Magnet: Built-in Magnet, Bore Size: 10 mm, Port Thread: Bore 6~25:M5, Bore 32: Rc 1/8, Stroke: 15 mm, Action: Single Acting Spring Return, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, 0.5M, Lead Wire or Prewired Connector: 3 m, Number: -

Metal Seal/Rubber Seal Series VQ Body Ported

Specifications Dot marking Lead wire color Terminal no. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Black Brown Red Orange Yellow Pink Blue Purple Gray White White Yellow Orange Yellow Pink None None None None None None None White Black Black Red Red Red Black Black AXT100-DS151 to 3 Multi-core vinyl cable VVRF 0.3 mm2 x 15C 9 Plug connector HDA-CTH (Made by Hirose Electric) Red Connector HDA-15S

Table of Contents

L M9NL Refer to page 12-13-1 for further information on auto switches. Auto switches marked with a "" are made upon receipt of order.

High Vacuum Angle Valve

Example) -M9NL !

Aluminum High Vacuum Angle Valve

Example) -M9NL !

NCG/CG1

M9NW M9NL M9NZ Since there are other applicable auto switches than listed, contact SMC for details.

A-HEC-OM-J004

7.3 Specifications of Connectors 7.3.1 Connection of Liquid Tank and Controller Liquid Tank connector DC connector (male) Signal connector (male) Nanaboshi Electric Mfg.co.,Ltd: NJC-245-RM UL CSA Hirose Electric co.,Ltd: CDA-15P(05) Fixed screw M2.6 Connected Connected Connection cable DC cable Signal cable Nanaboshi Electric Mfg.co.,Ltd: NJC-245-PF UL CSA Hirose Electric co.,Ltd: CDA-15S

air-filter-e

L-131S L-135S FQ-OP001 BP-13S For port size Rc 1 For port size Rc 3/4 For port size Rc 1/2 Bracket Stainless steel 304 BP-14S BP-15S 272 Low Maintenance Filter Series FN1/FN4 P.483 1 Replacement Procedure is Replacement Parts and Seal List How to Order Actuators Modular F.R.L.

Base Mounted Metal Seal/Rubber Seal Series VQ

D-sub Connector Cable Assembly Multi-core vinyl cable VVRF 0.3 mm2 x 15C ~ = 9 Dot marking Lead wire color Terminal no. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Black Brown Red Orange Yellow Pink Blue Purple Gray White White Yellow Orange Yellow Pink None None None None None None None White Black Black Red Red Red Black Black Plug connector HDA-CTH (Made by Hirose Electric) Red Connector HAD-15S

Air Preparation Equipment

L-131S L-135S FQ-OP001 BP-13S For port size Rc 1 For port size Rc 3/4 For port size Rc 1/2 Bracket Stainless steel 304 BP-14S BP-15S 272 Low Maintenance Filter Series FN1/FN4 P.483 1 Replacement Procedure is Replacement Parts and Seal List How to Order Actuators Modular F.R.L.

Thermoelectric Bath

Co., Ltd.: NJC-245-RF UL CSA Hirose Electric Co., Ltd.: CDA-15S Holding screw M2.6 9 8 7 6 Communication connector D-sub 9 pin (female type) Maintenance Maintenance of this unit is performed only in the form of return to and repair at SMCs site. As a rule, SMC will not conduct on-site maintenance.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

CDRB2BW10/15S D CDRB2BW20/30S D CDRB2BW40S D CRB2 A port B port CRBU2 CRB1 MSU CRJ CRA1 CRQ2 MSQ MRQ D20!7 Component Parts Description Material Description Material No. !1 !2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

CRB2/CRBU2/CRB1

CDRBU2W10, 15S D CDRBU2W20, 30, 40CDRBU2W40-S, D S D Parts list CRB1 No.

Table of Contents

CDRB2BW10/15S D CDRB2BW20/30S D CDRB2BW40S D CRB2 A port B port CRBU2 CRB1 MSU CRJ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CRA1 CRQ2 MSQ MRQ D20!7 Component Parts Description Material Description Material No. !1 !2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

CDRB2BW10/15S D CDRB2BW20/30S D CDRB2BW40S D CRB2 A port B port CRBU2 CRB1 MSU CRJ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CRA1 CRQ2 MSQ MRQ D20!7 Component Parts Description Material Description Material No. !1 !2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

MHZ

Lead wire length symbols:0.5 mNil (Example) M9BV 3 m L (Example) M9NL 5 m Z (Example) F59AZ (Example) When ordering with an air gripper When ordering auto switches only 61 D-F8PLMHZ 2-16D-F8NS61 Auto switches marked with a symbol are produced upon receipt of order. Note 1) Take note of hysteresis with 2 color indication type switches.

MHZ

Lead wire length symbols:0.5 mNil (Example) M9BV 3 m L (Example) M9NL 5 m Z (Example) F59AZ (Example) When ordering with an air gripper When ordering auto switches only 61 D-F8PLMHZ 2-16D-F8NS61 Auto switches marked with a symbol are produced upon receipt of order. Note 1) Take note of hysteresis with 2 color indication type switches.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-M9NL 7.

XM, XY

-M9NL u Seal material and its changed part Seal material Seal material Compound No.

NCQ8

L M9NL 197in (5 m) .