Aluminum High Vacuum Angle Valve

Example) -M9NL !

MHZ

Lead wire length symbols:0.5 mNil (Example) M9BV 3 m L (Example) M9NL 5 m Z (Example) F59AZ (Example) When ordering with an air gripper When ordering auto switches only 61 D-F8PLMHZ 2-16D-F8NS61 Auto switches marked with a symbol are produced upon receipt of order. Note 1) Take note of hysteresis with 2 color indication type switches.

MHZ

Lead wire length symbols:0.5 mNil (Example) M9BV 3 m L (Example) M9NL 5 m Z (Example) F59AZ (Example) When ordering with an air gripper When ordering auto switches only 61 D-F8PLMHZ 2-16D-F8NS61 Auto switches marked with a symbol are produced upon receipt of order. Note 1) Take note of hysteresis with 2 color indication type switches.

MHT2

0 Description Main parts Replacement Parts MHT2-32D MHT2-40D MHT2-50D MHT2-63D Finger assembly MH-TA3201 MH-TA4001 MH-TA5001 MH-TA6301 wo Lever assembly MH-TA3202 MH-TA4002 MH-TA5002 MH-TA6302 e <32, 40> weryio Link parts assembly MH-TA3203 MH-TA4003 MH-TA5003 MH-TA6303 <50, 63> werio CDQ2A32-15D CDQ2A40-15D CDQ2A50-20D CDQ2A63-20D Compact cylinder !

MHT2

0 Description Main parts Replacement Parts MHT2-32D MHT2-40D MHT2-50D MHT2-63D Finger assembly MH-TA3201 MH-TA4001 MH-TA5001 MH-TA6301 wo Lever assembly MH-TA3202 MH-TA4002 MH-TA5002 MH-TA6302 e <32, 40> weryio Link parts assembly MH-TA3203 MH-TA4003 MH-TA5003 MH-TA6303 <50, 63> werio CDQ2A32-15D CDQ2A40-15D CDQ2A50-20D CDQ2A63-20D Compact cylinder !

Table of Contents

Do not expose it to direct sunlight. 13-2-12 12 Vacuum Module: Ejector System Series ZX Vacuum Pressure Switch Unit/Vacuum Pressure Switch: ZSE2-0X Vacuum Pressure Switch Quick response: 10 ms Compact size: 39H x 20W x 15D (except the connecting portion) Improved wiring: connector type Uses a carrier diffusion semiconductor pressure sensor ZSE2-0X Air 0 to 101 kPa 3% Full span or less 3%

XM, XY

-M9NL u Seal material and its changed part Seal material Seal material Compound No.

NCQ8

L M9NL 197in (5 m) .

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Solid state switches marked "" are produced upon receipt of order.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-M9NL 7.

Cylinder (Tube) Inner Diameter(φ): 25, Stroke(mm): 15, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05～0.7, Cushion: Rubber cushion, Port thread

Magnet: D (Built-in Magnet), Bore Size: 25, Port Thread: Bore: 6, 10, 16, 20, 25, M5x0.8 ; Bore: ø32, Rc1/8, Stroke: 15mm

Cylinder (Tube) Inner Diameter(φ): 25, Stroke(mm): 15, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05～0.7, Cushion: Rubber cushion, Port thread

XLAQ/XLDQ

Example) -M9NL Symbol Nil A B C Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

Table of Contents

Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Refer to page 10-12-16 for details on other applicable auto switches than listed above.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Solid state switch Yes Yes Grommet Relay, PLC A93 A93V 2-wire 12 V 24 V 100 V M9N M9NV 3-wire (NPN) IC circuit 5 V, 12 V M9P M9PV 3-wire (PNP) Relay, PLC M9B M9BV 2-wire 12 V 24 V Grommet F9NW F9NWV 3-wire (NPN) 5 V, 12 V Diagnostic indication (2-color indication) F9PW F9PWV 3-wire (PNP) F9BW F9BWV 2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

Lead wire length symbols:0.5 m Nil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Refer to page 12-13-25 for solid state switch with pre-wire connector. 12-5-4 5 2 Finger Rotary Actuated Air Gripper Series MHR2/MDHR2 30 Model/Specifications Nominal size 10 15 20 Action Double acting Gripping force (N) (1) External grip 12 24 33 58 (Effective value) at 0.5 MPa Internal grip 12 34

CUJ

-X Centering can be done easily. 13 18 + Stroke 33 20Tolerance h9 8 Rod cover Data CDUJB8-15D 21 13.5 18 + Stroke 38 Compliant for clean room Clean Series 10 CDUJB10-20D 1011-Series CUJ 22 Two auto switches can be installed even for 4 mm strokes. CU Length is shortened by approx. 64% max. Volume is reduced by approx. 70% max.

Secondary Batteries

(Example) 90-RSDQB32-15D *Specifications and dimensions for the 90-series are the same as standard products. Applicable Auto Switch/Refer to pages 62 to 65 for further information on auto switches.

CUJ

CAT.ES20-157 A Mini Free-mount Cylinder Series CUJ 4, 6, 8, 10 Mini Free-mount Cylinder Miniature body 10 13 + Stroke 17 4 15 19 CUJB4-4D 13 18 + Stroke 26 6 CDUJB6-8D 13 18 + Stroke 33 8 CDUJB8-15D 21 13.5 18 + Stroke 38 10 CDUJB10-20D 22 Length is shortened by approx. 64% max. CU Volume is reduced by approx. 70% max.