Made to Order

M L CXS series: 20, 25, 32 M L CXS series: 10, 15 Stroke Stroke CXS 10 M L CXS 15 M L CXS 20 M L CXS 25 M L CXS 32 M L 150 210 229 75 Model Stroke SS ZZ Z 80 135 152 50 120 175 192 70 150 205 222 80 90 145 162 60 80 100 100 155 172 110 165 182 175 257 287 125 180 197 200 282 312 120 180 199 65 125 207 237 150 232 262 110 170 189 125 185 204 110 192 222 110 180 204 120 202 232 120 190 214

Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

For Safety Instructions and Actuator Precautions, refer to pages 7-13-3 to 7-13-6. 125 140 160 180 200 Bore size (mm) 0.05 Minimum operating pressure Allowable Kinetic Energy (J) Caution 125 140 160 180 200 Bore size (mm) Snap Ring Installation/Removal Allowable kinetic energy 12.4 9.8 7.4 1.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Lx = 250 mm, Ly = 180 mm, Lz = 1000 mm 4.

15

Lx = 250 mm, Ly = 180 mm, Lz = 1000 mm 4.

Smooth Cylinder/Low Speed Cylinder

Auto switch model Lead wire (m) Load voltage Wiring (Output) Pre-wired connector Applicable load DC AC Indicator light Electrical entry Type Special function Perpendicular In-line 0.5 (Nil) 3 (L) 5 (Z) 1 (M) M9NV M9PV M9BV M9NWV M9PWV M9BWV M9NAV M9N M9P M9B M9NW M9PW M9BW M9NA 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire IC circuit 5

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

CRQ2 L H Shock absorber for low energy Shock absorber for high energy MSQ Port location/Rotation MRQ Standard type 180 2 3 4 5 Rotation 180 90 90 180 D3: Standard type, 90 2: Standard type, 180 Symmetric type 90 Standard type Connecting port Connecting port Refer to the table to the right. 20Connecting port position 5: Symmetric type, 90 4: Symmetric type, 180 Symmetric type Connecting port

Air Slide Table

L [mm] Allowable overhang L [mm] 180 MXQ Series interchangeable type MXQ 20A-mZm, MXQ 20-mZm Height Determine the overhang.

5

Load voltage Auto switch model Lead wire length (m) Pre-wired connector Applicable load DC AC Band mounting Rail mounting 0.5 (Nil) 1 (M) 3 (L) 5 (Z) None (N) Perpendicular In-line Perpendicular In-line Indicator light Type Special function Electrical entry Wiring (Output) M9NV M9N M9NV M9N V V V v v IC circuit 3-wire (NPN) 5 V,12 V 3-wire (PNP) M9PV M9P M9PV M9P V V V v v Grommet Solid

MHZ

Weight (g) End boss type (Symbol) Model E W K M Double acting Single acting MHZL2-10 70 70 80 80 80 MHZL2-16 170 170 180 180 180 MHZL2-20 310 310 330 330 330 MHZL2-25 535 535 580 580 580 12-2-69

MHZ

Weight (g) End boss type (Symbol) Model E W K M Double acting Single acting MHZL2-10 70 70 80 80 80 MHZL2-16 170 170 180 180 180 MHZL2-20 310 310 330 330 330 MHZL2-25 535 535 580 580 580 12-2-69

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

1 Compact Cylinder Series CQ2 12, 16, 20, 25, 32, 40, 50, 63, 80, 100, 125, 140, 160, 180, 200 With a short overall length, the space-saving cylinder helps to make various jigs and equipment more compact.

MY1

(kg) m 200 190 180 170 l 160 (4000) (4000) 150 140 130 (3200) (3200) m l 120 Weight (m) Caution 110 MY1B100 MY1B100 m 100 1. If the cylinder mounting surfaces are not measured accurately, using a side support may cause poor operation. Therefore, be sure to level the cylinder tube when mounting.

MRHQ

MHC Model MHT Note) Opening/Closing stroke (mm) Cylinder bore (mm) Rotating angle () Weight (g) MHY Action Model MHW 306 90 MRHQ10D 4 10 305 180 MRHQ 593 90 MRHQ16D 6 16 Misc. 591 180 Double acting 1055 90 MRHQ20D 10 20 D1052 180 1561 90 20MRHQ25D 14 25 1555 180 307 90 MRHQ10S MRHQ10C 4 10 306 180 MRHQ16S MRHQ16C 594 90 6 16 592 180 Single acting 1060 90 MRHQ20S MRHQ20C 10 20 1057 180 1566

2

220 180 558 70 464 190 558 70 88 276 88 1028 190 1332 464 190 472 220 180 220 180 448 83 70 590 INDEX 68 Series IDF100FS/125FS/150FS Options Refer to How to Order page 62 for optional models.

Rotary Actuator

Size: 30, 50, 63, 80, 100 Size: 30, 50, 63, 80, 100 90, 180 90, 180, 100, 190 90, 180 90, 180, 100, 190 30 50 to 100 30 50 to 100 Rotating angle Lightweight body by changing the body and the cover shape.

Auto Switch Guide

RS Q G RS H A Auto Switch Internal Circuit D-M9N, D-M9NV Weight (g) RZQ D-M9N(V) D-M9P(V) D-M9B(V) DC (+) Brown Auto switch model MI W S 8 8 7 0.5 Lead wire length (m) Main circuit of switch Main circuit of switch Main circuit of switch 41 41 38 3 CEP1 OUT Black 68 68 63 5 CE1 Dimensions DC () Blue D-M9V D-M9 CE2 M2.5 x 4l slotted set screw 500 (3000) (5000) D-M9P, D-M9PV Indicator light

Auto Switch Guide

Auto Switch Internal Circuit D-M9N, D-M9NV Weight (g) D-M9N(V) D-M9P(V) D-M9B(V) DC (+) Brown Auto switch model 8 8 7 0.5 Lead wire length (m) Main circuit of switch Main circuit of switch Main circuit of switch 41 41 38 3 OUT Black 68 68 63 5 Dimensions DC () Blue D-M9V D-M9 M2.5 x 4l slotted set screw 500 (3000) (5000) D-M9P, D-M9PV Indicator light M2.5 x 4l Slotted set screw Indicator

Auto Switch Guide

Data Reed switchD-A90(V)/A93(V)/A96(V) Solid state switchD-M9N(V)/M9P(V)/M9B(V) F9NW(V)/F59W/F9BW(V) F9BAL Auto Switch Mounting Bracket Part No.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

[mm] Model L A B n C D E Without lock With lock 11-LEJS63S-300656.5 696.5 306 370 6 1 200 180 11-LEJS63S-400756.5 796.5 406 470 8 2 400 80 11-LEJS63S-500856.5 896.5 506 570 8 2 400 180 11-LEJS63S-600956.5 996.5 606 670 10 3 600 80 11-LEJS63S-7001056.5 1096.5 706 770 10 3 600 180 11-LEJS63S-8001156.5 1196.5 806 870 12 4 800 80 11-LEJS63S-9001256.5 1296.5 906 970 12 4 800 180 11-LEJS63S-10001356.5