Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

SB) 7 5 5 5 3 7.5 5 3 5 3 90 90 5 90 5 A MHZ 20 20 20 20 (3 x SA) 20 20 MHF Section SD SD MHL MHSJ3-63D MHSJ3-80D MHR MHK 4 MHS 10 4 11 MHC 3 5 3 5 90 90 MHT 5 MHY 20 20 20 20 MHW -X (mm) L 2H9 3H9 4H9 6H9 8H9 J 20 21 24 28 32 HB 65 75 88 106 130 HA 76 86 103 125 158 FX 22 26 32 40 50 EO 15.5 19 24 31 41 EC 11.5 15 18 23 31 DO 35.5 40 48 59 73 DC 31.5 36 42 51 63 AE 36 37 46 50 57 CA 9.5

High Vacuum Angle Valve

Chemraz is a registered trademark of Greene, Tweed Technologies, Inc. 4 XLA/XLA V Series Specifications Model XLA(V)-16-2 XLA(V)-25-2 XLA(V)-40-2 XLA(V)-50-2 XLA(V)-63-2 XLA(V)-80-2 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature [C] XLA 5 to 60 (High-temperature type: 5 to 150) XLAV 5 to 50 Operating pressure [Pa(abs)] 1 x 106

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Temperature specifications 5. Auto switch type Symbol Nil M9N (L) M9P (L) M9B (L) A90 (L) A93 (L) M9// Symbol Nil H0 Temperature range 5 to 60C 5 to 150C Without auto switch (without built-in magnet) Remarks Auto switch D-M9N (L) D-M9P (L) D-M9B (L) D-A90 (L) D-A93 (L) Solid state switch 6.

Air Cylinder Series MB

30 9 27 40 40 1 5 2 4 6 33 9 30 50 50 2 4 7 5 3 39 9 36 63 63 4 2 3 7 5 44 9 41 80 80 6.5 7.5 5.5 8.5 10.5 54 12.5 51 100 100 5.5 8.5 6.5 7.5 10.5 63.5 12.5 60.5 125 125 9.5 9.5 14.5 10.5 10.5 74.5 14.5 71.5 Note) Adjust the auto switch after confirming the operation to set actually.

Air Cylinder

10 15 50 15 + 45 (n 2) 2 (n = 2, 4, 6)Note 3) 50 + 45 (n 2) (n = 2, 3, 4, 5) D-H7l D-H7lW D-H7BA D-H7NF 10 15 60 15 + 45 (n 2) 2 (n = 2, 4, 6)Note 3) 60 + 45 (n 2) (n = 2, 3, 4, 5) CG3 JMB MB D-H7C D-C73C D-C80C 10 15 65 15 + 50 (n 2) 2 (n = 2, 4, 6)Note 3) 65 + 50 (n 2) (n = 2, 3, 4, 5) D-G5NT D-B5l/B64 10 15 75 15 + 50 (n 2) 2 (n = 2, 4, 6)Note 3) 75 + 55 (n 2) (n = 2, 3, 4, 5)

Rotary Actuator/Vane Type

cord 3-wire (NPN) V V V v v IC circuit 5 V, 12 V 3-wire (PNP) M9PV M9P V V V v v 2-wire 12 V M9BV M9B V V V v v Solid state auto switch XC1 Add connecting ports W, J Yes For 10, 15 3-wire (NPN) 5 V, 12 V S99V S99 V V v v IC circuit 3-wire (PNP) S9PV S9P V V v v XC2 Change threaded hole to through-hole W, J Relay, PLC Grommet 24 V 2-wire 12 V T99V T99 V V v v 5 V, 12 V 5 V, 12

e-Rodless Actuator

Load weight Allowable moment E-MY2H/m3 E-MY2H/M3 E-MY2H/M1 E-MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 q r w et 20 20 20 20 Moment (Nm) Moment (Nm) Moment (Nm) Moment (Nm) 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 MY2H16 4 4 3 3 3 3 MY2H16 MY2H16 2 2 2 2 MY2H16 0.2 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300400500 1000 1500 100 200 300400500

Made to Order

(mm) A B Bore size (mm) 50 st or less for both of S1, S2 Stroke Both of S1, S2 L Combination of 50 st or less, 75, 100 st 75, 100 st for both of S1, S2 50 st or less 75, 100 st 12 16 20 25 32 40 50 63 80 100 41 (63) 3.5 17 (28) 5 to 30 44 (68) 3.5 18.5 (30.5) 48 (72) 4.5 19.5 (31.5) 5 to 50 55 (75) 5 22.5 (32.5) 70 (80) 80 (80) 60 (80) 7 23 (33) 33 (33) 5 to 100 83 (93) 93 (93

5

(mm) Stroke range (mm) Special cap bolt 32 5 to 50 50 33 60 43 5.5 8 48 56 65 75, 100 60 43 M FV 40 5 to 50 56.5 39.5 66.5 49.5 5.5 8 54 62 72 75, 100 66.5 49.5 FT L B + Stroke A + Stroke 50 10 to 50 58.5 40.5 68.5 50.5 6.6 9 67 76 89 75, 100 68.5 50.5 4 x FD FX FZ Bore size (mm) Stroke range (mm) L L1 M 32 5 to 50 17 38.5 34 75, 100 40 5 to 50 17 38.5 40 75, 100 L1 50 10 to 50 18 43.5 50

Electric Actuator/Slider Type

: Horizontal LEJB63/Belt Drive: Horizontal 20 20 The value of 50% or less is the same as duty ratio 50% The value of 50% or less is the same as duty ratio 50% Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] 15000 15000 Duty ratio: 50% Duty ratio: 50% Duty ratio: 75% Duty ratio: 75% 10 10 Duty ratio: 100% Duty ratio: 100% 5000 5000 0 0 0 5 10 15 20 0 5 10 15 20 25 30 Work

Auto Switch Guide

RHC Load voltage 24 VDC 100 VAC 200 VAC Load current range (2) 5 to 50 mA 5 to 25 mA 5 to 12.5 mA MK(2) Contact protection circuit Built-in Internal voltage drop RS Q G 2.4 V or less (to 20 mA)/3.5 V or less (to 50 mA) Indicator light Auto Switch Internal Circuit D-A33C Red LED lights when ON.

Auto Switch Guide

Auto Switch Specifications Grommet PLC: Abbreviation of Programmable Logic Controller D-B5 (With indicator light) D-B53 D-B54 CL Auto switch model Applicable load PLC Relay, PLC CL1 Load voltage 24 VDC 24 VDC 100 VAC 200 VAC (3) Load current range 5 to 50 mA 5 to 50 mA 5 to 25 mA 5 to 12.5 mA MLGC Contact protection circuit None Built-in Internal voltage drop 2.4 V or less 2.4 V or less (

2–4

-30 -35 -40 -45 -50 -75 -100 CDQMB50-10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CDQMB12-5 -10 -15 -20 -25 -30 CDQMB16-5 -10 -15 -20 -25 -30 CDQMB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB32-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 40 45 50

Rotary Table/Rack & Pinion Style Series MSQ

25 Size: 10 to 50 Size: 70 to 200 Carbon steel 26 Anodized Anodized Chromated NBR Brass NBR Stainless steel 27 28 29 30 31 Size: 70 to 200 only Size: 70 to 200 only Replacement parts Description Size 10 P523010-5 20 P523020-5 30 P523030-5 50 P523040-5 70 P391050-5 100 P391060-5 200 P391070-5 Seal kit No.

Cylinder with Turntable Series MGT

1 MGQ 1 2 3 4 5 10 20 30 40 50 100 200 300 400 10 20 30 40 50 100 200 300 400 Eccentric distance l (mm) Eccentric distance l (mm) MGG MGC MGTL100 300 300 MGTM100 200 200 P = 0.5 MPa MGF 100 P = 0.5 MPa Larger than 75st Larger than 50st Load mass m (kg) Load mass m (kg) MGZ 40 50 100 25st 50st 30 25, 50st MGT 20 50 40 10 30 5 4 3 20 2 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 30 40 50

Auto Switch Guide

Auto Switch Specifications Grommet PLC: Abbreviation of Programmable Logic Controller D-B5 (With indicator light) D-B53 D-B54 MX Auto switch model Applicable load PLC Relay, PLC MTS Load voltage 24 VDC 24 VDC 100 VAC 200 VAC (3) Load current range 5 to 50 mA 5 to 50 mA 5 to 25 mA 5 to 12.5 mA MY Contact protection circuit None Built-in Internal voltage drop 2.4 V or less 2.4 V or less (to

Auto Switch Guide

Auto Switch Specifications Grommet PLC: Abbreviation of Programmable Logic Controller D-B5 (With indicator light) D-B53 D-B54 MX Auto switch model Applicable load PLC Relay, PLC MTS Load voltage 24 VDC 24 VDC 100 VAC 200 VAC (3) Load current range 5 to 50 mA 5 to 50 mA 5 to 25 mA 5 to 12.5 mA MY Contact protection circuit None Built-in Internal voltage drop 2.4 V or less 2.4 V or less (to

Auto Switch Guide

Auto Switch Specifications Grommet PLC: Abbreviation of Programmable Logic Controller D-B5 (With indicator light) D-B53 D-B54 MX Auto switch model Applicable load PLC Relay, PLC MTS Load voltage 24 VDC 24 VDC 100 VAC 200 VAC (3) Load current range 5 to 50 mA 5 to 50 mA 5 to 25 mA 5 to 12.5 mA MY Contact protection circuit None Built-in Internal voltage drop 2.4 V or less 2.4 V or less (to

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

8 and @7 20 P523030-5 50 P523040-5 70 P391050-5 100 P391060-5 200 P523010-5 Seal kit P391070-5 11-9-20 21 Rotary Table Series MSQ Dimensions: Size 10, 20, 30, 50 WB effective depth WC XB effective depth XC Basic type: MSQBA 8-WD depth WE (Circumference: 8 equivalents) XA 2 WA 2 4-JJ depth 8 45 2-J through JA counterbore depth JB 22.5 CRB2 BE CRBU2 CRB1 WF 2-M5 x 0.8 Piping port (Plugged)

NCQ8

/8 3-3/8 3-5/8 4-1/8 4-5/8 5-1/8 5-5/8 #6-32UNC2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-3/4 2-7/8 3-1/8 3-3/8 3-5/8 3-7/8 4-3/8 4-7/8 5-3/8 5-7/8 1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-7/8 3-1/8 3-3/8 3-5/8 4-1/8 4-5/8 5-1/8 5-5/8 1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-7/8 3-1/8 3-3/8 3-5/8 4-1/8 4-5/8 5-1/8 5-5/8 2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-3/4 2-7/8 3-1/8 3-3/8 3-5/8 3-7/8 4-3/8 4-7/8 5-3/