M) x 65l 80 x 80l 15 (M) 65 15 (M) x 70l 85 x 85l 20 (M) 70 20 (M) x 75l 90 x 90l 25 (M) 75 25 (M) 12.4 x 80l 95 x 95l 30 (M) 80 30 (M) 15.8 x 85l 100 x 100l 35 (M) 85 35 (M) x 90l 105 x 105l 40 (M) 90 40 (M) x 95l 110 x 110l 45 (M) 95 45 (M)
95 x 135L 135 -50D (M) -75D (M) x 100L 100 x 160L 160 DCHQB32-5D (M) -100D (M) CHQB80-10D (M) CQ-M5 x 70L 70 x 185L 185 -10D (M) CQ-M10 x 100L x 75L 75 100 -15D (M) -15D (M) x 80L 80 105 x 105L -20D (M) -20D (M) x 85L 85 110 x 110L -25D (M) -25D (M) x 90L 90 115 x 115L -30D (M) -30D (M) x 95L 95 120 x 120L 7 -35D (M) -35D (M) x 100L 100 14.5 125 x 125L -40D (M) -40D (M) x 105L 105 130 x
Operating range RB Model C 8 8 8 8 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 x 50l M3 x 60l M3 x 50l M3 x 60l M5 x 75l M5 x 85l M5 x 75l M5 x 85l M5 x 85l M5 x 95l M5 x 75l M5 x 85l M6 x 95l M6 x 130l M8 x 100l M8 x 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50
C 8 8 8.5 8.5 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 X 50l M3 X 60l M3 X 50l M3 X 60l M5 X 75l M5 X 85l M5 X 75l M5 X 85l M5 X 85l M5 X 95l M5 X 75l M5 X 85l M6 X 95l M6 X 130l M8 X 100l M8 X 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50 PTo attach and detach
175L HY-M4 x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 100L x 105L x 110L HY-M5 x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 100L x 105L x 110L HY-M6 x 100L x 105L x 110L x 115L x 120L x 125L x 130L x 135L x 140L x 165L x 190L HY-M6 x 100L x 105L x 110L x 115L x 120L x 125L x 130L x 135L x 140L x 165L x 190L 65 70 75 80 85 90 95 100 105 110 65 70 75 80 85 90 95 100 105 110 75 80 85 90 95 100
(mm) (mm) Cylinder model C D Mounting bolt size Cylinder model C D Mounting bolt size CVQB5010 CVQB325 M6 x 60L M5 x 45L 60 45 15 10 x 60L x 45L 60 45 20 15 x 65L x 50L 65 50 25 20 x 70L x 55L 70 55 30 25 x 75L x 60L 75 60 35 30 12.5 x 80L x 65L 80 65 9 40 35 x 85L x 70L 85 70 45 40 x 90L x 75L 90 75 50 45 x 95L x 80L 95 80 75 50 x 120L x 85L 120 85 -100 75 x 145L x 110L 145 110 CVQB6310
Mounting bolt D C D D C Model Mounting bolt C Model Mounting bolt M10 x 80l CHKGB20 M5 x 55l 80 CHKGB50 5 (M) 5 (M) 55 x 85l x 60l 85 10 (M) 10 (M) 60 x 90l x 60l 90 15 (M) 15 (M) 65 x 95l x 70l 95 20 (M) 20 (M) 70 x 100l x 75l 100 25 (M) 25 (M) 75 12.4 x 105l x 80l 105 30 (M) 30 (M) 80 15.5 x 110l x 85l 110 35 (M) 35 (M) 85 x 115l x 90l 115 40 (M) 40 (M) 90 x 120l x 95l 120 45 (M) 45 (M)
D (mm) (mm) Cylinder model C D Mounting bolt size Cylinder model C D Mounting bolt size CVQM5010 CVQM325 45 M5 x 45L M6 x 60L 60 15 10 45 x 45L x 60L 60 20 15 50 x 50L x 65L 65 25 20 55 x 55L x 70L 70 30 25 60 x 60L x 75L 75 35 30 65 x 65L 12.5 x 80L 80 9 40 35 70 x 70L x 85L 85 45 40 75 x 75L x 90L 90 50 45 80 x 80L x 95L 95 75 50 85 x 85L x 120L 120 -100 75 110 x 110L x 145L 145 CVQM6310
105 110 115 120 125 130 135 140 165 190 105 110 115 120 125 130 135 140 145 170 195 10D (M) 15D (M) 15D (M) 20D (M) 20D (M) 25D (M) 25D (M) 30D (M) 7 x 120l x 125l x 130l x 135l x 160l x 185l x 80l x 85l x 90l x 95l x 100l 30D (M) 35D (M) 15.5 35D (M) 40D (M) 40D (M) 45D (M) 45D (M) 50D (M) 50D (M) 75D (M) M5 x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 140l CH QB32
67.5 14.5 4-M4 x 0.7 Thread depth 7.5 2-M5 x 0.8 (Port size) 71.5 103 + Stroke 24 127 + Stroke 2 10-12-12 12 High Precision Stroke Reading Cylinder Non-rotating Piston Type Series CEP1 Foot style: CEP1L12 Stroke 4-4.5 (Positioning pin hole) 40 5.5 13 25 6 RE A B +0.05 +0.02 4 REC CX 66 54 CY MQQ M RHC MK(2) RS Q G 47.5 RS H A 17 RZQ 40 27 3.5 51 MI W S CEP1 CE1 Rod side flange style: CEP1F12
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC MK(2) RS Q G 47.5 RS H A 17 RZQ 40 27 3.5 51 MI W S CEP1 CE1 Rod side flange style: CEP1F12 Stroke CE2 ML2B 4 (Positioning pin hole) C J G5-S CV 4 +0.05 +0.02 (Positioning pin hole) +0.05 +0.02 MVGQ 27 18 CC 6 RB 5.5 38 4-4.5 J 50 D-X 20Data 10-12
Cylinder model Hexagon wrench key MKB12-10Z -20Z -30Z MKB16-10Z -20Z -30Z MKB20-10Z -20Z -30Z MKB25-10Z -20Z -30Z MKB32-10Z -20Z -30Z -50Z MKB40-10Z -20Z -30Z -50Z MKB50-10Z -20Z -30Z -50Z MKB63-10Z -20Z -30Z -50Z CQ-M3 x 50L x 60L x 70L CQ-M3 x 50L x 60L x 70L CQ-M5 x 75L x 85L x 95L CQ-M5 x 75L x 85L x 95L CQ-M5 x 85L x 95L x 105L x 125L CQ-M5 x 80L x 90L x 100L x 120L CQ-M6 x 90L x 100L
Manufacturer Clean bench (Class M3.5) 5min 55min 75l Sampling time Interval time Setting conditions Supply rate 15l/min Sampling air flow Exhausted from relief port Laser dust monitor (Suction flow rate 15l/min) Particle generation measuring circuit Evaluation method To obtain the measured values of particle concentration, the accumulated value Note 1) of particles captured every 5 minutes
x 140L Mounting bolt size M5 x 65L x 70L x 75L x 85L x 95L x 120L x 145L M6 x 85L x 95L x 105L x 130L x 155L M8 x 90L x 100L x 110L x 135L x 160L M10 x 105L x 115L x 140L x 165L M10 x 120L x 130L x 155L x 180L R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63-30 -
Mounting bolt M3 x 45L M3 x 55L M3 x 60L M5 x 55L M5 x 60L M5 x 65L M5 x 60L M5 x 65L M5 x 70L Mounting bolt M5 x 75L M5 x 80L M5 x 85L M6 x 75L M6 x 80L M6 x 85L RSQB12-10 Note) RSQB16-10 -15 RSQB20-10 -15 -20 RSQB32-10 -15 -20 RSQB40-20 -25 -30 RSQB50-20 -25 -30 7 9 Mounting bolt C D 9 Note) When using the through-hole mounting for a size 12 cylinder, be sure to use the flat washer which
Mounting bolt Mounting bolt diagram C D Mounting bolts D Model C Mounting bolt Model C D Mounting bolt M8 x 95l x 100l x 105l x 110l x 115l x 120l x 125l x 130l x 135l x 160l x 185l CHQWB63 10D (M) CHQWB20 M5 x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l M5 x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 140l x 165l M5 x 70l x 80l x 85l x 90l x 95l x 100l