Table of Contents

D-A90V OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT () Blue (g) Weight D-A93V D-A96 D-A96V D-A90 D-A90V D-A93 D-A93V Model 8 8 Lead wire length: 0.5 m 6 6 6 6 LED Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 41 41 Lead wire length: 3 m 30 30 30 30 Resistor Reed switch Zener diode Dimensions OUT () Blue D-A90, D-A93, D-A96 Blue (Black) D-A96V DC (+)

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A93V A93 V V V No 100 V or less A90V A90 A90V A90 V V IC circuit Relay, PLC 24 V 12 V 2-wire Yes C73C A73C V V V V Connector No 24 V or less C80C A80C V V V V IC circuit Diagnostic indication (2-color indication) Grommet Yes A79W V V Water resistant type auto switches can be mounted on the above models, but in such case SMC cannot guarantee water resistance.

CQS

Mounting bolt M3 X 25l X 30l M3 X 25l X 30l M5 X 25l X 30l M5 X 30l X 35l Model C D 25 30 25 30 25 30 30 35 CQSB125S 10S CQSB165S 10S CQSB205S 10S CQSB25-5S 10S 6.5 6.5 6.5 8.5 Single acting/Spring extend Mounting bolt M3 X 25l X 30l M3 X 25l X 30l M5 X 25l X 30l M5 X 30l X 35l Model C D 25 30 25 30 25 30 30 35 CQSB125T 10T CQSB165T 10T CQSB205T 10T CQSB255T 10T 6.5 6.5 6.5 8.5 Note) The

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Mounting bolt Spring Return Spring Extend Model C Mounting bolt Model C Mounting bolt D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 CQ2B12-5S -10S CQ2B16-5S -10S CQ2B20-5S -10S CQ2B25-5S -10S CQ2B32-5S -10S CQ2B40-5S -10S CQ2B50-10S -20S CQ2B12-5T -10T CQ2B16-5T -10T CQ2B20-5T -10T CQ2B25-5T -10T CQ2B32-5T -10T CQ2B40-5T -10T CQ2B50-

CATALOG

21 61 ASV410F-03-10S 10 R(PT)3/8 17 23.3 18.5 24 85.2 77.7 83.2 75.7 52.8 45.3 36.7 30.4 21 23 63 ASV510F-02-10S 10 R(PT)1/4 17 23.3 18.5 30 90.2 84.2 88.2 82.2 55.6 49.6 39.8 33.8 21 23 69 T H R E A D S E A L ASV510F-02-12S 12 R(PT)1/4 17 25.7 20.9 30 91.8 85.8 89.8 83.8 55.6 49.6 39.8 33.8 22 24 74 ASV510F-03-10S 10 R(PT)3/8 17 23.3 18.5 30 90.2 84.2 88.2 82.2 55.6 49.6 41.8 35.5 21 23

Free Mount Cylinder Series CU

Note 4) ( ) in column W is the dimensions of D-A93.

A

25 1.66 PS-03 8.94 25 20.2 24V/48V/100V AC/DC D-A80 D-A80H 2 Wire No 100V -0.076 ~ -0.04 9.53 0.74 41 1.66 PS-04 8.94 32, 40 36.2 Reed Switch D-A73C Yes 24V -0.076 ~ -0.05 12.7 1 50 1.9 PS-05 11.89 50, 63 44.2 D-A80C No 24V 24V -0.117 ~ -0.065 19.05 1.17 64 2.73 PS-08 17.89 80 56.2 D-A79W Yes 24V -0.117 ~ -0.065 22.23 1.17 72 2.73 PS-10 20.85 100 64.2 D-A90 2 Wire 24V/48V/100V AC/DC No D-A93

Parallel Style Air Gripper Series MHZ

MHZ2-25S/MHZL2-25S MHZ2-6S/MHZA2-6S 4 80 Pressure 0.7 MPa Pressure 0.7 MPa Gripping force (N) Gripping force (N) 0.6 MPa 3 60 F 0.6 MPa 0.5 MPa 0.5 MPa 2 40 0.4 MPa 0.4 MPa 0.3 MPa 1 20 0.3 MPa 0.25 MPa F 0 10 20 30 0 20 40 60 80 100 Gripping point L (mm) Gripping point L (mm) External Grip MHZ2-10S/MHZL2-10S MHZ2-32S MHZA2, MHZ2, MHZL2 12 250 Pressure 0.7 MPa 10 Pressure 0.7 MPa 200 0.6

Table of Contents

D-A90(V)/D-A93(V)/D-A96(V) Direct Mounting Style .

Magnet: D (Built-in), Mounting: B (Through Hole, Both Ends Tapped), Bore Size: 20mm, Stroke: 10mm, Action: S (Single Acting Spring Return)

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 10, Cylinder Operation Method: Single Acting, Spring Return, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: High rigidity / high precision high class guide, Environment, Applications: Standard, Cushion: None, Operating Pressure(MPa): 0.18 to 1.0, Specification: Built-in magnet, Body Options

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 10, Cylinder Operation Method: Single Acting, Spring Return, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: High rigidity / high precision high class guide, Environment, Applications: Standard, Cushion: None, Operating Pressure(MPa): 0.18 to 1.0, Specification: Built-in magnet, Body Options

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

D-A90, A90V OUT () Brown Contact protection box CD-P11 CD-P12 Reed switch (g) Mass OUT () Blue D-A90 D-A90V D-A93 D-A93V D-A96 D-A96V Model D-A93, A93V 6 6 6 6 8 8 0.5 3 Lead wire length (m) LED Brown OUT (+) Brown 30 30 30 30 41 41 Contact protection box CD-P11 CD-P12 Resistor Dimensions (mm) Reed switch Zener diode D-A90/D-A93/D-A96 OUT () Blue 2 2.8 4.5 Blue 2.7 4 24.5 (22) D-A96, A96V

XG_-OMV0028

Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 : ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4., 5. 6. ,, 2 - / 1 1.5 () [] 3 - 1. 50mm336mm -6 Pa 10 MPa 0.450.6 -10 Pam 3/sec O :FKM 6.510 O :Kalrez R 4079 6.510 -9 Pam 3/sec -8 Pam 3/sec O :FKM 6.510 0.1MPa(abs) O :Kalrez R 4079 6.510 -7 Pam 3/sec -11 Pam 3/sec 6.510 5150() 560() s 0.61 *2 (D-A93

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

High Vacuum Slit Valve

Opening size 50336 : H 50mm,W 336mm Valve type 2 : Standard Cassette 3 : Half MESC Cassette The number of axes and sealing type 1 : axes and bellows Valve size 3 : for 300mm wafer Model of high vacuum slit valve Auto switch and connector Symbol Auto switch Connector NIL Not provided Not provided A D-A93 Lead wire length : 0.5m C Multi connector (C016 30C006 100 12 : AMP) (2 pcs in total,

Parallel Seal Type Slit Valve

Auto switch and the connector Parallel seal type slit valve Symbol Auto switch Connector Nil A Lead wire: 0.5m Multiple connector(AMP) *C016 30D006 100 12 made by AMP is recommended for the connector (female type) C D-A93 (2pcs) D-sub connector *CDE-9SF05 made by HIROSE ELECTRIC CO.,LTD. is recommended for the connector (female type). F 5 - 3.

Slit Valve

Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE

Magnet: D (Built-in), Mounting: B (Through Hole, Both Ends Tapped), Bore Size: 20mm, Stroke: 10mm, Action: S (Single Acting Spring Return), Option: Standard (Rod End Female Thread), Auto Switch: A90--Reed, AC Volt, Horizontal, 0.5M

Magnet: D (Built-in), Mounting: B (Through Hole, Both Ends Tapped), Bore Size: 20mm, Stroke: 10mm, Action: S (Single Acting Spring Return), Option: Standard (Rod End Female Thread), Auto Switch: A90--Reed, AC Volt, Horizontal, 0.5M, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: S (1 pc.)