Smooth Cylinder

CQSYB12 -30DCM 0.020 0.018 0.016 0.014 0.012 0.010 0.008 0.006 0.004 0.002 0.000 0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Pressure MPa Pressure equivalent to sliding resistance Average speed Average speed 2.52mm/s Speed mm/s Displacement mm Displacement mm 3.0 CA2D50-200N 2.60 mm/s 0 Speed wave form -3.0 Operating direction OUT Operating direction IN CA2YD50-200 30 Displacement wave form 15 5 seconds

Smooth Cylinder Series CQSY

CQSYB12 -30DCM 0.020 0.018 0.016 0.014 0.012 0.010 0.008 0.006 0.004 0.002 0.000 0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Pressure MPa Pressure equivalent to sliding resistance Average speed Average speed 2.52mm/s Speed mm/s Displacement mm Displacement mm 3.0 CA2D50-200N 2.60 mm/s 0 Speed wave form -3.0 Operating direction OUT Operating direction IN CA2YD50-200 30 Displacement wave form 15 5 seconds

Smooth Cylinder/Low Speed Cylinder

Pressure can be controlled regardless of its direction. 0.020 0.018 0.016 0.014 0.012 0.010 0.008 0.006 0.004 0.002 0.000 0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Pressure MPa Pressure equivalent to sliding resistance MPa Smooth operation with less sticking and slipping REA CA2D50-200N CQSYB12 -30DCM Average speed Average speed 2.52mm/s Speed mm/s Displacement mm 3.0 REB 2.60 mm/s 0 Speed wave form

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

ML2B 0.020 0.018 0.016 0.014 0.012 0.010 0.008 0.006 0.004 0.002 0.000 0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Pressure MPa Pressure equivalent to sliding resistance Smooth operation with less sticking and slipping CA2D50-200N CQSYB12 -30DCM C J G5-S Average speed Average speed 2.52mm/s Speed mm/s Displacement mm Displacement mm 3.0 CV 2.60 mm/s 0 Speed wave form -3.0 MVGQ CA2YD50-200 Operating direction

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

ML2B 0.020 0.018 0.016 0.014 0.012 0.010 0.008 0.006 0.004 0.002 0.000 0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Pressure MPa Pressure equivalent to sliding resistance Smooth operation with less sticking and slipping CA2D50-200N CQSYB12 -30DCM C J G5-S Average speed Average speed 2.52mm/s Speed mm/s Displacement mm Displacement mm 3.0 CV 2.60 mm/s 0 Speed wave form -3.0 MVGQ CA2YD50-200 Operating direction

MHZ

Lead wire length symbols:0.5 mNil (Example) M9BV 3 m L (Example) M9NL 5 m Z (Example) F59AZ (Example) When ordering with an air gripper When ordering auto switches only 61 D-F8PLMHZ 2-16D-F8NS61 Auto switches marked with a symbol are produced upon receipt of order. Note 1) Take note of hysteresis with 2 color indication type switches.

MHZ

Lead wire length symbols:0.5 mNil (Example) M9BV 3 m L (Example) M9NL 5 m Z (Example) F59AZ (Example) When ordering with an air gripper When ordering auto switches only 61 D-F8PLMHZ 2-16D-F8NS61 Auto switches marked with a symbol are produced upon receipt of order. Note 1) Take note of hysteresis with 2 color indication type switches.

CXT

Model CXTl12 CXTl16 CXTl20 CXTl25 CXTl32 CXTl40 Cylinder CDQSB20 CDQSB12 CDQSB16 CDQSB25 CDQ2A32 CDQ2A40 Stroke Standard stroke CQSB12-PS CQSB16-PS CQSB20-PS CQSB25-PS CQ2B32-PS CQ2B40-PS Long stroke(1) CQSB12-L-PS CQSB16-L-PS CQSB20-L-PS CQSB25-L-PS CQ2A32-L-PS CQ2A40-L-PS Note 1) The same type of the part is equipped to the head side for the long stroke style. 3.8-7 Series CXT 12 to 25

Platform Cylinder Series CXT

Replacement Parts/Seal Kit Cylinder Model CXT12 CXT16 CXT20 CXT25 CXT32 CXT40 DCDQSB12 CDQSB16 CDQSB20 CDQSB25 CDQ2A32 CDQ2A40 Stroke Standard stroke CQSB12-PS CQSB16-PS CQSB20-PS CQSB25-PS CQ2B32-PS CQ2B40-PS -X Long stroke CQSB12-L-PS CQSB16-L-PS CQSB20-L-PS CQSB25-L-PS CQ2A32-L-PS CQ2A40-L-PS Seal kit includes @7, @8 and @9. Order the seal kit with the kit number.

CXT

Cylinder Model CXT12 CXT16 CXT20 CXT25 CXT32 CXT40 CDQSB12 CDQSB16 CDQSB20 CDQSB25 CDQ2A32 CDQ2A40 Stroke Standard stroke CQSB12-PS CQSB16-PS CQSB20-PS CQSB25-PS CQ2B32-PS CQ2B40-PS Long stroke CQSB12-L-PS CQSB16-L-PS CQSB20-L-PS CQSB25-L-PS CQ2A32-L-PS CQ2A40-L-PS 8-27-7 8 Series CXT Dimensions: 12 to 25 S + Stroke X + Stroke H 4-LD through, counterbore B depth C 4-MM HP Depth M Back side

Table of Contents

Cylinder Model CXT12 CXT16 CXT20 CXT25 CXT32 CXT40 CDQSB12 CDQSB16 CDQSB20 CDQSB25 CDQ2A32 CDQ2A40 Stroke Standard stroke CQSB12-PS CQSB16-PS CQSB20-PS CQSB25-PS CQ2B32-PS CQ2B40-PS Long stroke CQSB12-L-PS CQSB16-L-PS CQSB20-L-PS CQSB25-L-PS CQ2A32-L-PS CQ2A40-L-PS 8-27-7 8 Series CXT Dimensions: 12 to 25 S + Stroke X + Stroke H 4-LD through, counterbore B depth C 4-MM HP Depth M Back side

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-M9NL 7.

XM, XY

-M9NL u Seal material and its changed part Seal material Seal material Compound No.

NCQ8

L M9NL 197in (5 m) .

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Solid state switches marked "" are produced upon receipt of order.

Magnet: D (Built-in), Mounting: B (Through Hole, Both Ends Tapped), Bore Size: 16mm, Stroke: 30mm, Option: C (Rubber Bumper), Auto Switch: No Switch, Lead Wire or Prewired Connector: M (1m)

Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 30, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: High rigidity / high precision high class guide, Environment, Applications: Standard, Cushion: Rubber cushion, Operating Pressure(MPa): 0.07 to 1.0, Specification: Built-in magnet

Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 30, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: High rigidity / high precision high class guide, Environment, Applications: Standard, Cushion: Rubber cushion, Operating Pressure(MPa): 0.07 to 1.0, Specification: Built-in magnet

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

Lead wire length symbols:0.5 m Nil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Refer to page 12-13-25 for solid state switch with pre-wire connector. 12-5-4 5 2 Finger Rotary Actuated Air Gripper Series MHR2/MDHR2 30 Model/Specifications Nominal size 10 15 20 Action Double acting Gripping force (N) (1) External grip 12 24 33 58 (Effective value) at 0.5 MPa Internal grip 12 34

Rotary Actuated Air Gripper MHR2, MDHR2/MHR3, MDHR3

Lead wire length symbols: 0.5 m Nil (Example) M9N 1 m M (Example) M9NM 3 m L (Example) M9NL 5 m Z (Example) M9NZ MA D491 Series MHR2/MDHR2 Model/Specifications Nominal size 20 10 15 30 Double acting Action Gripping force (N) (1) External grip 33 12 58 24 (Effective value) at 0.5 MPa Internal grip 34 12 59 25 Finger closing width (mm) Finger opening width (mm) 16 10 19 14 Opening/ Closing