High Vacuum Angle Valve

1 XGT 16 SYJ319XLAV16-90-2 SYJ519XLAV63-90-1 SYJ519XLAV63-90-1 25 40 50 63 80 100 160 XLAV CYV SYJ319XLAV16-90-2 SYJ3190(single) SYJ3290(double) XLCV16-90-1 XLFV SY3120--C4 (single) SY3220--C4 (double) XLCV XLGV Solenoid valve i Plate assembly o V114Initial exhaust solenoid valve !1 XLDV V114XLDV25-90-2 SYJ314XLDV40-90-2 Main exhaust solenoid valve !2 Plate assembly !

Compact Hydraulic Cylinder

, 8 ) 80 + 30 (n 2) (n = 2, 4, 6, 8 ) 90 + 30 (n 2) (n = 2, 4, 6, 8 ) D-A3m D-G39 D-K39 Different surfaces 100 + 100 (n 2) (n = 2, 4, 6, 8 ) 100 + 100 (n 2) (n = 2, 3, 4 ) Same surface 75 1 pc. 90 10 80 35 75 80 90 Different surfaces 55 75 80 90 Same surface 35 + 30 (n 2) (n = 2, 3, 4 ) 75 + 30 (n 2) (n = 2, 4, 6, 8 ) 90 + 30 (n 2) (n = 2, 4, 6, 8 ) 90 + 50 (n 2) (n = 2, 4, 6, 8 )

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MY1CW16/20 MY1MW16/20 MX B A MTS Reed Switch Solid State Switch D-A90(V), D-A93(V), D-A96(V) (mm) D-M9N(V), D-M9P(V), D-M9B(V) D-F9NW(V), D-F9PW(V), D-F9BW(V) MY 16 20 Mounting position 16 20 Mounting position Mounting position 16 20 93 94 A A A 73 74 70 90 CY 107 106 B B B 87 86 90 110 6.5 7 8.5 6.5 Operating range Note) Operating range Note) Operating range Note) 11 7.5 MG Courtesy of Steven

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65 90 90 90 90 90 Q 171 221 271 321 371 421 471 521 S 27 52 77 102 127 152 177 202 SS 128 153 178 203 228 253 278 303 Z 155 205 255 305 355 405 455 505 ZZ 199 249 299 349 399 449 499 549 Model CXWL25-25 CXWL25-50 CXWL25-75 CXWL25-100 CXWL25-125 CXWL25-150 CXWL25-175 CXWL25-200 8-26-44 43 Series CXWL Slide Unit: Build-in Shock Absorber Slide Bearing Type 25 With End Lock: CXWL25Stroke/25

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MK(2) Resistance RS Q G Adjustment dial RS H A RZQ Adjustment dial rotation angle MI W S 90 CEP1 Stopper direction can be changed within 90 CE1 CE2 The stopper lever can be rotated 90.

NCQ2/CQ2

70 75 80 85 90 95 100 55 60 65 70 75 80 85 90 95 100 125 150 D' Bolt part no.

Rotary Actuator/Vane Type

Weight [g] Vane type Single vane Double vane Size 10 15 20 30 40 10 15 20 30 40 Rotating angle 90 180 270 90 180 270 90 180 270 90 180 270 90 180 270 90 100 90 100 90 100 90 100 90 100 Rotary actuator body 42 42 42 64 63 62 130 129 127 248 243 238 465 454 443 58 59 71 74 145 168 268 288 478 524 Auto switch unit 15 20 28 38 43 15 20 28 38 43 Angle adjuster unit 30 47 90 150 203 30 47 90 150

Free Mount Cylinder

D-M9P D-M9NV D-M9B D-M9N D-M9PV D-M9BV Auto switch part no.

Compact Cylinder

45 50 55 60 65 70 75 80 85 90 50 55 60 65 70 75 80 85 90 95 120 145 45 50 55 60 65 70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 120 145 60 65 70 75 80 85 90 95 100 125 150 85 90 95 120 145 45 50 55 60 65 70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 120 145 60 65 70 75 80 85 90 95 100 125 150 CQ-M5 x 85L x 90L x 95L x 120L x 145L CQ-M5 x 45L x 50L x 55L x 60L x 65L x 70L x 75L x

Aluminum High Vacuum Angle Valve

0 o 83 0.2 2-1 112 q 114 90 O-ring Part No.

ISO Cylinder

M9BV M9B V V V v v Connector H7C J79C V V V V 3-wire (NPN) 5 V, 12 V M9NWV M9NW M9NWV M9NW V V V v v IC circuit 3-wire (PNP) M9PWV M9PW M9PWV M9PW V V V v v 2-wire 12 V M9BWV M9BW M9BWV M9BW V V V v v Diagnostic indication (2-color indicator) Relay, PLC Yes 24 V 3-wire (NPN) 5 V, 12 V M9NAV1 M9NA1 M9NAV1 M9NA1 v v V v v IC circuit 3-wire (PNP) M9PAV1 M9PA1 M9PAV1 M9PA1 v v V

Smooth Cylinder/Low Speed Cylinder

95 100 105 110 135 160 75 80 85 90 95 100 105 110 115 140 165 85 90 95 100 105 110 115 120 125 150 175 50 55 60 65 70 75 80 85 90 95 120 145 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 130 155 CQ-M5 x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 120L x 145L CQ-M5 x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 100L x 125L x 150L CQ-M6 x 65L

Air Cylinder Series CM2

D-X Individual -X Technical data 145 Series CM2 Single Clevis CX Z + Stroke CD B 90 A 51 40 3.2 6.8 20.5 40 57 LX LZ 6.8 x 3.4 7.5 Rotation Angle (mm) LX LZ Mounting Part no.

NCG/CG1

) 98 219.5 + l 226.5 210.5 239 + l 217(231) + l 100 208(222) 82 76(90) 98 223 + l 230 214 * ( ): Denotes the dimensions for long stroke.

Air Cylinder Series MB

Double Clevis Pivot Bracket B Z + Stroke DB DX DD 90 B 4 x DT A DS DH 4 x DR DL DU DO DO DC DE DU DA Rotating Angle (mm) Bore size (mm) A B A + B + 90 Bore size (mm) Part no.

Free Mount Cylinder Series CU

21 C D U 16 30 D M9B Cylinder stroke (mm) Copper, fluorine and silicon-free + low particle generation Number of auto switches 2 pcs. 1 pc. n pcs.

5

90 15 158 132 184 26 13.5 24 17 75 100 129 25+0.084 0 Double clevis pivot bracket B DX Z + Stroke DD DB B 90 4 x DT B A DS DH DE DC DO DO 4 x DR DA DL DU DU (mm) Part no.

Made to Order

Q 506 S 227 SS 269 Z 496 ZZ 528 Model CX2N15-225 CX2N15-250 CX2N15-275 CX2N15-300 102 263 15.5 90 556 252 294 546 578 288 15.5 90 606 277 319 596 628 114.5 313 15.5 90 656 302 344 646 678 127 Model F 96 L 241 K 20.5 P 90 Q 525 S 227 SS 282 Z 509 ZZ 553 CX2N25-225 CX2N25-250 CX2N25-275 CX2N25-300 108.5 266 20.5 90 575 252 307 559 603 121 291 20.5 90 625 277 332 609 653 133.5 316 20.5 90 675

Air Cylinder

Port side 90 When port is facing upward 50 Pivot bracket (T-bracket) 50 90 Port side Port side Double clevis cylinder 2. Push the one-touch connecting pin into the cylinder body (Double clevis) until it clicks and is firmly fastened.

Electric Actuator/Slider Type

torque should be set to 90% or less.