Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

D-A90, A90V OUT () Brown Contact protection box CD-P11 CD-P12 Reed switch (g) Mass OUT () Blue D-A90 D-A90V D-A93 D-A93V D-A96 D-A96V Model D-A93, A93V 6 6 6 6 8 8 0.5 3 Lead wire length (m) LED Brown OUT (+) Brown 30 30 30 30 41 41 Contact protection box CD-P11 CD-P12 Resistor Dimensions (mm) Reed switch Zener diode D-A90/D-A93/D-A96 OUT () Blue 2 2.8 4.5 Blue 2.7 4 24.5 (22) D-A96, A96V

Magnet: D (Built-in Magnet), Bore Size: 20 mm, Port Thread: Bores 6~25: M5, Bore 32: Rc 1/8, Stroke: 10 mm, Action: S (Single Acting Spring Return), Auto Switch: M9N--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, 0.5M, Lead Wire or Prewired Connector: 0.5 m (Or None in the Case of No Switch), Number: S (1 pc.)

Magnet: D (Built-in Magnet), Bore Size: 20 mm, Port Thread: Bores 6~25: M5, Bore 32: Rc 1/8, Stroke: 10 mm, Action: S (Single Acting Spring Return), Auto Switch: M9PV--Solid State , Gen. Purpose, 3 Wire PNP, Vertical, 0.5M, Lead Wire or Prewired Connector: L (3 m), Number: S (1 pc.)

Magnet: Built-in Magnet, Bore Size: 20 mm, Port Thread: Bores 6~25: M5, Bore 32: Rc 1/8, Stroke: 10 mm, Action: Single Acting Spring Return, Auto Switch: M9N--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, 0.5M, Lead Wire or Prewired Connector: 0.5 m (Or None in the Case of No Switch), Number: 1 pc.

Magnet: Built-in Magnet, Bore Size: 20 mm, Port Thread: Bores 6~25: M5, Bore 32: Rc 1/8, Stroke: 10 mm, Action: Single Acting Spring Return, Auto Switch: M9PV--Solid State , Gen. Purpose, 3 Wire PNP, Vertical, 0.5M, Lead Wire or Prewired Connector: 3 m, Number: 1 pc.

XG_-OMV0028

Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 : ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4., 5. 6. ,, 2 - / 1 1.5 () [] 3 - 1. 50mm336mm -6 Pa 10 MPa 0.450.6 -10 Pam 3/sec O :FKM 6.510 O :Kalrez R 4079 6.510 -9 Pam 3/sec -8 Pam 3/sec O :FKM 6.510 0.1MPa(abs) O :Kalrez R 4079 6.510 -7 Pam 3/sec -11 Pam 3/sec 6.510 5150() 560() s 0.61 *2 (D-A93

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

High Vacuum Slit Valve

Opening size 50336 : H 50mm,W 336mm Valve type 2 : Standard Cassette 3 : Half MESC Cassette The number of axes and sealing type 1 : axes and bellows Valve size 3 : for 300mm wafer Model of high vacuum slit valve Auto switch and connector Symbol Auto switch Connector NIL Not provided Not provided A D-A93 Lead wire length : 0.5m C Multi connector (C016 30C006 100 12 : AMP) (2 pcs in total,

Parallel Seal Type Slit Valve

Auto switch and the connector Parallel seal type slit valve Symbol Auto switch Connector Nil A Lead wire: 0.5m Multiple connector(AMP) *C016 30D006 100 12 made by AMP is recommended for the connector (female type) C D-A93 (2pcs) D-sub connector *CDE-9SF05 made by HIROSE ELECTRIC CO.,LTD. is recommended for the connector (female type). F 5 - 3.

Slit Valve

Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE

Magnet: D (Built-in Magnet), Bore Size: 20, Port Thread: Bore: 6, 10, 16, 20, 25, M5x0.8 ; Bore: ø32, Rc1/8, Stroke: 15mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Magnet: D (Built-in Magnet), Bore Size: 20, Port Thread: Bore: 6, 10, 16, 20, 25, M5x0.8 ; Bore: ø32, Rc1/8, Stroke: 20mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Magnet: D (Built-in Magnet), Bore Size: 20, Port Thread: Bore: 6, 10, 16, 20, 25, M5x0.8 ; Bore: ø32, Rc1/8, Stroke: 25mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Magnet: D (Built-in Magnet), Bore Size: 20, Port Thread: Bore: 6, 10, 16, 20, 25, M5x0.8 ; Bore: ø32, Rc1/8, Stroke: 30mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Magnet: D (Built-in Magnet), Bore Size: 20, Port Thread: Bore: 6, 10, 16, 20, 25, M5x0.8 ; Bore: ø32, Rc1/8, Stroke: 40mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Magnet: D (Built-in Magnet), Bore Size: 20, Port Thread: Bore: 6, 10, 16, 20, 25, M5x0.8 ; Bore: ø32, Rc1/8, Stroke: 50mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Magnet: D (Built-in Magnet), Bore Size: 20, Port Thread: Bore: 6, 10, 16, 20, 25, M5x0.8 ; Bore: ø32, Rc1/8, Stroke: 10mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Magnet: D (Built-in), Bore Size: 20 mm, Port Thread: M5x0.8; Rc1/8 for ø32, Stroke: 100 mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M

Magnet: D (Built-in), Bore Size: 20 mm, Port Thread: M5x0.8; Rc1/8 for ø32, Stroke: 60 mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M

Magnet: D (Built-in), Bore Size: 20 mm, Port Thread: M5x0.8; Rc1/8 for ø32, Stroke: 80 mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M