CJ2X/CUX/CQSX/CQ2X/CM2X

Operates smoothly with minimal stick-slip. 0.01 0.01 0.1 RZQ 1 10 Cylinder operating conditions Particle diameter (m) MI W S 10-CM2XB20-50 CEP1 CJ2XB10-60 CQSXB20-20D Evaluation of air purity inside chamber 100 Air cleaning system Particle concentration (particles/cf) Average speed 0.85 mm/s Average speed 0.88 mm/s 2.0 CE1 Average speed 0.43 mm/s Average speed 0.43 mm/s 2.0 Speed (mm/s) Displacement

CJ2X/CUX/CQSX/CQ2X/CM2X

Operates smoothly with minimal stick-slip. 0.01 0.01 0.1 RZQ 1 10 Cylinder operating conditions Particle diameter (m) MI W S 10-CM2XB20-50 CEP1 CJ2XB10-60 CQSXB20-20D Evaluation of air purity inside chamber 100 Air cleaning system Particle concentration (particles/cf) Average speed 0.85 mm/s Average speed 0.88 mm/s 2.0 CE1 Average speed 0.43 mm/s Average speed 0.43 mm/s 2.0 Speed (mm/s) Displacement

MTS

IC circuit 5 V, 12 V 3-wire (PNP) Relay, PLC 2-wire 12 V Grommet 5 V, 12 V 24 V 3-wire (NPN) 3-wire (PNP) IC circuit Diagnostic indication (2-color indication) 12 V 2-wire Lead wire length symbols: 0.5 mNil (Example) A93 3 mL (Example) A93L 5 mZ (Example) F9NWZ Since there are other applicable auto switches than listed, refer to page 8-10-22 for details.

Free Mount Cylinder

CDU16 CDU20 CDU25 CDU32 CDU6 CDU10 CDU16 CDU20 CDU25 CDU32 CDU6 CDU10 CDU16 CDU20 CDU25 CDU32 0.085 0.34 0.99 3.0 4.7 7.1 0.075 0.30 0.89 2.7 4.3 6.6 0.068 0.27 0.81 2.5 4.0 6.1 0.061 0.25 0.74 2.3 3.7 5.7 0.056 0.23 0.69 2.1 3.5 5.4 0.052 0.21 0.64 2.0 3.2 5.1 0.045 0.18 0.56 1.8 2.9 4.6 0.039 0.16 0.50 1.6 2.6 4.1 0.035 0.15 0.45 1.4 2.4 3.8 0.062 0.29 0.99 3.0 4.7 7.1 0.055 0.26 0.89

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Model Cushion Bore size (mm) 6 10 16 Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Rubber Air 10-/21-CDU6 10-/21-CDU10 10-/21-CDU16 Relief type Vacuum suction type 5, 10, 15, 20, 25, 30 10-/21-CDU20 20 5, 10, 15, 20, 25, 30, 40, 50 10-/21-CDU25 25 Non-lube Double acting Single rod M5 x 0.8 6 10 16 11-/22-CDU6 11-/22-CDU10 11-/22-CDU16 5, 10, 15, 20, 25, 30

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Model Cushion Bore size (mm) 6 10 16 Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Rubber Air 10-/21-CDU6 10-/21-CDU10 10-/21-CDU16 Relief type Vacuum suction type 5, 10, 15, 20, 25, 30 10-/21-CDU20 20 5, 10, 15, 20, 25, 30, 40, 50 10-/21-CDU25 25 Non-lube Double acting Single rod M5 x 0.8 11-/22-CDU6 11-/22-CDU10 11-/22-CDU16 6 10 16 5, 10, 15, 20, 25, 30

MXS

NPN) F9NV F9N 3 wire(NPN) Diagnostic indication (2 color) F9PV F9P 3 wire(PNP) P.5.3-39 F9BV F9B 2 wire Relay, PLC 24V Yes Grommet 12V F9NWV F9NW 3 wire(NPN) F9PWV F9PW P.5.3-66 3 wire(PNP) F9BWV F9BW 2 wire PLC: Programmable Logic Controller *Lead wire length 0.5m (Ex.) 3m L A93 A93L Specifications Specifications are same as the standard style.

Rotary Table/

A93 A93L F9NWZ (Example) (Example) (Example) 13 Rotary Table Series MSQ Specifications 10 20 30 50 70 100 200 Size Air (non-lube) Fluid Maximum operating pressure Minimum operating pressure 1MPa With adjustment bolt Note 1) 0.6MPa With internal shock absorber 0.1MPa Basic type 0.2MPa 0.1MPa High precision type 0 to 60C (with no condensation) Ambient and fluid temperature Rubber bumper With

MXS Series Air Slide Table

L A93L Note) Refer to P. 177 to 179 for further information of auto switch. PLC: Programmable Logic Controller Specifications Specifications are same as the standard type.

Table of Contents

Lead wire length symbols: 0.5 m Nil (Example) A93 3 m L (Example) A93L 5 m Z (Example) M9NZ Refer to page 8-28-27 for additional details and applicable auto switches other than the above types.

Magnet: D (Built-in Magnet), Bore Size: 10, Port Thread: Bore: 6, 10, 16, 20, 25, M5x0.8 ; Bore: ø32, Rc1/8, Stroke: 20mm

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 20, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.06～0.7, Cushion: Rubber cushion, Port thread

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 20, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.06～0.7, Cushion: Rubber cushion, Port thread

Table of Contents

MHY MHS-25D MHW MHSL3-16D MHSL3-20D MRHQ MHSL3-25D Misc.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

-25D -30D CDQ2B16-5D -10D -15D -20D -25D -30D CDQ2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQ2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQ2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQ2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQ2B50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQ2B63-10D -15D -20D -25D -30D -35D

CQ2

-25D -30D CQ2B16-5D -10D -15D -20D -25D -30D CQ2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQ2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQ2B63-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B80-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B100-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

-25D -30D -35D -40D -45D -50D -75D -100D CQ2KB50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2KB63-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2KB12-5D -10D -15D -20D -25D -30D CQ2KB16-5D -10D -15D -20D -25D -30D CQ2KB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQ2KB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQ2KB32-5D -10D -15D -20D -25D -30D -35D

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

/ 25D MHSL3-16D 6.1 Counterbore depth 5 4 4 4.5 54 3 MHSL3-20D 48 3 5 33 7.1 5 Counterbore depth 8 6(6.5) 36 Dimensions inside ( ) are for 25.

Compact Cylinder

CQP2B12-5D -10D -15D -20D -25D -30D CQP2B16-5D -10D -15D -20D -25D -30D CQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQP2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQP2B50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQP2B63-10D

NCQ2/CQ2

CDQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B12-5D -10D -15D -20D -25D -30D CDQP2B16-5D -10D -15D -20D -25D -30D CDQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQP2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D 40