Vacuum

Flat with rib Male Thread/Weight List 1 0 12 21 29l 46 20 25 72 3 1 . 7 1 3 1 5 21 29.! 46 20 25 72 1 . 8 1 6 1 8 12.121.5130r 46.4 20 67t 25 72: 26 29 3 l 29 29 30 ZPR16 31 57 61 68 Applicable Tube 64 64 65 68 69 67 70 '5h2" tube may be substituted for4mm.

Vacuum

Flat with rib Male Thread/Weight List 1 0 12 21 29l 46 20 25 72 3 1 . 7 1 3 1 5 21 29.! 46 20 25 72 1 . 8 1 6 1 8 12.121.5130r 46.4 20 67t 25 72: 26 29 3 l 29 29 30 ZPR16 31 57 61 68 Applicable Tube 64 64 65 68 69 67 70 '5h2" tube may be substituted for4mm.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

50 20 7 15 7.

OMU0023

(1 bit) 145 20 10 85 15 10 Reading of internal parameters (7 words) 270 40 15 150 25 10 Operation mode selection 165 25 10 95 15 10 Commands for virtual I/O operation by serial communication 195 30 15 110 20 10 Reading of alarm history (4 words) 215 30 15 120 20 10 Clearing of alarm history 245 35 15 135 20 10 Confirmation of communication connection 165 25 10 95 15 10 The communication

OMS0020

(guideline) Command 2400bps 19200bps 57600bps EE 145 25 10 EU 105 20 10 AB 105 20 10 MO 245 35 15 MD 115 20 10 OE 130 20 10 Calculation Example) Number of controllers connected: 5 Required transmission commands: EE,EU, AB Communication response time ( 25 + 20 + 20 ) x 5 = 325 ms Response time (guidline) 500 450 400 Response time [ms] EE 350 EU,AB,MD,OE 300 MO 250 200 150 100 50 0 1 2 3 4

Digital Flow Switch ( compatible)

(Refer to the table below) Default setting Model (Output specification) OUT1 OUT2 A NPN NPN B PNP PNP C NPN Analogue 1 to 5 V D NPN Analogue 4 to 20 mA E PNP Analogue 1 to 5 V F PNP Analogue 4 to 20 mA L PNP L2 PNP PNP L3 PNP Analogue 1 to 5 V L4 PNP Analogue 4 to 20 mA -35No.PF-OMZ0002-A [F 0] Selection of reference condition, unit selection function, switch output specifications.

PFxx-OMX0007

(Displays 0 when the value is (Displays 0 when the value is below 10 L/min) below 20 L/min) 20 to 1050 L/min 40 to 2100 L/min 2.0 0 to 2%F.S. (Displays 0 when the value is (Displays 0 when the value is below 20 L/min) below 40 L/min) 30 to 1050 L/min 60 to 2100 L/min 3.0 0 to 3%F.S.

Digital Flow Switch ( compatible)

Setting of analogue output (voltage output only) Press the UP or DOWN button to select 1 to 5 V output or 0 to 10 V output. : Only 4 to 20 mA is available for current output. The display will be [4-20] and not settable. Press the SET button to set. Move on to analogue free range mode setting.

Digital Gap Checker ( compatible)

For ISA3-G type, the range is up to 280, with a hysteresis of 20.

4-channel Flow Monitor ( compatible)

Normal output Reversed output -100No.PF-OMA1011-A Specifications Model PFG20# series PF2A5 PF3W5 PF2D5 Applicable flow sensor 10 50 11 21 51 04 20 40 11 25 04 20 40 Rated flow range 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 0.5 to 4 2 to 16 5 to 40 10 to 100 50 to 250 0.4 to 4 1.8 to 20 4 to 40 L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min 0.35 to 1.7 to

PFxx-OMX0002

Do not use a cable longer than 20 m. Wire the DC(-) line (blue) as close as possible to the power supply.

Multi-channel Digital Sensor Monitor ( compatible)

Conductor size (mm2) Overall diameter (mm) Colour of cover SMC product No. (1 pc.) 0.8 to 1.0 Red ZS-28-C 26-24 0.14-0.2 1.0 to 1.2 Yellow ZS-28-C-1 (28) (0.08) 1.2 to 1.6 Orange ZS-28-C-2 1.0 to 1.2 Green ZS-28-C-3 1.2 to 1.6 Blue ZS-28-C-4 22-20 0.3-0.5 1.6 to 2.0 Gray ZS-28-C-5 Do not cut the insulator.

Direct Solenoid

o.s, ercept dyo6.. op.Btins PEssubs: 28" vacuum 0 PStc {20 Kgt/cnf)' NVS/tl|-4 Prssure Fanoe: 28" vacul 3@ rlc {20 Kgrcnti) Lakage: Irort lo pon (nt.maD not to .xce.d 0.005 coblc fl pr hinut at 1@ PstG (6.7 toam) Mel4islr: all houshc !6n. atumhum d|6 cas|ngg $oor arld stc@ a40F 61atnt6r. p.5rlvated ad hdtJoai.d lo 5a52 FE*wdl c 96* orlnot Blra N, sp&.r end dl.nl hou3in!

I

Model Exhaust Piping/Port location Port size Applicable P R 1 A,B P It A,B Valve NWsF5-20Common Side /Base Side/Base fop/ Valve %NPrF I %flPlf LNPIF %NPIF NVFSO20 DXT 156-20-1TA EXH relocation spacer NVV5F5-20 156-19-14 NW5F5-20 " Spacer is used when it is nscessary to exhaust from certain valves individually.

3M/SMseries

Model Exhaust Piping/Port location Port size Applicable P R 1 A,B P It A,B Valve NWsF5-20Common Side /Base Side/Base fop/ Valve %NPrF I %flPlf LNPIF %NPIF NVFSO20 DXT 156-20-1TA EXH relocation spacer NVV5F5-20 156-19-14 NW5F5-20 " Spacer is used when it is nscessary to exhaust from certain valves individually.

LC6D/LC6C

19 1 Communication connector 2 c Cable length: 0.2m 20 View c 315

Series LX Dedicated Stepper Motor Driver and Positioning Driver Series LC6D/LC6C

19 1 Communication connector 2 c Cable length: 0.2m 20 View c 315 Switches Solid State Switches Applicable Actuators Series LXF, LXP, LXS D-F9 Series LJ1 (non-standard motor) D-Y7GL Cannot be mounted on Series LXF with ball screw specification.

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

This is a legacy product. Please contact us for the latest version.sales@ocaire.com